Matches in SemOpenAlex for { <https://semopenalex.org/work/W2792869846> ?p ?o ?g. }
- W2792869846 endingPage "104" @default.
- W2792869846 startingPage "104" @default.
- W2792869846 abstract "To meet the radiosonde requirement of high sensitivity and linearity, this study designs and implements a monolithically integrated array-type piezoresistive intelligent pressure sensor system which is made up of two groups of four pressure sensors with the pressure range of 0–50 kPa and 0–100 kPa respectively. First, theoretical models and ANSYS (version 14.5, Canonsburg, PA, USA) finite element method (FEM) are adopted to optimize the parameters of array sensor structure. Combing with FEM stress distribution results, the size and material characteristics of the array-type sensor are determined according to the analysis of the sensitivity and the ratio of signal to noise (SNR). Based on the optimized parameters, the manufacture and packaging of array-type sensor chips are then realized by using the standard complementary metal-oxide-semiconductor (CMOS) and microelectromechanical system (MEMS) process. Furthermore, an intelligent acquisition and processing system for pressure and temperature signals is achieved. The S3C2440A microprocessor (Samsung, Seoul, Korea) is regarded as the core part which can be applied to collect and process data. In particular, digital signal storage, display and transmission are realized by the application of a graphical user interface (GUI) written in QT/E. Besides, for the sake of compensating the temperature drift and nonlinear error, the data fusion technique is proposed based on a wavelet neural network improved by genetic algorithm (GA-WNN) for average measuring signal. The GA-WNN model is implemented in hardware by using a S3C2440A microprocessor. Finally, the results of calibration and test experiments achieved with the temperature ranges from −20 to 20 °C show that: (1) the nonlinear error and the sensitivity of the array-type pressure sensor are 8330 × 10−4 and 0.052 mV/V/kPa in the range of 0–50 kPa, respectively; (2) the nonlinear error and the sensitivity are 8129 × 10−4 and 0.020 mV/V/kPa in the range of 50–100 kPa, respectively; (3) the overall error of the intelligent pressure sensor system is maintained at ±0.252% within the hybrid composite range (0–100 kPa). The involved results indicate that the developed array-type composite pressure sensor has good performance, which can provide a useful reference for the development of multi-range MEMS piezoresistive pressure sensor." @default.
- W2792869846 created "2018-03-29" @default.
- W2792869846 creator A5002466280 @default.
- W2792869846 creator A5006118292 @default.
- W2792869846 creator A5050285687 @default.
- W2792869846 creator A5050747300 @default.
- W2792869846 creator A5075373893 @default.
- W2792869846 creator A5081316721 @default.
- W2792869846 creator A5082886013 @default.
- W2792869846 date "2018-02-28" @default.
- W2792869846 modified "2023-09-29" @default.
- W2792869846 title "Design, Fabrication, and Implementation of an Array-Type MEMS Piezoresistive Intelligent Pressure Sensor System" @default.
- W2792869846 cites W1657059030 @default.
- W2792869846 cites W1733315115 @default.
- W2792869846 cites W1968127993 @default.
- W2792869846 cites W1969265144 @default.
- W2792869846 cites W1969744919 @default.
- W2792869846 cites W1970287347 @default.
- W2792869846 cites W1973459136 @default.
- W2792869846 cites W1974184470 @default.
- W2792869846 cites W1975146617 @default.
- W2792869846 cites W1975204914 @default.
- W2792869846 cites W1980570488 @default.
- W2792869846 cites W1982075763 @default.
- W2792869846 cites W1987031878 @default.
- W2792869846 cites W1989491796 @default.
- W2792869846 cites W1995265640 @default.
- W2792869846 cites W2009642504 @default.
- W2792869846 cites W2012434981 @default.
- W2792869846 cites W2029162061 @default.
- W2792869846 cites W2029440305 @default.
- W2792869846 cites W2035394251 @default.
- W2792869846 cites W2045344305 @default.
- W2792869846 cites W2048913425 @default.
- W2792869846 cites W2049636387 @default.
- W2792869846 cites W2068216833 @default.
- W2792869846 cites W2070042666 @default.
- W2792869846 cites W2085867252 @default.
- W2792869846 cites W2087361228 @default.
- W2792869846 cites W2089390689 @default.
- W2792869846 cites W2095243348 @default.
- W2792869846 cites W2115489808 @default.
- W2792869846 cites W2300653931 @default.
- W2792869846 cites W2341838124 @default.
- W2792869846 cites W2409711034 @default.
- W2792869846 cites W2509265111 @default.
- W2792869846 cites W2530744772 @default.
- W2792869846 cites W2556301272 @default.
- W2792869846 doi "https://doi.org/10.3390/mi9030104" @default.
- W2792869846 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/6187660" @default.
- W2792869846 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/30424038" @default.
- W2792869846 hasPublicationYear "2018" @default.
- W2792869846 type Work @default.
- W2792869846 sameAs 2792869846 @default.
- W2792869846 citedByCount "12" @default.
- W2792869846 countsByYear W27928698462018 @default.
- W2792869846 countsByYear W27928698462019 @default.
- W2792869846 countsByYear W27928698462020 @default.
- W2792869846 countsByYear W27928698462021 @default.
- W2792869846 countsByYear W27928698462022 @default.
- W2792869846 crossrefType "journal-article" @default.
- W2792869846 hasAuthorship W2792869846A5002466280 @default.
- W2792869846 hasAuthorship W2792869846A5006118292 @default.
- W2792869846 hasAuthorship W2792869846A5050285687 @default.
- W2792869846 hasAuthorship W2792869846A5050747300 @default.
- W2792869846 hasAuthorship W2792869846A5075373893 @default.
- W2792869846 hasAuthorship W2792869846A5081316721 @default.
- W2792869846 hasAuthorship W2792869846A5082886013 @default.
- W2792869846 hasBestOaLocation W27928698461 @default.
- W2792869846 hasConcept C115961682 @default.
- W2792869846 hasConcept C119599485 @default.
- W2792869846 hasConcept C119857082 @default.
- W2792869846 hasConcept C127413603 @default.
- W2792869846 hasConcept C135628077 @default.
- W2792869846 hasConcept C154945302 @default.
- W2792869846 hasConcept C198490522 @default.
- W2792869846 hasConcept C199360897 @default.
- W2792869846 hasConcept C21200559 @default.
- W2792869846 hasConcept C24326235 @default.
- W2792869846 hasConcept C2779843651 @default.
- W2792869846 hasConcept C41008148 @default.
- W2792869846 hasConcept C41325743 @default.
- W2792869846 hasConcept C66251956 @default.
- W2792869846 hasConcept C66938386 @default.
- W2792869846 hasConcept C78519656 @default.
- W2792869846 hasConcept C99498987 @default.
- W2792869846 hasConceptScore W2792869846C115961682 @default.
- W2792869846 hasConceptScore W2792869846C119599485 @default.
- W2792869846 hasConceptScore W2792869846C119857082 @default.
- W2792869846 hasConceptScore W2792869846C127413603 @default.
- W2792869846 hasConceptScore W2792869846C135628077 @default.
- W2792869846 hasConceptScore W2792869846C154945302 @default.
- W2792869846 hasConceptScore W2792869846C198490522 @default.
- W2792869846 hasConceptScore W2792869846C199360897 @default.
- W2792869846 hasConceptScore W2792869846C21200559 @default.
- W2792869846 hasConceptScore W2792869846C24326235 @default.
- W2792869846 hasConceptScore W2792869846C2779843651 @default.
- W2792869846 hasConceptScore W2792869846C41008148 @default.