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• W2799633884 abstract "This paper reports on the deposition of amorphous carbon (a-C) by Aerosol-assisted Chemical Vapor Deposition (AACVD) using natural source of camphor oil as the precursor material. 4 samples were deposited at 4 different deposition flow rate from 15 sccm to 20 sccm, with 5 sccm interval for each sample. The analysis includes the electrical, optical and structural analysis of the data. The a-C structure which came from the manipulation of synthesis parameter was characterized by the solar simulator system, UV-VIS-NIR, Raman spectroscope and AFM. The properties of a-C are highly dependent on the deposition techniques and deposition parameters; hence the influences of gas flow rate were studied." @default.
• W2799633884 created "2018-05-17" @default.
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• W2799633884 date "2018-01-01" @default.
• W2799633884 modified "2023-10-16" @default.
• W2799633884 title "Deposition of amorphous carbon thin films by aerosol-assisted CVD method" @default.
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• W2799633884 doi "https://doi.org/10.1063/1.5036888" @default.
• W2799633884 hasPublicationYear "2018" @default.
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