Matches in SemOpenAlex for { <https://semopenalex.org/work/W2792583256> ?p ?o ?g. }
- W2792583256 endingPage "627" @default.
- W2792583256 startingPage "619" @default.
- W2792583256 abstract "This study reports on the properties of nitrogen doped titanium dioxide (TiO2) thin films considering the application as a transparent conducting oxide (TCO). Sets of thin films were prepared by sputtering a titanium target under oxygen atmosphere on a quartz substrate at 400 or 500 °C. Films were then doped at the same temperature by 150 eV nitrogen ions. The films were prepared in Anatase phase which was maintained after doping. Up to 30 at% nitrogen concentration was obtained at the surface, as determined by in situ X-ray photoelectron spectroscopy (XPS). Such high nitrogen concentration at the surface lead to nitrogen diffusion into the bulk which reached about 25 nm. Hall measurements indicate that average carrier density reached over 1019 cm−3 with mobility in the range of 0.1–1 cm2 V−1 s−1. Resistivity about 3 · 10−1 Ω cm could be obtained with 85% light transmission at 550 nm. These results indicate that low energy implantation is an effective technique for TiO2 doping that allows an accurate control of the doping process independently from the TiO2 preparation. Moreover, this doping route seems promising to attain high doping levels without significantly affecting the film structure. Such approach could be relevant for preparation of N:TiO2 transparent conducting electrodes (TCE)." @default.
- W2792583256 created "2018-03-29" @default.
- W2792583256 creator A5012184621 @default.
- W2792583256 creator A5019976903 @default.
- W2792583256 creator A5047548884 @default.
- W2792583256 creator A5048224989 @default.
- W2792583256 creator A5083160356 @default.
- W2792583256 creator A5087320867 @default.
- W2792583256 date "2018-06-01" @default.
- W2792583256 modified "2023-10-01" @default.
- W2792583256 title "Study of nitrogen ion doping of titanium dioxide films" @default.
- W2792583256 cites W1507133799 @default.
- W2792583256 cites W1592086694 @default.
- W2792583256 cites W1675460008 @default.
- W2792583256 cites W1966634721 @default.
- W2792583256 cites W1972528599 @default.
- W2792583256 cites W1974940953 @default.
- W2792583256 cites W1980344632 @default.
- W2792583256 cites W1980721440 @default.
- W2792583256 cites W1982381330 @default.
- W2792583256 cites W1983911872 @default.
- W2792583256 cites W1990479209 @default.
- W2792583256 cites W1992214743 @default.
- W2792583256 cites W1992384064 @default.
- W2792583256 cites W1994161602 @default.
- W2792583256 cites W1998870645 @default.
- W2792583256 cites W2003038623 @default.
- W2792583256 cites W2003120420 @default.
- W2792583256 cites W2004496247 @default.
- W2792583256 cites W2006228240 @default.
- W2792583256 cites W2006841956 @default.
- W2792583256 cites W2009145360 @default.
- W2792583256 cites W2017062950 @default.
- W2792583256 cites W2019539206 @default.
- W2792583256 cites W2020012800 @default.
- W2792583256 cites W2030584707 @default.
- W2792583256 cites W2032321222 @default.
- W2792583256 cites W2035479485 @default.
- W2792583256 cites W2038435855 @default.
- W2792583256 cites W2044547332 @default.
- W2792583256 cites W2052953974 @default.
- W2792583256 cites W2056616404 @default.
- W2792583256 cites W2061425191 @default.
- W2792583256 cites W2070511428 @default.
- W2792583256 cites W2077235512 @default.
- W2792583256 cites W2080289887 @default.
- W2792583256 cites W2083631627 @default.
- W2792583256 cites W2088952940 @default.
- W2792583256 cites W2090557140 @default.
- W2792583256 cites W2093725825 @default.
- W2792583256 cites W2098134586 @default.
- W2792583256 cites W2106603672 @default.
- W2792583256 cites W2111062994 @default.
- W2792583256 cites W2113339896 @default.
- W2792583256 cites W2129051413 @default.
- W2792583256 cites W2137150045 @default.
- W2792583256 cites W2185231696 @default.
- W2792583256 cites W2952869018 @default.
- W2792583256 doi "https://doi.org/10.1016/j.apsusc.2018.02.259" @default.
- W2792583256 hasPublicationYear "2018" @default.
- W2792583256 type Work @default.
- W2792583256 sameAs 2792583256 @default.
- W2792583256 citedByCount "19" @default.
- W2792583256 countsByYear W27925832562018 @default.
- W2792583256 countsByYear W27925832562019 @default.
- W2792583256 countsByYear W27925832562020 @default.
- W2792583256 countsByYear W27925832562021 @default.
- W2792583256 countsByYear W27925832562022 @default.
- W2792583256 countsByYear W27925832562023 @default.
- W2792583256 crossrefType "journal-article" @default.
- W2792583256 hasAuthorship W2792583256A5012184621 @default.
- W2792583256 hasAuthorship W2792583256A5019976903 @default.
- W2792583256 hasAuthorship W2792583256A5047548884 @default.
- W2792583256 hasAuthorship W2792583256A5048224989 @default.
- W2792583256 hasAuthorship W2792583256A5083160356 @default.
- W2792583256 hasAuthorship W2792583256A5087320867 @default.
- W2792583256 hasBestOaLocation W27925832561 @default.
- W2792583256 hasConcept C111368507 @default.
- W2792583256 hasConcept C113196181 @default.
- W2792583256 hasConcept C127313418 @default.
- W2792583256 hasConcept C127413603 @default.
- W2792583256 hasConcept C159985019 @default.
- W2792583256 hasConcept C161790260 @default.
- W2792583256 hasConcept C171250308 @default.
- W2792583256 hasConcept C175708663 @default.
- W2792583256 hasConcept C178790620 @default.
- W2792583256 hasConcept C179104552 @default.
- W2792583256 hasConcept C185592680 @default.
- W2792583256 hasConcept C19067145 @default.
- W2792583256 hasConcept C191897082 @default.
- W2792583256 hasConcept C192562407 @default.
- W2792583256 hasConcept C22423302 @default.
- W2792583256 hasConcept C2777289219 @default.
- W2792583256 hasConcept C2777402863 @default.
- W2792583256 hasConcept C2777593239 @default.
- W2792583256 hasConcept C42360764 @default.
- W2792583256 hasConcept C43617362 @default.
- W2792583256 hasConcept C49040817 @default.