Matches in SemOpenAlex for { <https://semopenalex.org/work/W2794535870> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W2794535870 abstract "Abstract The continuing need for nanometer-sized particle removal without altering the underlying substrate properties (i.e., material loss, film damage, dielectric constant shift) has kept cryogenic cleaning as a viable cleaning technology where wet cleaning techniques are not possible or are difficult to implement. The current generation of cryogenic aerosols used at integrated circuit production facilities (mainly argon and/or nitrogen based) has worked well for many technology generations but now require modifications to achieve nanometer-sized particle removal without damage. This chapter will include recent advancements of cryogenic aerosols to achieve these continually tightening defect removal specifications. Although supercritical processes are yet to be introduced into current semiconductor manufacturing, they offer a number of potential cleaning and surface preparation solutions that will become more acute as technologies scale. The removal of hardened resist, postetch residues, and particles from smaller and smaller features will require selective and chemically “green” cleaning methods. Supercritical fluids (SCF) meet these needs as well as repair etch damage and remove porogens from low-k films. SCF also provide low surface tension for stiction-free drying." @default.
- W2794535870 created "2018-04-06" @default.
- W2794535870 creator A5030111129 @default.
- W2794535870 creator A5038573555 @default.
- W2794535870 date "2018-01-01" @default.
- W2794535870 modified "2023-09-23" @default.
- W2794535870 title "Cryogenic Aerosols and Supercritical Fluid Cleaning and Surface Conditioning ∗" @default.
- W2794535870 doi "https://doi.org/10.1016/b978-0-323-51084-4.00008-3" @default.
- W2794535870 hasPublicationYear "2018" @default.
- W2794535870 type Work @default.
- W2794535870 sameAs 2794535870 @default.
- W2794535870 citedByCount "0" @default.
- W2794535870 crossrefType "book-chapter" @default.
- W2794535870 hasAuthorship W2794535870A5030111129 @default.
- W2794535870 hasAuthorship W2794535870A5038573555 @default.
- W2794535870 hasConcept C110339231 @default.
- W2794535870 hasConcept C111368507 @default.
- W2794535870 hasConcept C118419359 @default.
- W2794535870 hasConcept C121332964 @default.
- W2794535870 hasConcept C127313418 @default.
- W2794535870 hasConcept C127413603 @default.
- W2794535870 hasConcept C159985019 @default.
- W2794535870 hasConcept C171250308 @default.
- W2794535870 hasConcept C178790620 @default.
- W2794535870 hasConcept C185592680 @default.
- W2794535870 hasConcept C192562407 @default.
- W2794535870 hasConcept C21880701 @default.
- W2794535870 hasConcept C2777289219 @default.
- W2794535870 hasConcept C2778517922 @default.
- W2794535870 hasConcept C2780710336 @default.
- W2794535870 hasConcept C37977207 @default.
- W2794535870 hasConcept C61696701 @default.
- W2794535870 hasConcept C62520636 @default.
- W2794535870 hasConcept C77066764 @default.
- W2794535870 hasConcept C8892853 @default.
- W2794535870 hasConceptScore W2794535870C110339231 @default.
- W2794535870 hasConceptScore W2794535870C111368507 @default.
- W2794535870 hasConceptScore W2794535870C118419359 @default.
- W2794535870 hasConceptScore W2794535870C121332964 @default.
- W2794535870 hasConceptScore W2794535870C127313418 @default.
- W2794535870 hasConceptScore W2794535870C127413603 @default.
- W2794535870 hasConceptScore W2794535870C159985019 @default.
- W2794535870 hasConceptScore W2794535870C171250308 @default.
- W2794535870 hasConceptScore W2794535870C178790620 @default.
- W2794535870 hasConceptScore W2794535870C185592680 @default.
- W2794535870 hasConceptScore W2794535870C192562407 @default.
- W2794535870 hasConceptScore W2794535870C21880701 @default.
- W2794535870 hasConceptScore W2794535870C2777289219 @default.
- W2794535870 hasConceptScore W2794535870C2778517922 @default.
- W2794535870 hasConceptScore W2794535870C2780710336 @default.
- W2794535870 hasConceptScore W2794535870C37977207 @default.
- W2794535870 hasConceptScore W2794535870C61696701 @default.
- W2794535870 hasConceptScore W2794535870C62520636 @default.
- W2794535870 hasConceptScore W2794535870C77066764 @default.
- W2794535870 hasConceptScore W2794535870C8892853 @default.
- W2794535870 hasLocation W27945358701 @default.
- W2794535870 hasOpenAccess W2794535870 @default.
- W2794535870 hasPrimaryLocation W27945358701 @default.
- W2794535870 hasRelatedWork W1743607014 @default.
- W2794535870 hasRelatedWork W1972971501 @default.
- W2794535870 hasRelatedWork W1987374878 @default.
- W2794535870 hasRelatedWork W2021384494 @default.
- W2794535870 hasRelatedWork W2022703717 @default.
- W2794535870 hasRelatedWork W2108461509 @default.
- W2794535870 hasRelatedWork W2114489029 @default.
- W2794535870 hasRelatedWork W2284214208 @default.
- W2794535870 hasRelatedWork W2333162830 @default.
- W2794535870 hasRelatedWork W2476953004 @default.
- W2794535870 hasRelatedWork W2485942330 @default.
- W2794535870 hasRelatedWork W2487840374 @default.
- W2794535870 hasRelatedWork W2504094936 @default.
- W2794535870 hasRelatedWork W2575876293 @default.
- W2794535870 hasRelatedWork W2904119542 @default.
- W2794535870 hasRelatedWork W2910101655 @default.
- W2794535870 hasRelatedWork W2911200151 @default.
- W2794535870 hasRelatedWork W2954243487 @default.
- W2794535870 hasRelatedWork W3021136030 @default.
- W2794535870 hasRelatedWork W3021140079 @default.
- W2794535870 isParatext "false" @default.
- W2794535870 isRetracted "false" @default.
- W2794535870 magId "2794535870" @default.
- W2794535870 workType "book-chapter" @default.