Matches in SemOpenAlex for { <https://semopenalex.org/work/W2799367847> ?p ?o ?g. }
- W2799367847 endingPage "065502" @default.
- W2799367847 startingPage "065502" @default.
- W2799367847 abstract "On the basis of a novel crystal hardness control, we successfully realized macrodefect-free, large (2–6 in.) and thick +c-oriented GaN bulk crystals by hydride vapor phase epitaxy. Without the hardness control, the introduction of macrodefects including inversion domains and/or basal-plane dislocations seemed to be indispensable to avoid crystal fracture in GaN growth with millimeter thickness. However, the presence of these macrodefects tended to limit the applicability of the GaN substrate to practical devices. The present technology markedly increased the GaN crystal hardness from below 20 to 22 GPa, thus increasing the available growth thickness from below 1 mm to over 6 mm even without macrodefect introduction. The 2 and 4 in. GaN wafers fabricated from these crystals had extremely low dislocation densities in the low- to mid-105 cm−2 range and low off-angle variations (2 in.: <0.1°; 4 in.: ∼0.2°). The realization of such high-quality 6 in. wafers is also expected." @default.
- W2799367847 created "2018-05-17" @default.
- W2799367847 creator A5040391003 @default.
- W2799367847 creator A5062438983 @default.
- W2799367847 creator A5068717853 @default.
- W2799367847 creator A5071780041 @default.
- W2799367847 creator A5079488643 @default.
- W2799367847 creator A5081108520 @default.
- W2799367847 date "2018-05-08" @default.
- W2799367847 modified "2023-10-14" @default.
- W2799367847 title "Macrodefect-free, large, and thick GaN bulk crystals for high-quality 2–6 in. GaN substrates by hydride vapor phase epitaxy with hardness control" @default.
- W2799367847 cites W1950219146 @default.
- W2799367847 cites W1970073717 @default.
- W2799367847 cites W1974213085 @default.
- W2799367847 cites W1976774427 @default.
- W2799367847 cites W1979577598 @default.
- W2799367847 cites W1983961797 @default.
- W2799367847 cites W1984866842 @default.
- W2799367847 cites W1985677643 @default.
- W2799367847 cites W1987030341 @default.
- W2799367847 cites W1998283697 @default.
- W2799367847 cites W2009035285 @default.
- W2799367847 cites W2009551548 @default.
- W2799367847 cites W2009891531 @default.
- W2799367847 cites W2013428011 @default.
- W2799367847 cites W2015910722 @default.
- W2799367847 cites W2028844105 @default.
- W2799367847 cites W2037352753 @default.
- W2799367847 cites W2042916342 @default.
- W2799367847 cites W2056735400 @default.
- W2799367847 cites W2072450035 @default.
- W2799367847 cites W2081207018 @default.
- W2799367847 cites W2081456112 @default.
- W2799367847 cites W2084041063 @default.
- W2799367847 cites W2086933933 @default.
- W2799367847 cites W2086948262 @default.
- W2799367847 cites W2091969457 @default.
- W2799367847 cites W2101610902 @default.
- W2799367847 cites W2125624895 @default.
- W2799367847 cites W2126824862 @default.
- W2799367847 cites W2144866621 @default.
- W2799367847 cites W2166232292 @default.
- W2799367847 cites W2269185209 @default.
- W2799367847 cites W2306126075 @default.
- W2799367847 cites W2588278609 @default.
- W2799367847 cites W2732700637 @default.
- W2799367847 doi "https://doi.org/10.7567/jjap.57.065502" @default.
- W2799367847 hasPublicationYear "2018" @default.
- W2799367847 type Work @default.
- W2799367847 sameAs 2799367847 @default.
- W2799367847 citedByCount "30" @default.
- W2799367847 countsByYear W27993678472018 @default.
- W2799367847 countsByYear W27993678472019 @default.
- W2799367847 countsByYear W27993678472020 @default.
- W2799367847 countsByYear W27993678472021 @default.
- W2799367847 countsByYear W27993678472022 @default.
- W2799367847 countsByYear W27993678472023 @default.
- W2799367847 crossrefType "journal-article" @default.
- W2799367847 hasAuthorship W2799367847A5040391003 @default.
- W2799367847 hasAuthorship W2799367847A5062438983 @default.
- W2799367847 hasAuthorship W2799367847A5068717853 @default.
- W2799367847 hasAuthorship W2799367847A5071780041 @default.
- W2799367847 hasAuthorship W2799367847A5079488643 @default.
- W2799367847 hasAuthorship W2799367847A5081108520 @default.
- W2799367847 hasConcept C110738630 @default.
- W2799367847 hasConcept C111368507 @default.
- W2799367847 hasConcept C121332964 @default.
- W2799367847 hasConcept C127313418 @default.
- W2799367847 hasConcept C159122135 @default.
- W2799367847 hasConcept C159985019 @default.
- W2799367847 hasConcept C160671074 @default.
- W2799367847 hasConcept C185592680 @default.
- W2799367847 hasConcept C191897082 @default.
- W2799367847 hasConcept C192562407 @default.
- W2799367847 hasConcept C199360897 @default.
- W2799367847 hasConcept C2777289219 @default.
- W2799367847 hasConcept C2777961443 @default.
- W2799367847 hasConcept C2779227376 @default.
- W2799367847 hasConcept C2781285689 @default.
- W2799367847 hasConcept C3018640491 @default.
- W2799367847 hasConcept C41008148 @default.
- W2799367847 hasConcept C49040817 @default.
- W2799367847 hasConcept C544153396 @default.
- W2799367847 hasConcept C8010536 @default.
- W2799367847 hasConcept C97355855 @default.
- W2799367847 hasConceptScore W2799367847C110738630 @default.
- W2799367847 hasConceptScore W2799367847C111368507 @default.
- W2799367847 hasConceptScore W2799367847C121332964 @default.
- W2799367847 hasConceptScore W2799367847C127313418 @default.
- W2799367847 hasConceptScore W2799367847C159122135 @default.
- W2799367847 hasConceptScore W2799367847C159985019 @default.
- W2799367847 hasConceptScore W2799367847C160671074 @default.
- W2799367847 hasConceptScore W2799367847C185592680 @default.
- W2799367847 hasConceptScore W2799367847C191897082 @default.
- W2799367847 hasConceptScore W2799367847C192562407 @default.
- W2799367847 hasConceptScore W2799367847C199360897 @default.
- W2799367847 hasConceptScore W2799367847C2777289219 @default.
- W2799367847 hasConceptScore W2799367847C2777961443 @default.