Matches in SemOpenAlex for { <https://semopenalex.org/work/W2799457086> ?p ?o ?g. }
- W2799457086 endingPage "994" @default.
- W2799457086 startingPage "985" @default.
- W2799457086 abstract "The properties of one single melamine formaldehyde microparticle, levitated in the sheath of a low-pressure radio frequency-driven plasma, are determined with a novel procedure using in situ Mie scattering. By placing the measurement equipment inside the vacuum vessel, optical access is not limited to available viewports, and the complete scatter profile can be measured. The developed fitting routine uses peaks and valleys in the angular scatter profile to accurately determine the particle's refractive index, size, and plasma-induced etch rate. In plasma at a pressure of 13Pa operated at 10 W, obtained refractive indices of 1.657± 0.01 are close to those specified by the supplier, while the initial size (2.168± 0.007μm) is relatively 8% off from the supplier-specified value. With an estimated contamination of ambient air of 4 ± 1% in pristine Ar, etch rates of 1.9±0.2nm/min are measured." @default.
- W2799457086 created "2018-05-17" @default.
- W2799457086 creator A5052336406 @default.
- W2799457086 creator A5062568718 @default.
- W2799457086 creator A5085345673 @default.
- W2799457086 date "2018-04-17" @default.
- W2799457086 modified "2023-09-24" @default.
- W2799457086 title "Determination of microparticle characteristics in an etching plasma" @default.
- W2799457086 cites W1694286806 @default.
- W2799457086 cites W1966467049 @default.
- W2799457086 cites W1971292428 @default.
- W2799457086 cites W1973138773 @default.
- W2799457086 cites W1990719418 @default.
- W2799457086 cites W1996232177 @default.
- W2799457086 cites W1997384506 @default.
- W2799457086 cites W2007201787 @default.
- W2799457086 cites W2008140858 @default.
- W2799457086 cites W2016206057 @default.
- W2799457086 cites W2018823140 @default.
- W2799457086 cites W2023896836 @default.
- W2799457086 cites W2029135454 @default.
- W2799457086 cites W2047864576 @default.
- W2799457086 cites W2055862209 @default.
- W2799457086 cites W2058772079 @default.
- W2799457086 cites W2067946574 @default.
- W2799457086 cites W2071132989 @default.
- W2799457086 cites W2077229559 @default.
- W2799457086 cites W2085320329 @default.
- W2799457086 cites W2089614002 @default.
- W2799457086 cites W2106146883 @default.
- W2799457086 cites W2109705984 @default.
- W2799457086 cites W2112302384 @default.
- W2799457086 cites W2136105350 @default.
- W2799457086 cites W2136959410 @default.
- W2799457086 cites W2151283831 @default.
- W2799457086 cites W2156970762 @default.
- W2799457086 cites W2171880300 @default.
- W2799457086 cites W2281538683 @default.
- W2799457086 cites W2493880907 @default.
- W2799457086 cites W2519335475 @default.
- W2799457086 doi "https://doi.org/10.1002/ctpp.201700217" @default.
- W2799457086 hasPublicationYear "2018" @default.
- W2799457086 type Work @default.
- W2799457086 sameAs 2799457086 @default.
- W2799457086 citedByCount "11" @default.
- W2799457086 countsByYear W27994570862018 @default.
- W2799457086 countsByYear W27994570862019 @default.
- W2799457086 countsByYear W27994570862021 @default.
- W2799457086 countsByYear W27994570862022 @default.
- W2799457086 countsByYear W27994570862023 @default.
- W2799457086 crossrefType "journal-article" @default.
- W2799457086 hasAuthorship W2799457086A5052336406 @default.
- W2799457086 hasAuthorship W2799457086A5062568718 @default.
- W2799457086 hasAuthorship W2799457086A5085345673 @default.
- W2799457086 hasBestOaLocation W27994570862 @default.
- W2799457086 hasConcept C100460472 @default.
- W2799457086 hasConcept C107187091 @default.
- W2799457086 hasConcept C120665830 @default.
- W2799457086 hasConcept C121332964 @default.
- W2799457086 hasConcept C171250308 @default.
- W2799457086 hasConcept C185544564 @default.
- W2799457086 hasConcept C192562407 @default.
- W2799457086 hasConcept C2777521759 @default.
- W2799457086 hasConcept C2779227376 @default.
- W2799457086 hasConcept C69786480 @default.
- W2799457086 hasConcept C82706917 @default.
- W2799457086 hasConceptScore W2799457086C100460472 @default.
- W2799457086 hasConceptScore W2799457086C107187091 @default.
- W2799457086 hasConceptScore W2799457086C120665830 @default.
- W2799457086 hasConceptScore W2799457086C121332964 @default.
- W2799457086 hasConceptScore W2799457086C171250308 @default.
- W2799457086 hasConceptScore W2799457086C185544564 @default.
- W2799457086 hasConceptScore W2799457086C192562407 @default.
- W2799457086 hasConceptScore W2799457086C2777521759 @default.
- W2799457086 hasConceptScore W2799457086C2779227376 @default.
- W2799457086 hasConceptScore W2799457086C69786480 @default.
- W2799457086 hasConceptScore W2799457086C82706917 @default.
- W2799457086 hasFunder F4320320925 @default.
- W2799457086 hasIssue "10" @default.
- W2799457086 hasLocation W27994570861 @default.
- W2799457086 hasLocation W27994570862 @default.
- W2799457086 hasLocation W27994570863 @default.
- W2799457086 hasOpenAccess W2799457086 @default.
- W2799457086 hasPrimaryLocation W27994570861 @default.
- W2799457086 hasRelatedWork W2049342529 @default.
- W2799457086 hasRelatedWork W2059112004 @default.
- W2799457086 hasRelatedWork W2139606557 @default.
- W2799457086 hasRelatedWork W2155099757 @default.
- W2799457086 hasRelatedWork W2366161362 @default.
- W2799457086 hasRelatedWork W2385387985 @default.
- W2799457086 hasRelatedWork W2543065707 @default.
- W2799457086 hasRelatedWork W3197419717 @default.
- W2799457086 hasRelatedWork W4206857777 @default.
- W2799457086 hasRelatedWork W820049253 @default.
- W2799457086 hasVolume "58" @default.
- W2799457086 isParatext "false" @default.
- W2799457086 isRetracted "false" @default.
- W2799457086 magId "2799457086" @default.