FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2793035771> ?p ?o ?g. }

• W2793035771 abstract "Classical SEM metrology, CD-SEM, uses low data rate and extensive frame-averaging technique to achieve high-quality SEM imaging for high-precision metrology. The drawbacks include prolonged data collection time and larger photoresist shrinkage due to excess electron dosage. This paper will introduce a novel e-beam metrology system based on a high data rate, large probe current, and ultra-low noise electron optics design. At the same level of metrology precision, this high speed e-beam metrology system could significantly shorten data collection time and reduce electron dosage. In this work, the data collection speed is higher than 7,000 images per hr. Moreover, a novel large field of view (LFOV) capability at high resolution was enabled by an advanced electron deflection system design. The area coverage by LFOV is >100x larger than classical SEM. Superior metrology precision throughout the whole image has been achieved, and high quality metrology data could be extracted from full field. This new capability on metrology will further improve metrology data collection speed to support the need for large volume of metrology data from OPC model calibration of next generation technology. The shrinking EPE (Edge Placement Error) budget places more stringent requirement on OPC model accuracy, which is increasingly limited by metrology errors. In the current practice of metrology data collection and data processing to model calibration flow, CD-SEM throughput becomes a bottleneck that limits the amount of metrology measurements available for OPC model calibration, impacting pattern coverage and model accuracy especially for 2D pattern prediction. To address the trade-off in metrology sampling and model accuracy constrained by the cycle time requirement, this paper employs the high speed e-beam metrology system and a new computational software solution to take full advantage of the large volume data and significantly reduce both systematic and random metrology errors. The new computational software enables users to generate large quantity of highly accurate EP (Edge Placement) gauges and significantly improve design pattern coverage with up to 5X gain in model prediction accuracy on complex 2D patterns. Overall, this work showed >2x improvement in OPC model accuracy at a faster model turn-around time." @default.
• W2793035771 created "2018-03-29" @default.
• W2793035771 creator A5002120183 @default.
• W2793035771 creator A5011297032 @default.
• W2793035771 creator A5013139227 @default.
• W2793035771 creator A5022843014 @default.
• W2793035771 creator A5026318269 @default.
• W2793035771 creator A5027089758 @default.
• W2793035771 creator A5030895366 @default.
• W2793035771 creator A5034855502 @default.
• W2793035771 creator A5035599180 @default.
• W2793035771 creator A5039837606 @default.
• W2793035771 creator A5041032672 @default.
• W2793035771 creator A5044595618 @default.
• W2793035771 creator A5053742110 @default.
• W2793035771 creator A5057101829 @default.
• W2793035771 creator A5071443019 @default.
• W2793035771 creator A5072234325 @default.
• W2793035771 creator A5073216396 @default.
• W2793035771 creator A5074140526 @default.
• W2793035771 creator A5074951825 @default.
• W2793035771 creator A5076791579 @default.
• W2793035771 creator A5077730208 @default.
• W2793035771 creator A5086529957 @default.
• W2793035771 creator A5086567612 @default.
• W2793035771 creator A5087361329 @default.
• W2793035771 creator A5087594655 @default.
• W2793035771 creator A5088321136 @default.
• W2793035771 date "2018-03-22" @default.
• W2793035771 modified "2023-10-17" @default.
• W2793035771 title "Massive metrology using fast e-beam technology improves OPC model accuracy by >2x at faster turnaround time" @default.
• W2793035771 cites W1978280934 @default.
• W2793035771 cites W2013234996 @default.
• W2793035771 doi "https://doi.org/10.1117/12.2299971" @default.
• W2793035771 hasPublicationYear "2018" @default.
• W2793035771 type Work @default.
• W2793035771 sameAs 2793035771 @default.
• W2793035771 citedByCount "3" @default.
• W2793035771 countsByYear W27930357712019 @default.
• W2793035771 countsByYear W27930357712022 @default.
• W2793035771 crossrefType "proceedings-article" @default.
• W2793035771 hasAuthorship W2793035771A5002120183 @default.
• W2793035771 hasAuthorship W2793035771A5011297032 @default.
• W2793035771 hasAuthorship W2793035771A5013139227 @default.
• W2793035771 hasAuthorship W2793035771A5022843014 @default.
• W2793035771 hasAuthorship W2793035771A5026318269 @default.
• W2793035771 hasAuthorship W2793035771A5027089758 @default.
• W2793035771 hasAuthorship W2793035771A5030895366 @default.
• W2793035771 hasAuthorship W2793035771A5034855502 @default.
• W2793035771 hasAuthorship W2793035771A5035599180 @default.
• W2793035771 hasAuthorship W2793035771A5039837606 @default.
• W2793035771 hasAuthorship W2793035771A5041032672 @default.
• W2793035771 hasAuthorship W2793035771A5044595618 @default.
• W2793035771 hasAuthorship W2793035771A5053742110 @default.
• W2793035771 hasAuthorship W2793035771A5057101829 @default.
• W2793035771 hasAuthorship W2793035771A5071443019 @default.
• W2793035771 hasAuthorship W2793035771A5072234325 @default.
• W2793035771 hasAuthorship W2793035771A5073216396 @default.
• W2793035771 hasAuthorship W2793035771A5074140526 @default.
• W2793035771 hasAuthorship W2793035771A5074951825 @default.
• W2793035771 hasAuthorship W2793035771A5076791579 @default.
• W2793035771 hasAuthorship W2793035771A5077730208 @default.
• W2793035771 hasAuthorship W2793035771A5086529957 @default.
• W2793035771 hasAuthorship W2793035771A5086567612 @default.
• W2793035771 hasAuthorship W2793035771A5087361329 @default.
• W2793035771 hasAuthorship W2793035771A5087594655 @default.
• W2793035771 hasAuthorship W2793035771A5088321136 @default.
• W2793035771 hasConcept C111919701 @default.
• W2793035771 hasConcept C120665830 @default.
• W2793035771 hasConcept C121332964 @default.
• W2793035771 hasConcept C168834538 @default.
• W2793035771 hasConcept C176553487 @default.
• W2793035771 hasConcept C195766429 @default.
• W2793035771 hasConcept C41008148 @default.
• W2793035771 hasConceptScore W2793035771C111919701 @default.
• W2793035771 hasConceptScore W2793035771C120665830 @default.
• W2793035771 hasConceptScore W2793035771C121332964 @default.
• W2793035771 hasConceptScore W2793035771C168834538 @default.
• W2793035771 hasConceptScore W2793035771C176553487 @default.
• W2793035771 hasConceptScore W2793035771C195766429 @default.
• W2793035771 hasConceptScore W2793035771C41008148 @default.
• W2793035771 hasLocation W27930357711 @default.
• W2793035771 hasOpenAccess W2793035771 @default.
• W2793035771 hasPrimaryLocation W27930357711 @default.
• W2793035771 hasRelatedWork W1527837723 @default.
• W2793035771 hasRelatedWork W2009735156 @default.
• W2793035771 hasRelatedWork W2068321301 @default.
• W2793035771 hasRelatedWork W2119541949 @default.
• W2793035771 hasRelatedWork W2793035771 @default.
• W2793035771 hasRelatedWork W3131642596 @default.
• W2793035771 hasRelatedWork W3185657740 @default.
• W2793035771 hasRelatedWork W3207145419 @default.
• W2793035771 hasRelatedWork W4226292218 @default.
• W2793035771 hasRelatedWork W4229082991 @default.
• W2793035771 isParatext "false" @default.
• W2793035771 isRetracted "false" @default.
• W2793035771 magId "2793035771" @default.
• W2793035771 workType "article" @default.