FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2797958501> ?p ?o ?g. }

• W2797958501 endingPage "113" @default.
• W2797958501 startingPage "105" @default.
• W2797958501 abstract "The Czochralski (CZ) process is the dominant method for manufacturing large cylindrical single-crystal ingots for the electronics industry. Although many models and control methods for the CZ process have been proposed, they were only tested with small equipment and only a few industrial application were reported. In this research, we constructed a first-principle model for controlling industrial CZ processes that produce 300 mm single-crystal silicon ingots. The developed model, which consists of energy, mass balance, hydrodynamic, and geometrical equations, calculates the crystal radius and the crystal growth rate as output variables by using the heater input, the crystal pulling rate, and the crucible rise rate as input variables. To improve accuracy, we modeled the CZ process by considering factors such as changes in the positions of the crucible and the melt level. The model was validated with the operation data from an industrial 300 mm CZ process. We compared the calculated and actual values of the crystal radius and the crystal growth rate, and the results demonstrated that the developed model simulated the industrial process with high accuracy." @default.
• W2797958501 created "2018-04-24" @default.
• W2797958501 creator A5011448403 @default.
• W2797958501 creator A5020368368 @default.
• W2797958501 creator A5031859417 @default.
• W2797958501 creator A5033027930 @default.
• W2797958501 creator A5034630360 @default.
• W2797958501 creator A5059694467 @default.
• W2797958501 creator A5087459656 @default.
• W2797958501 date "2018-06-01" @default.
• W2797958501 modified "2023-10-01" @default.
• W2797958501 title "A first-principle model of 300 mm Czochralski single-crystal Si production process for predicting crystal radius and crystal growth rate" @default.
• W2797958501 cites W1613030201 @default.
• W2797958501 cites W1963604687 @default.
• W2797958501 cites W1967635973 @default.
• W2797958501 cites W1985364039 @default.
• W2797958501 cites W2015942604 @default.
• W2797958501 cites W2017493511 @default.
• W2797958501 cites W2039943373 @default.
• W2797958501 cites W2043034279 @default.
• W2797958501 cites W2054181440 @default.
• W2797958501 cites W2068647536 @default.
• W2797958501 cites W2069699753 @default.
• W2797958501 cites W2079266715 @default.
• W2797958501 cites W2087006998 @default.
• W2797958501 cites W2089770370 @default.
• W2797958501 cites W2090253900 @default.
• W2797958501 cites W2129950773 @default.
• W2797958501 cites W2142139917 @default.
• W2797958501 cites W2142761126 @default.
• W2797958501 doi "https://doi.org/10.1016/j.jcrysgro.2018.03.013" @default.
• W2797958501 hasPublicationYear "2018" @default.
• W2797958501 type Work @default.
• W2797958501 sameAs 2797958501 @default.
• W2797958501 citedByCount "22" @default.
• W2797958501 countsByYear W27979585012018 @default.
• W2797958501 countsByYear W27979585012019 @default.
• W2797958501 countsByYear W27979585012020 @default.
• W2797958501 countsByYear W27979585012021 @default.
• W2797958501 countsByYear W27979585012022 @default.
• W2797958501 countsByYear W27979585012023 @default.
• W2797958501 crossrefType "journal-article" @default.
• W2797958501 hasAuthorship W2797958501A5011448403 @default.
• W2797958501 hasAuthorship W2797958501A5020368368 @default.
• W2797958501 hasAuthorship W2797958501A5031859417 @default.
• W2797958501 hasAuthorship W2797958501A5033027930 @default.
• W2797958501 hasAuthorship W2797958501A5034630360 @default.
• W2797958501 hasAuthorship W2797958501A5059694467 @default.
• W2797958501 hasAuthorship W2797958501A5087459656 @default.
• W2797958501 hasConcept C111919701 @default.
• W2797958501 hasConcept C120500152 @default.
• W2797958501 hasConcept C121332964 @default.
• W2797958501 hasConcept C127413603 @default.
• W2797958501 hasConcept C147597530 @default.
• W2797958501 hasConcept C174544924 @default.
• W2797958501 hasConcept C178635117 @default.
• W2797958501 hasConcept C185592680 @default.
• W2797958501 hasConcept C191897082 @default.
• W2797958501 hasConcept C192562407 @default.
• W2797958501 hasConcept C199360897 @default.
• W2797958501 hasConcept C2524010 @default.
• W2797958501 hasConcept C26456737 @default.
• W2797958501 hasConcept C2778312390 @default.
• W2797958501 hasConcept C2781285689 @default.
• W2797958501 hasConcept C33923547 @default.
• W2797958501 hasConcept C38652104 @default.
• W2797958501 hasConcept C41008148 @default.
• W2797958501 hasConcept C544956773 @default.
• W2797958501 hasConcept C57879066 @default.
• W2797958501 hasConcept C73922627 @default.
• W2797958501 hasConcept C78519656 @default.
• W2797958501 hasConcept C8010536 @default.
• W2797958501 hasConcept C98045186 @default.
• W2797958501 hasConceptScore W2797958501C111919701 @default.
• W2797958501 hasConceptScore W2797958501C120500152 @default.
• W2797958501 hasConceptScore W2797958501C121332964 @default.
• W2797958501 hasConceptScore W2797958501C127413603 @default.
• W2797958501 hasConceptScore W2797958501C147597530 @default.
• W2797958501 hasConceptScore W2797958501C174544924 @default.
• W2797958501 hasConceptScore W2797958501C178635117 @default.
• W2797958501 hasConceptScore W2797958501C185592680 @default.
• W2797958501 hasConceptScore W2797958501C191897082 @default.
• W2797958501 hasConceptScore W2797958501C192562407 @default.
• W2797958501 hasConceptScore W2797958501C199360897 @default.
• W2797958501 hasConceptScore W2797958501C2524010 @default.
• W2797958501 hasConceptScore W2797958501C26456737 @default.
• W2797958501 hasConceptScore W2797958501C2778312390 @default.
• W2797958501 hasConceptScore W2797958501C2781285689 @default.
• W2797958501 hasConceptScore W2797958501C33923547 @default.
• W2797958501 hasConceptScore W2797958501C38652104 @default.
• W2797958501 hasConceptScore W2797958501C41008148 @default.
• W2797958501 hasConceptScore W2797958501C544956773 @default.
• W2797958501 hasConceptScore W2797958501C57879066 @default.
• W2797958501 hasConceptScore W2797958501C73922627 @default.
• W2797958501 hasConceptScore W2797958501C78519656 @default.
• W2797958501 hasConceptScore W2797958501C8010536 @default.
• W2797958501 hasConceptScore W2797958501C98045186 @default.
• W2797958501 hasLocation W27979585011 @default.

• next