FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2793263411> ?p ?o ?g. }

• W2793263411 abstract "In this work, the deposition of SiO x films from O 2 /hexamethyldisiloxan (HMDSO) or Ar/HMDSO mixtures in an inductively coupled plasma is investigated. Substrate temperature and electron density are measured during the deposition process. Furthermore, the deposited layers are analyzed with a profilometer (thickness), infrared absorption spectroscopy (FTIR), and X‐ray photoelectron spectroscopy (XPS). Processes with continuous and pulsed HMDSO flows are compared to characterize the effect of surface treatment of a grown layer. Pure O 2 or Ar plasmas between the HMDSO gas flow pulses can offer a “post‐oxidation” or “post‐treatment” of the grown films. The discharge dynamics during the different phases are also investigated by time‐resolved electron density measurements. This approach has led to formation of carbon and Si‐OH group free SiO x films even without addition of O 2 gas under atmospheric pressure conditions." @default.
• W2793263411 created "2018-03-29" @default.
• W2793263411 creator A5009765608 @default.
• W2793263411 creator A5012960939 @default.
• W2793263411 creator A5056806530 @default.
• W2793263411 creator A5069362918 @default.
• W2793263411 creator A5081357040 @default.
• W2793263411 date "2018-01-23" @default.
• W2793263411 modified "2023-09-26" @default.
• W2793263411 title "Deposition of SiO_x coatings by inductively coupled plasma: Effect of pulsed hexamethyldisiloxan flow" @default.
• W2793263411 cites W1971338170 @default.
• W2793263411 cites W1981343459 @default.
• W2793263411 cites W1982847157 @default.
• W2793263411 cites W1989721285 @default.
• W2793263411 cites W2000392301 @default.
• W2793263411 cites W2001495152 @default.
• W2793263411 cites W2008012430 @default.
• W2793263411 cites W2011993510 @default.
• W2793263411 cites W2017475432 @default.
• W2793263411 cites W2025023225 @default.
• W2793263411 cites W2027722687 @default.
• W2793263411 cites W2033125037 @default.
• W2793263411 cites W2033185055 @default.
• W2793263411 cites W2040654349 @default.
• W2793263411 cites W2049275520 @default.
• W2793263411 cites W2059195969 @default.
• W2793263411 cites W2063252604 @default.
• W2793263411 cites W2072494311 @default.
• W2793263411 cites W2074699664 @default.
• W2793263411 cites W2076307356 @default.
• W2793263411 cites W2080821929 @default.
• W2793263411 cites W2091615102 @default.
• W2793263411 cites W2108751529 @default.
• W2793263411 cites W2124362564 @default.
• W2793263411 cites W2133391101 @default.
• W2793263411 cites W2152087547 @default.
• W2793263411 cites W2333664589 @default.
• W2793263411 cites W2543533605 @default.
• W2793263411 doi "https://doi.org/10.1002/ppap.201700186" @default.
• W2793263411 hasPublicationYear "2018" @default.
• W2793263411 type Work @default.
• W2793263411 sameAs 2793263411 @default.
• W2793263411 citedByCount "6" @default.
• W2793263411 countsByYear W27932634112018 @default.
• W2793263411 countsByYear W27932634112019 @default.
• W2793263411 countsByYear W27932634112020 @default.
• W2793263411 countsByYear W27932634112023 @default.
• W2793263411 crossrefType "journal-article" @default.
• W2793263411 hasAuthorship W2793263411A5009765608 @default.
• W2793263411 hasAuthorship W2793263411A5012960939 @default.
• W2793263411 hasAuthorship W2793263411A5056806530 @default.
• W2793263411 hasAuthorship W2793263411A5069362918 @default.
• W2793263411 hasAuthorship W2793263411A5081357040 @default.
• W2793263411 hasConcept C111368507 @default.
• W2793263411 hasConcept C113196181 @default.
• W2793263411 hasConcept C121332964 @default.
• W2793263411 hasConcept C127313418 @default.
• W2793263411 hasConcept C127413603 @default.
• W2793263411 hasConcept C151730666 @default.
• W2793263411 hasConcept C159985019 @default.
• W2793263411 hasConcept C160892712 @default.
• W2793263411 hasConcept C171250308 @default.
• W2793263411 hasConcept C175708663 @default.
• W2793263411 hasConcept C185592680 @default.
• W2793263411 hasConcept C19067145 @default.
• W2793263411 hasConcept C192562407 @default.
• W2793263411 hasConcept C26771246 @default.
• W2793263411 hasConcept C2777289219 @default.
• W2793263411 hasConcept C2779227376 @default.
• W2793263411 hasConcept C2816523 @default.
• W2793263411 hasConcept C42360764 @default.
• W2793263411 hasConcept C43617362 @default.
• W2793263411 hasConcept C62520636 @default.
• W2793263411 hasConcept C64297162 @default.
• W2793263411 hasConcept C82706917 @default.
• W2793263411 hasConcept C86803240 @default.
• W2793263411 hasConcept C95974651 @default.
• W2793263411 hasConceptScore W2793263411C111368507 @default.
• W2793263411 hasConceptScore W2793263411C113196181 @default.
• W2793263411 hasConceptScore W2793263411C121332964 @default.
• W2793263411 hasConceptScore W2793263411C127313418 @default.
• W2793263411 hasConceptScore W2793263411C127413603 @default.
• W2793263411 hasConceptScore W2793263411C151730666 @default.
• W2793263411 hasConceptScore W2793263411C159985019 @default.
• W2793263411 hasConceptScore W2793263411C160892712 @default.
• W2793263411 hasConceptScore W2793263411C171250308 @default.
• W2793263411 hasConceptScore W2793263411C175708663 @default.
• W2793263411 hasConceptScore W2793263411C185592680 @default.
• W2793263411 hasConceptScore W2793263411C19067145 @default.
• W2793263411 hasConceptScore W2793263411C192562407 @default.
• W2793263411 hasConceptScore W2793263411C26771246 @default.
• W2793263411 hasConceptScore W2793263411C2777289219 @default.
• W2793263411 hasConceptScore W2793263411C2779227376 @default.
• W2793263411 hasConceptScore W2793263411C2816523 @default.
• W2793263411 hasConceptScore W2793263411C42360764 @default.
• W2793263411 hasConceptScore W2793263411C43617362 @default.
• W2793263411 hasConceptScore W2793263411C62520636 @default.
• W2793263411 hasConceptScore W2793263411C64297162 @default.
• W2793263411 hasConceptScore W2793263411C82706917 @default.
• W2793263411 hasConceptScore W2793263411C86803240 @default.

• next