FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2793196031> ?p ?o ?g. }

• W2793196031 endingPage "5983" @default.
• W2793196031 startingPage "5983" @default.
• W2793196031 abstract "Optical properties of poly-silicon material are investigated to be integrated in new silicon photonics devices, such as capacitive modulators. Test structure fabrication is done on 300 mm wafer using LPCVD deposition: 300 nm thick amorphous silicon layers are deposited on thermal oxide, followed by solid phase crystallization anneal. Rib waveguides are fabricated and optical propagation losses measured at 1.31 µm. Physical analysis (TEM ASTAR, AFM and SIMS) are used to assess the origin of losses. Optimal deposition and annealing conditions have been defined, resulting in 400 nm-wide rib waveguides with only 9.2-10 dB/cm losses." @default.
• W2793196031 created "2018-03-29" @default.
• W2793196031 creator A5000000199 @default.
• W2793196031 creator A5005575981 @default.
• W2793196031 creator A5028217390 @default.
• W2793196031 creator A5033364386 @default.
• W2793196031 creator A5042980714 @default.
• W2793196031 creator A5043600763 @default.
• W2793196031 creator A5045699875 @default.
• W2793196031 creator A5056496679 @default.
• W2793196031 creator A5064329828 @default.
• W2793196031 creator A5064476521 @default.
• W2793196031 creator A5081814244 @default.
• W2793196031 creator A5082882360 @default.
• W2793196031 creator A5086789562 @default.
• W2793196031 creator A5090402069 @default.
• W2793196031 creator A5091096177 @default.
• W2793196031 date "2018-02-27" @default.
• W2793196031 modified "2023-09-27" @default.
• W2793196031 title "Low loss poly-silicon for high performance capacitive silicon modulators" @default.
• W2793196031 cites W1985403404 @default.
• W2793196031 cites W2008911650 @default.
• W2793196031 cites W2019883289 @default.
• W2793196031 cites W2029131122 @default.
• W2793196031 cites W2032888314 @default.
• W2793196031 cites W2056099731 @default.
• W2793196031 cites W2079748319 @default.
• W2793196031 cites W2080240036 @default.
• W2793196031 cites W2116900766 @default.
• W2793196031 cites W2127282927 @default.
• W2793196031 cites W2331472363 @default.
• W2793196031 cites W2432368995 @default.
• W2793196031 cites W2468172470 @default.
• W2793196031 cites W2567578621 @default.
• W2793196031 cites W2611487404 @default.
• W2793196031 cites W2626901188 @default.
• W2793196031 cites W2766653645 @default.
• W2793196031 cites W2786757125 @default.
• W2793196031 cites W2951934107 @default.
• W2793196031 cites W4236672780 @default.
• W2793196031 doi "https://doi.org/10.1364/oe.26.005983" @default.
• W2793196031 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/29529794" @default.
• W2793196031 hasPublicationYear "2018" @default.
• W2793196031 type Work @default.
• W2793196031 sameAs 2793196031 @default.
• W2793196031 citedByCount "9" @default.
• W2793196031 countsByYear W27931960312019 @default.
• W2793196031 countsByYear W27931960312020 @default.
• W2793196031 countsByYear W27931960312021 @default.
• W2793196031 countsByYear W27931960312022 @default.
• W2793196031 crossrefType "journal-article" @default.
• W2793196031 hasAuthorship W2793196031A5000000199 @default.
• W2793196031 hasAuthorship W2793196031A5005575981 @default.
• W2793196031 hasAuthorship W2793196031A5028217390 @default.
• W2793196031 hasAuthorship W2793196031A5033364386 @default.
• W2793196031 hasAuthorship W2793196031A5042980714 @default.
• W2793196031 hasAuthorship W2793196031A5043600763 @default.
• W2793196031 hasAuthorship W2793196031A5045699875 @default.
• W2793196031 hasAuthorship W2793196031A5056496679 @default.
• W2793196031 hasAuthorship W2793196031A5064329828 @default.
• W2793196031 hasAuthorship W2793196031A5064476521 @default.
• W2793196031 hasAuthorship W2793196031A5081814244 @default.
• W2793196031 hasAuthorship W2793196031A5082882360 @default.
• W2793196031 hasAuthorship W2793196031A5086789562 @default.
• W2793196031 hasAuthorship W2793196031A5090402069 @default.
• W2793196031 hasAuthorship W2793196031A5091096177 @default.
• W2793196031 hasBestOaLocation W27931960311 @default.
• W2793196031 hasConcept C119423029 @default.
• W2793196031 hasConcept C120665830 @default.
• W2793196031 hasConcept C121332964 @default.
• W2793196031 hasConcept C136525101 @default.
• W2793196031 hasConcept C139159486 @default.
• W2793196031 hasConcept C142724271 @default.
• W2793196031 hasConcept C159985019 @default.
• W2793196031 hasConcept C160671074 @default.
• W2793196031 hasConcept C178790620 @default.
• W2793196031 hasConcept C185592680 @default.
• W2793196031 hasConcept C192562407 @default.
• W2793196031 hasConcept C204787440 @default.
• W2793196031 hasConcept C2776390347 @default.
• W2793196031 hasConcept C2777431650 @default.
• W2793196031 hasConcept C2777855556 @default.
• W2793196031 hasConcept C2779105228 @default.
• W2793196031 hasConcept C2779667780 @default.
• W2793196031 hasConcept C49040817 @default.
• W2793196031 hasConcept C544956773 @default.
• W2793196031 hasConcept C56052488 @default.
• W2793196031 hasConcept C57410435 @default.
• W2793196031 hasConcept C71924100 @default.
• W2793196031 hasConceptScore W2793196031C119423029 @default.
• W2793196031 hasConceptScore W2793196031C120665830 @default.
• W2793196031 hasConceptScore W2793196031C121332964 @default.
• W2793196031 hasConceptScore W2793196031C136525101 @default.
• W2793196031 hasConceptScore W2793196031C139159486 @default.
• W2793196031 hasConceptScore W2793196031C142724271 @default.
• W2793196031 hasConceptScore W2793196031C159985019 @default.
• W2793196031 hasConceptScore W2793196031C160671074 @default.
• W2793196031 hasConceptScore W2793196031C178790620 @default.

• next