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- W2793438367 abstract "In this paper the results of architecture development, layout designof analytical microsystem-on-chip with the structures silicon-on-insulator (SOI) and its elements schemotechnical computer simulation for determine their electrical and time characteristics are presented." @default.
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- W2793438367 date "2016-06-15" @default.
- W2793438367 modified "2023-09-27" @default.
- W2793438367 title "Design and Simulation Elements of Analytical Microsystem-on-Chip With the Structures Silicon-on-Insulator" @default.
- W2793438367 doi "https://doi.org/10.15330/pcss.17.2.275-280" @default.
- W2793438367 hasPublicationYear "2016" @default.
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