FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2798058777> ?p ?o ?g. }

• W2798058777 endingPage "577" @default.
• W2798058777 startingPage "577" @default.
• W2798058777 abstract "The reactive ion etching (RIE) process of fused silica is often accompanied by surface contamination, which seriously degrades the ultraviolet laser damage performance of the optics. In this study, we find that the contamination behavior on the fused silica surface is very sensitive to the RIE process which can be significantly optimized by changing the plasma generating conditions such as discharge mode, etchant gas and electrode material. Additionally, an optimized RIE process is proposed to thoroughly remove polishing-introduced contamination and efficiently prevent the introduction of other contamination during the etching process. The research demonstrates the feasibility of improving the damage performance of fused silica optics by using the RIE technique." @default.
• W2798058777 created "2018-04-24" @default.
• W2798058777 creator A5027074721 @default.
• W2798058777 creator A5028982780 @default.
• W2798058777 creator A5032290316 @default.
• W2798058777 creator A5032961377 @default.
• W2798058777 creator A5035489029 @default.
• W2798058777 creator A5044694850 @default.
• W2798058777 creator A5044887697 @default.
• W2798058777 creator A5068301710 @default.
• W2798058777 creator A5087389386 @default.
• W2798058777 date "2018-04-10" @default.
• W2798058777 modified "2023-09-26" @default.
• W2798058777 title "Ultraviolet Laser Damage Dependence on Contamination Concentration in Fused Silica Optics during Reactive Ion Etching Process" @default.
• W2798058777 cites W1428809103 @default.
• W2798058777 cites W1791724880 @default.
• W2798058777 cites W1972840313 @default.
• W2798058777 cites W1974091013 @default.
• W2798058777 cites W1974452849 @default.
• W2798058777 cites W1986872787 @default.
• W2798058777 cites W1989341548 @default.
• W2798058777 cites W1991203962 @default.
• W2798058777 cites W1994967214 @default.
• W2798058777 cites W2000480480 @default.
• W2798058777 cites W2007889298 @default.
• W2798058777 cites W2012232776 @default.
• W2798058777 cites W2015424646 @default.
• W2798058777 cites W2021776700 @default.
• W2798058777 cites W2030348402 @default.
• W2798058777 cites W2056889600 @default.
• W2798058777 cites W2057571491 @default.
• W2798058777 cites W2064258373 @default.
• W2798058777 cites W2065223500 @default.
• W2798058777 cites W2066772748 @default.
• W2798058777 cites W2069519700 @default.
• W2798058777 cites W2069532673 @default.
• W2798058777 cites W2088988772 @default.
• W2798058777 cites W2089839822 @default.
• W2798058777 cites W2091237834 @default.
• W2798058777 cites W2095311261 @default.
• W2798058777 cites W2123233436 @default.
• W2798058777 cites W2133534072 @default.
• W2798058777 cites W2229299382 @default.
• W2798058777 cites W2268665407 @default.
• W2798058777 cites W2280616142 @default.
• W2798058777 cites W2495987075 @default.
• W2798058777 cites W2510732862 @default.
• W2798058777 doi "https://doi.org/10.3390/ma11040577" @default.
• W2798058777 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/5951461" @default.
• W2798058777 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/29642571" @default.
• W2798058777 hasPublicationYear "2018" @default.
• W2798058777 type Work @default.
• W2798058777 sameAs 2798058777 @default.
• W2798058777 citedByCount "3" @default.
• W2798058777 countsByYear W27980587772019 @default.
• W2798058777 countsByYear W27980587772020 @default.
• W2798058777 crossrefType "journal-article" @default.
• W2798058777 hasAuthorship W2798058777A5027074721 @default.
• W2798058777 hasAuthorship W2798058777A5028982780 @default.
• W2798058777 hasAuthorship W2798058777A5032290316 @default.
• W2798058777 hasAuthorship W2798058777A5032961377 @default.
• W2798058777 hasAuthorship W2798058777A5035489029 @default.
• W2798058777 hasAuthorship W2798058777A5044694850 @default.
• W2798058777 hasAuthorship W2798058777A5044887697 @default.
• W2798058777 hasAuthorship W2798058777A5068301710 @default.
• W2798058777 hasAuthorship W2798058777A5087389386 @default.
• W2798058777 hasBestOaLocation W27980587771 @default.
• W2798058777 hasConcept C100460472 @default.
• W2798058777 hasConcept C111919701 @default.
• W2798058777 hasConcept C112570922 @default.
• W2798058777 hasConcept C120665830 @default.
• W2798058777 hasConcept C121332964 @default.
• W2798058777 hasConcept C130472188 @default.
• W2798058777 hasConcept C138113353 @default.
• W2798058777 hasConcept C159985019 @default.
• W2798058777 hasConcept C18903297 @default.
• W2798058777 hasConcept C192562407 @default.
• W2798058777 hasConcept C2776798109 @default.
• W2798058777 hasConcept C2779227376 @default.
• W2798058777 hasConcept C41008148 @default.
• W2798058777 hasConcept C49040817 @default.
• W2798058777 hasConcept C520434653 @default.
• W2798058777 hasConcept C86803240 @default.
• W2798058777 hasConcept C98045186 @default.
• W2798058777 hasConceptScore W2798058777C100460472 @default.
• W2798058777 hasConceptScore W2798058777C111919701 @default.
• W2798058777 hasConceptScore W2798058777C112570922 @default.
• W2798058777 hasConceptScore W2798058777C120665830 @default.
• W2798058777 hasConceptScore W2798058777C121332964 @default.
• W2798058777 hasConceptScore W2798058777C130472188 @default.
• W2798058777 hasConceptScore W2798058777C138113353 @default.
• W2798058777 hasConceptScore W2798058777C159985019 @default.
• W2798058777 hasConceptScore W2798058777C18903297 @default.
• W2798058777 hasConceptScore W2798058777C192562407 @default.
• W2798058777 hasConceptScore W2798058777C2776798109 @default.
• W2798058777 hasConceptScore W2798058777C2779227376 @default.
• W2798058777 hasConceptScore W2798058777C41008148 @default.
• W2798058777 hasConceptScore W2798058777C49040817 @default.

• next