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- W2800198123 abstract "Abstract In this study, the mechanism of void formation in the Al metal lines of TiN/Al-1%Si-0.5%Cu/TiN anti-refraction coating multi-layer structures has been investigated. The produced voids exhibited distinct characteristics (such as the presence of silicon nodules) and did not possess conventional shapes (such as notch-type or wedge-type ones). In addition, the influence of the nitriding temperature of the TiN barrier film and stress generated in the upper plasma-enhanced tetraethyl orthosilicate (PE-TEOS) SiO2 layer on the void formation process was examined. When the compression stress of the upper PE-TEOS SiO2 layer was below that of the lower Al film during annealing, multiple dislocations were generated in the Al layer followed by the formation of vacancies during the recovery stage. Furthermore, the TiN barrier films formed by the nitriding of Ti layers via rapid thermal annealing at a temperature of 760 °C did not exhibit sufficient thermal stability and easily underwent plastic deformation during annealing, which promoted the formation of voids." @default.
- W2800198123 created "2018-05-17" @default.
- W2800198123 creator A5000069123 @default.
- W2800198123 creator A5000329199 @default.
- W2800198123 creator A5029965868 @default.
- W2800198123 creator A5042190399 @default.
- W2800198123 creator A5043982628 @default.
- W2800198123 creator A5063034206 @default.
- W2800198123 creator A5075238666 @default.
- W2800198123 date "2018-08-01" @default.
- W2800198123 modified "2023-09-24" @default.
- W2800198123 title "Mechanism of void formation in TiN/AlSiCu/TiN/plasma-enhanced tetraethyl orthosilicate SiO2 multi-layer structures via high-temperature stress migration" @default.
- W2800198123 cites W1978483775 @default.
- W2800198123 cites W2023675974 @default.
- W2800198123 cites W2035471323 @default.
- W2800198123 cites W2042909482 @default.
- W2800198123 cites W2046109232 @default.
- W2800198123 cites W2051483708 @default.
- W2800198123 cites W2054588277 @default.
- W2800198123 cites W2097156018 @default.
- W2800198123 cites W2126955335 @default.
- W2800198123 cites W2131449683 @default.
- W2800198123 cites W2323886749 @default.
- W2800198123 cites W2332073050 @default.
- W2800198123 cites W3149291698 @default.
- W2800198123 doi "https://doi.org/10.1016/j.mssp.2018.04.013" @default.
- W2800198123 hasPublicationYear "2018" @default.
- W2800198123 type Work @default.
- W2800198123 sameAs 2800198123 @default.
- W2800198123 citedByCount "2" @default.
- W2800198123 countsByYear W28001981232020 @default.
- W2800198123 countsByYear W28001981232021 @default.
- W2800198123 crossrefType "journal-article" @default.
- W2800198123 hasAuthorship W2800198123A5000069123 @default.
- W2800198123 hasAuthorship W2800198123A5000329199 @default.
- W2800198123 hasAuthorship W2800198123A5029965868 @default.
- W2800198123 hasAuthorship W2800198123A5042190399 @default.
- W2800198123 hasAuthorship W2800198123A5043982628 @default.
- W2800198123 hasAuthorship W2800198123A5063034206 @default.
- W2800198123 hasAuthorship W2800198123A5075238666 @default.
- W2800198123 hasConcept C127413603 @default.
- W2800198123 hasConcept C13862629 @default.
- W2800198123 hasConcept C159985019 @default.
- W2800198123 hasConcept C171250308 @default.
- W2800198123 hasConcept C191897082 @default.
- W2800198123 hasConcept C192562407 @default.
- W2800198123 hasConcept C2777432599 @default.
- W2800198123 hasConcept C2777855556 @default.
- W2800198123 hasConcept C2779227376 @default.
- W2800198123 hasConcept C2779772531 @default.
- W2800198123 hasConcept C2779801337 @default.
- W2800198123 hasConcept C42360764 @default.
- W2800198123 hasConcept C525849907 @default.
- W2800198123 hasConceptScore W2800198123C127413603 @default.
- W2800198123 hasConceptScore W2800198123C13862629 @default.
- W2800198123 hasConceptScore W2800198123C159985019 @default.
- W2800198123 hasConceptScore W2800198123C171250308 @default.
- W2800198123 hasConceptScore W2800198123C191897082 @default.
- W2800198123 hasConceptScore W2800198123C192562407 @default.
- W2800198123 hasConceptScore W2800198123C2777432599 @default.
- W2800198123 hasConceptScore W2800198123C2777855556 @default.
- W2800198123 hasConceptScore W2800198123C2779227376 @default.
- W2800198123 hasConceptScore W2800198123C2779772531 @default.
- W2800198123 hasConceptScore W2800198123C2779801337 @default.
- W2800198123 hasConceptScore W2800198123C42360764 @default.
- W2800198123 hasConceptScore W2800198123C525849907 @default.
- W2800198123 hasLocation W28001981231 @default.
- W2800198123 hasOpenAccess W2800198123 @default.
- W2800198123 hasPrimaryLocation W28001981231 @default.
- W2800198123 hasRelatedWork W2008823350 @default.
- W2800198123 hasRelatedWork W2055123911 @default.
- W2800198123 hasRelatedWork W2055380860 @default.
- W2800198123 hasRelatedWork W2312906214 @default.
- W2800198123 hasRelatedWork W2777329655 @default.
- W2800198123 hasRelatedWork W2800198123 @default.
- W2800198123 hasRelatedWork W2801819576 @default.
- W2800198123 hasRelatedWork W3186346647 @default.
- W2800198123 hasRelatedWork W4230419308 @default.
- W2800198123 hasRelatedWork W952234198 @default.
- W2800198123 isParatext "false" @default.
- W2800198123 isRetracted "false" @default.
- W2800198123 magId "2800198123" @default.
- W2800198123 workType "article" @default.