Matches in SemOpenAlex for { <https://semopenalex.org/work/W2791696097> ?p ?o ?g. }
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- W2791696097 endingPage "861" @default.
- W2791696097 startingPage "853" @default.
- W2791696097 abstract "Aiming to produce qualified molybdenum (Mo) target for sputter deposition, Mo targets were prepared by utilizing powder metallurgy method in this research. The influences of sintering modes, press working modes and total deformation on microstructure and properties of Mo target were studied. Furthermore, magnetron sputtering test was conducted in vacuum environment by using the prepared Mo targets to deposit Mo thin films of which the surface morphologies, electrical conductivities, and crystalline properties were analyzed. The results show that vacuum presintering followed by hydrogen sintering mode can greatly decrease the impurity contents of Mo slabs. It is favorable to obtain the Mo target with fine and uniform grains on size and distribution by using forging mode or forging cogging mode and more than 70% total deformation. With the increase of sputtering currents of Mo target, the grain size and the thickness of the Mo thin films significantly rise, while FWHM of diffraction peaks of grain orientation (110), surface roughness and electrical resistivity of thin films decrease accordingly." @default.
- W2791696097 created "2018-03-29" @default.
- W2791696097 creator A5042930225 @default.
- W2791696097 creator A5042931329 @default.
- W2791696097 creator A5045440825 @default.
- W2791696097 creator A5063258989 @default.
- W2791696097 date "2018-02-01" @default.
- W2791696097 modified "2023-09-30" @default.
- W2791696097 title "Preparation and Influencing Factors of Molybdenum Targets and Magnetron-Sputter-Deposited Molybdenum Thin Films" @default.
- W2791696097 cites W1854252869 @default.
- W2791696097 cites W1975108422 @default.
- W2791696097 cites W2031934827 @default.
- W2791696097 cites W2033012663 @default.
- W2791696097 cites W2043517940 @default.
- W2791696097 cites W2049494686 @default.
- W2791696097 cites W2052678750 @default.
- W2791696097 cites W2054591086 @default.
- W2791696097 cites W2056917388 @default.
- W2791696097 cites W2077362980 @default.
- W2791696097 doi "https://doi.org/10.4028/www.scientific.net/msf.913.853" @default.
- W2791696097 hasPublicationYear "2018" @default.
- W2791696097 type Work @default.
- W2791696097 sameAs 2791696097 @default.
- W2791696097 citedByCount "3" @default.
- W2791696097 countsByYear W27916960972019 @default.
- W2791696097 countsByYear W27916960972023 @default.
- W2791696097 crossrefType "journal-article" @default.
- W2791696097 hasAuthorship W2791696097A5042930225 @default.
- W2791696097 hasAuthorship W2791696097A5042931329 @default.
- W2791696097 hasAuthorship W2791696097A5045440825 @default.
- W2791696097 hasAuthorship W2791696097A5063258989 @default.
- W2791696097 hasConcept C107365816 @default.
- W2791696097 hasConcept C119599485 @default.
- W2791696097 hasConcept C127413603 @default.
- W2791696097 hasConcept C159985019 @default.
- W2791696097 hasConcept C171250308 @default.
- W2791696097 hasConcept C19067145 @default.
- W2791696097 hasConcept C191897082 @default.
- W2791696097 hasConcept C192191005 @default.
- W2791696097 hasConcept C192562407 @default.
- W2791696097 hasConcept C22423302 @default.
- W2791696097 hasConcept C2777581544 @default.
- W2791696097 hasConcept C549387045 @default.
- W2791696097 hasConcept C61427134 @default.
- W2791696097 hasConcept C69990965 @default.
- W2791696097 hasConcept C87976508 @default.
- W2791696097 hasConcept C96494537 @default.
- W2791696097 hasConceptScore W2791696097C107365816 @default.
- W2791696097 hasConceptScore W2791696097C119599485 @default.
- W2791696097 hasConceptScore W2791696097C127413603 @default.
- W2791696097 hasConceptScore W2791696097C159985019 @default.
- W2791696097 hasConceptScore W2791696097C171250308 @default.
- W2791696097 hasConceptScore W2791696097C19067145 @default.
- W2791696097 hasConceptScore W2791696097C191897082 @default.
- W2791696097 hasConceptScore W2791696097C192191005 @default.
- W2791696097 hasConceptScore W2791696097C192562407 @default.
- W2791696097 hasConceptScore W2791696097C22423302 @default.
- W2791696097 hasConceptScore W2791696097C2777581544 @default.
- W2791696097 hasConceptScore W2791696097C549387045 @default.
- W2791696097 hasConceptScore W2791696097C61427134 @default.
- W2791696097 hasConceptScore W2791696097C69990965 @default.
- W2791696097 hasConceptScore W2791696097C87976508 @default.
- W2791696097 hasConceptScore W2791696097C96494537 @default.
- W2791696097 hasLocation W27916960971 @default.
- W2791696097 hasOpenAccess W2791696097 @default.
- W2791696097 hasPrimaryLocation W27916960971 @default.
- W2791696097 hasRelatedWork W1976068479 @default.
- W2791696097 hasRelatedWork W2033451903 @default.
- W2791696097 hasRelatedWork W2045020792 @default.
- W2791696097 hasRelatedWork W2055093469 @default.
- W2791696097 hasRelatedWork W2219169289 @default.
- W2791696097 hasRelatedWork W2350705764 @default.
- W2791696097 hasRelatedWork W3005262979 @default.
- W2791696097 hasRelatedWork W3015701583 @default.
- W2791696097 hasRelatedWork W3124958984 @default.
- W2791696097 hasRelatedWork W1968862920 @default.
- W2791696097 hasVolume "913" @default.
- W2791696097 isParatext "false" @default.
- W2791696097 isRetracted "false" @default.
- W2791696097 magId "2791696097" @default.
- W2791696097 workType "article" @default.