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• W2800509005 abstract "In this paper a ZrO 2 /SiO 2 /4H‐SiC dielectric system for potential application as gate dielectric for SiC MOSFETs is investigated. An enhanced breakdown performance for this type of dielectric stacks having typical value of critical field of 17 MV cm −1 and reaching a maximum value of 20 MV cm −1 is presented. The observed results are explained based on high‐k layer properties in conjunction with a reduced impact ionization effect in SiO 2 layer. Electrical and structural properties of this dielectric stack are measured and analyzed. Growth temperature of atomic layer deposition process seems to be a crucial parameter that influences on layer microstructure and electrical properties such as permittivity of high‐κ layer and critical electric field for all dielectric stacks." @default.
• W2800509005 created "2018-05-17" @default.
• W2800509005 creator A5018258894 @default.
• W2800509005 creator A5028567931 @default.
• W2800509005 creator A5031486441 @default.
• W2800509005 creator A5039616401 @default.
• W2800509005 creator A5050152076 @default.
• W2800509005 creator A5071634489 @default.
• W2800509005 creator A5074487776 @default.
• W2800509005 creator A5080726955 @default.
• W2800509005 date "2018-04-30" @default.
• W2800509005 modified "2023-10-16" @default.
• W2800509005 title "Influence of Atomic Layer Deposition Temperature on the Electrical Properties of Al/ZrO₂ /SiO₂ /4H-SiC Metal-Oxide Semiconductor Structures" @default.
• W2800509005 cites W1459195756 @default.
• W2800509005 cites W1554538624 @default.
• W2800509005 cites W1968406658 @default.
• W2800509005 cites W1983682160 @default.
• W2800509005 cites W2000604457 @default.
• W2800509005 cites W2009312684 @default.
• W2800509005 cites W2011181802 @default.
• W2800509005 cites W2023584139 @default.
• W2800509005 cites W2025529060 @default.
• W2800509005 cites W2026817699 @default.
• W2800509005 cites W2031179044 @default.
• W2800509005 cites W2035931858 @default.
• W2800509005 cites W2041246757 @default.
• W2800509005 cites W2041475031 @default.
• W2800509005 cites W2053390690 @default.
• W2800509005 cites W2059537683 @default.
• W2800509005 cites W2070287795 @default.
• W2800509005 cites W2077714826 @default.
• W2800509005 cites W2085382922 @default.
• W2800509005 cites W2093332181 @default.
• W2800509005 cites W2094669952 @default.
• W2800509005 cites W2097283854 @default.
• W2800509005 cites W2098009457 @default.
• W2800509005 cites W2099514727 @default.
• W2800509005 cites W2103983803 @default.
• W2800509005 cites W2141148611 @default.
• W2800509005 cites W2161252505 @default.
• W2800509005 cites W2267325138 @default.
• W2800509005 cites W2322139370 @default.
• W2800509005 cites W2468692660 @default.
• W2800509005 cites W2491500450 @default.
• W2800509005 doi "https://doi.org/10.1002/pssa.201700882" @default.
• W2800509005 hasPublicationYear "2018" @default.
• W2800509005 type Work @default.
• W2800509005 sameAs 2800509005 @default.
• W2800509005 citedByCount "6" @default.
• W2800509005 countsByYear W28005090052018 @default.
• W2800509005 countsByYear W28005090052020 @default.
• W2800509005 countsByYear W28005090052021 @default.
• W2800509005 countsByYear W28005090052022 @default.
• W2800509005 countsByYear W28005090052023 @default.
• W2800509005 crossrefType "journal-article" @default.
• W2800509005 hasAuthorship W2800509005A5018258894 @default.
• W2800509005 hasAuthorship W2800509005A5028567931 @default.
• W2800509005 hasAuthorship W2800509005A5031486441 @default.
• W2800509005 hasAuthorship W2800509005A5039616401 @default.
• W2800509005 hasAuthorship W2800509005A5050152076 @default.
• W2800509005 hasAuthorship W2800509005A5071634489 @default.
• W2800509005 hasAuthorship W2800509005A5074487776 @default.
• W2800509005 hasAuthorship W2800509005A5080726955 @default.
• W2800509005 hasConcept C108225325 @default.
• W2800509005 hasConcept C113196181 @default.
• W2800509005 hasConcept C121332964 @default.
• W2800509005 hasConcept C133386390 @default.
• W2800509005 hasConcept C151730666 @default.
• W2800509005 hasConcept C159985019 @default.
• W2800509005 hasConcept C16317505 @default.
• W2800509005 hasConcept C168651791 @default.
• W2800509005 hasConcept C185592680 @default.
• W2800509005 hasConcept C191897082 @default.
• W2800509005 hasConcept C192562407 @default.
• W2800509005 hasConcept C199360897 @default.
• W2800509005 hasConcept C2779227376 @default.
• W2800509005 hasConcept C2779851234 @default.
• W2800509005 hasConcept C2816523 @default.
• W2800509005 hasConcept C41008148 @default.
• W2800509005 hasConcept C43617362 @default.
• W2800509005 hasConcept C49040817 @default.
• W2800509005 hasConcept C60799052 @default.
• W2800509005 hasConcept C62520636 @default.
• W2800509005 hasConcept C64297162 @default.
• W2800509005 hasConcept C69544855 @default.
• W2800509005 hasConcept C86803240 @default.
• W2800509005 hasConcept C87976508 @default.
• W2800509005 hasConcept C9395851 @default.
• W2800509005 hasConceptScore W2800509005C108225325 @default.
• W2800509005 hasConceptScore W2800509005C113196181 @default.
• W2800509005 hasConceptScore W2800509005C121332964 @default.
• W2800509005 hasConceptScore W2800509005C133386390 @default.
• W2800509005 hasConceptScore W2800509005C151730666 @default.
• W2800509005 hasConceptScore W2800509005C159985019 @default.
• W2800509005 hasConceptScore W2800509005C16317505 @default.
• W2800509005 hasConceptScore W2800509005C168651791 @default.
• W2800509005 hasConceptScore W2800509005C185592680 @default.
• W2800509005 hasConceptScore W2800509005C191897082 @default.
• W2800509005 hasConceptScore W2800509005C192562407 @default.
• W2800509005 hasConceptScore W2800509005C199360897 @default.

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