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- W279703680 abstract "This paper presents a novel microfabrication technology of 3D microstructures with inclined/rotated UV lithography using negative photoresist, SU-8. In some cases, reflected UV as well as incident UV is used to form microstructures. Various 3D microstructures are simply fabricated such as embedded channels, bridges, V-grooves, truncated cones, and so on." @default.
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- W279703680 date "2002-12-01" @default.
- W279703680 modified "2023-09-27" @default.
- W279703680 title "Fabrication of 3D Microstructures with Single uv Lithography Step" @default.
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