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• W2801101189 abstract "Infrared spectra of surface species have been obtained during atomic layer deposition using tris(isopropylcyclopentadienyl)lanthanum, La(iPrCp)3, and water as precursors at 160 and 350 °C. Gas-phase spectra of La(iPrCp)3 are obtained for comparison. At low temperature, ligand exchange is seen to occur, and carbonate formation is found. With extended purging, the organic ligands are found to be stable on the surface, and carbonates are not formed. These observations indicate that carbonate formation is occurring during exposure to the precursors. At high temperature, the La precursor is observed to decompose leaving an opaque deposit containing relatively little hydrogen." @default.
• W2801101189 created "2018-05-17" @default.
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• W2801101189 date "2018-04-26" @default.
• W2801101189 modified "2023-09-26" @default.
• W2801101189 title "<i>In situ</i> infrared spectroscopy during La₂O₃ atomic layer deposition using La(^<i>i</i>PrCp)₃ and H₂O" @default.
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• W2801101189 doi "https://doi.org/10.1116/1.5026488" @default.
• W2801101189 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/7079703" @default.
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• W2801101189 hasPublicationYear "2018" @default.
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