Matches in SemOpenAlex for { <https://semopenalex.org/work/W2792675979> ?p ?o ?g. }
- W2792675979 endingPage "80" @default.
- W2792675979 startingPage "77" @default.
- W2792675979 abstract "In this contribution, we report on the growth of Ge inside extremely thin 16-nm thick cavities through selective lateral growth of Ge on 300 mm silicon-on-insulator (0 0 1) substrates. We showed that the density of defects depends on the cavity shape, with extended defects such as micro-twins and stacking faults observed on the top surface along the 〈1 1 0〉 directions when the Si/Ge growth interface is along the 〈1 1 0〉 directions. The optimization of the cavity shape, by tuning the etching conditions, leads to a significant reduction of the defects in the Ge nanostructures, and this approach paves the road towards the co-integration of Si and Ge based devices." @default.
- W2792675979 created "2018-03-29" @default.
- W2792675979 creator A5003859223 @default.
- W2792675979 creator A5006120746 @default.
- W2792675979 creator A5017288533 @default.
- W2792675979 creator A5048253788 @default.
- W2792675979 creator A5057033374 @default.
- W2792675979 creator A5059320393 @default.
- W2792675979 creator A5061155056 @default.
- W2792675979 creator A5064343078 @default.
- W2792675979 creator A5066003606 @default.
- W2792675979 creator A5072752426 @default.
- W2792675979 creator A5080637728 @default.
- W2792675979 date "2018-07-01" @default.
- W2792675979 modified "2023-10-18" @default.
- W2792675979 title "Confined selective lateral epitaxial growth of 16-nm thick Ge nanostructures on SOI substrates: Advantages and challenges" @default.
- W2792675979 cites W1123021659 @default.
- W2792675979 cites W1556957619 @default.
- W2792675979 cites W1616007709 @default.
- W2792675979 cites W1969950458 @default.
- W2792675979 cites W1987404433 @default.
- W2792675979 cites W2000999566 @default.
- W2792675979 cites W2009692934 @default.
- W2792675979 cites W2012898403 @default.
- W2792675979 cites W2020064731 @default.
- W2792675979 cites W2028133105 @default.
- W2792675979 cites W2034252237 @default.
- W2792675979 cites W2047805201 @default.
- W2792675979 cites W2067256284 @default.
- W2792675979 cites W2093130747 @default.
- W2792675979 cites W2146747949 @default.
- W2792675979 cites W2589158471 @default.
- W2792675979 cites W2591183133 @default.
- W2792675979 cites W4320805313 @default.
- W2792675979 cites W4381157736 @default.
- W2792675979 doi "https://doi.org/10.1016/j.apsusc.2018.03.104" @default.
- W2792675979 hasPublicationYear "2018" @default.
- W2792675979 type Work @default.
- W2792675979 sameAs 2792675979 @default.
- W2792675979 citedByCount "1" @default.
- W2792675979 countsByYear W27926759792018 @default.
- W2792675979 crossrefType "journal-article" @default.
- W2792675979 hasAuthorship W2792675979A5003859223 @default.
- W2792675979 hasAuthorship W2792675979A5006120746 @default.
- W2792675979 hasAuthorship W2792675979A5017288533 @default.
- W2792675979 hasAuthorship W2792675979A5048253788 @default.
- W2792675979 hasAuthorship W2792675979A5057033374 @default.
- W2792675979 hasAuthorship W2792675979A5059320393 @default.
- W2792675979 hasAuthorship W2792675979A5061155056 @default.
- W2792675979 hasAuthorship W2792675979A5064343078 @default.
- W2792675979 hasAuthorship W2792675979A5066003606 @default.
- W2792675979 hasAuthorship W2792675979A5072752426 @default.
- W2792675979 hasAuthorship W2792675979A5080637728 @default.
- W2792675979 hasConcept C100460472 @default.
- W2792675979 hasConcept C110738630 @default.
- W2792675979 hasConcept C171250308 @default.
- W2792675979 hasConcept C178790620 @default.
- W2792675979 hasConcept C185592680 @default.
- W2792675979 hasConcept C186187911 @default.
- W2792675979 hasConcept C192562407 @default.
- W2792675979 hasConcept C2779227376 @default.
- W2792675979 hasConcept C33220542 @default.
- W2792675979 hasConcept C33347731 @default.
- W2792675979 hasConcept C49040817 @default.
- W2792675979 hasConcept C53143962 @default.
- W2792675979 hasConcept C544956773 @default.
- W2792675979 hasConcept C550623735 @default.
- W2792675979 hasConceptScore W2792675979C100460472 @default.
- W2792675979 hasConceptScore W2792675979C110738630 @default.
- W2792675979 hasConceptScore W2792675979C171250308 @default.
- W2792675979 hasConceptScore W2792675979C178790620 @default.
- W2792675979 hasConceptScore W2792675979C185592680 @default.
- W2792675979 hasConceptScore W2792675979C186187911 @default.
- W2792675979 hasConceptScore W2792675979C192562407 @default.
- W2792675979 hasConceptScore W2792675979C2779227376 @default.
- W2792675979 hasConceptScore W2792675979C33220542 @default.
- W2792675979 hasConceptScore W2792675979C33347731 @default.
- W2792675979 hasConceptScore W2792675979C49040817 @default.
- W2792675979 hasConceptScore W2792675979C53143962 @default.
- W2792675979 hasConceptScore W2792675979C544956773 @default.
- W2792675979 hasConceptScore W2792675979C550623735 @default.
- W2792675979 hasLocation W27926759791 @default.
- W2792675979 hasLocation W27926759792 @default.
- W2792675979 hasLocation W27926759793 @default.
- W2792675979 hasOpenAccess W2792675979 @default.
- W2792675979 hasPrimaryLocation W27926759791 @default.
- W2792675979 hasRelatedWork W1482397683 @default.
- W2792675979 hasRelatedWork W1972608542 @default.
- W2792675979 hasRelatedWork W2074502480 @default.
- W2792675979 hasRelatedWork W2091008601 @default.
- W2792675979 hasRelatedWork W2148274155 @default.
- W2792675979 hasRelatedWork W2150931894 @default.
- W2792675979 hasRelatedWork W2364281481 @default.
- W2792675979 hasRelatedWork W2788903434 @default.
- W2792675979 hasRelatedWork W2990644426 @default.
- W2792675979 hasRelatedWork W581292172 @default.
- W2792675979 hasVolume "445" @default.
- W2792675979 isParatext "false" @default.