FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2801127910> ?p ?o ?g. }

• W2801127910 endingPage "146" @default.
• W2801127910 startingPage "146" @default.
• W2801127910 abstract "Aluminum oxide thin films were prepared by medium frequency reactive magnetron sputtering. The target voltage hysteresis behavior under different argon partial pressure and target power conditions were studied. The results indicate that the target voltage hysteresis loop of aluminum oxide thin film preparation has typical behavior of that for reactive sputtering deposition of compound films. The target voltage feedback control approach was applied to circumvent the hysteresis problem. The microstructure and chemical composition of the aluminum oxide thin films prepared at different target voltage control points were investigated by X-ray diffraction, scanning electron microscopy, energy dispersive X-ray spectroscopy and Auger electron spectroscopy. The results indicated that the prepared aluminum oxide thin films, which are compact and mostly amorphous, can be obtained with target voltage control point in the range of 25~35%." @default.
• W2801127910 created "2018-05-17" @default.
• W2801127910 creator A5004805414 @default.
• W2801127910 creator A5007198357 @default.
• W2801127910 creator A5012549166 @default.
• W2801127910 creator A5021704574 @default.
• W2801127910 creator A5029486924 @default.
• W2801127910 creator A5060551332 @default.
• W2801127910 creator A5074950280 @default.
• W2801127910 date "2018-04-18" @default.
• W2801127910 modified "2023-09-25" @default.
• W2801127910 title "Target Voltage Hysteresis Behavior and Control Point in the Preparation of Aluminum Oxide Thin Films by Medium Frequency Reactive Magnetron Sputtering" @default.
• W2801127910 cites W1556345641 @default.
• W2801127910 cites W1979620545 @default.
• W2801127910 cites W1980929018 @default.
• W2801127910 cites W2013817451 @default.
• W2801127910 cites W2017048033 @default.
• W2801127910 cites W2023095152 @default.
• W2801127910 cites W2034433960 @default.
• W2801127910 cites W2035766582 @default.
• W2801127910 cites W2051944828 @default.
• W2801127910 cites W2054784026 @default.
• W2801127910 cites W2071812767 @default.
• W2801127910 cites W2098840926 @default.
• W2801127910 cites W2100141350 @default.
• W2801127910 cites W2144465790 @default.
• W2801127910 cites W2146557039 @default.
• W2801127910 cites W2167293562 @default.
• W2801127910 cites W2576258772 @default.
• W2801127910 cites W2624608113 @default.
• W2801127910 cites W2743549949 @default.
• W2801127910 cites W2793650600 @default.
• W2801127910 cites W2951687997 @default.
• W2801127910 doi "https://doi.org/10.3390/coatings8040146" @default.
• W2801127910 hasPublicationYear "2018" @default.
• W2801127910 type Work @default.
• W2801127910 sameAs 2801127910 @default.
• W2801127910 citedByCount "1" @default.
• W2801127910 countsByYear W28011279102020 @default.
• W2801127910 crossrefType "journal-article" @default.
• W2801127910 hasAuthorship W2801127910A5004805414 @default.
• W2801127910 hasAuthorship W2801127910A5007198357 @default.
• W2801127910 hasAuthorship W2801127910A5012549166 @default.
• W2801127910 hasAuthorship W2801127910A5021704574 @default.
• W2801127910 hasAuthorship W2801127910A5029486924 @default.
• W2801127910 hasAuthorship W2801127910A5060551332 @default.
• W2801127910 hasAuthorship W2801127910A5074950280 @default.
• W2801127910 hasBestOaLocation W28011279101 @default.
• W2801127910 hasConcept C113196181 @default.
• W2801127910 hasConcept C121332964 @default.
• W2801127910 hasConcept C123299182 @default.
• W2801127910 hasConcept C123408415 @default.
• W2801127910 hasConcept C147438087 @default.
• W2801127910 hasConcept C159985019 @default.
• W2801127910 hasConcept C171250308 @default.
• W2801127910 hasConcept C178790620 @default.
• W2801127910 hasConcept C185544564 @default.
• W2801127910 hasConcept C185592680 @default.
• W2801127910 hasConcept C19067145 @default.
• W2801127910 hasConcept C191897082 @default.
• W2801127910 hasConcept C192562407 @default.
• W2801127910 hasConcept C22423302 @default.
• W2801127910 hasConcept C25442681 @default.
• W2801127910 hasConcept C26771246 @default.
• W2801127910 hasConcept C2779851234 @default.
• W2801127910 hasConcept C43617362 @default.
• W2801127910 hasConcept C49040817 @default.
• W2801127910 hasConcept C547737533 @default.
• W2801127910 hasConcept C56052488 @default.
• W2801127910 hasConcept C61427134 @default.
• W2801127910 hasConcept C62520636 @default.
• W2801127910 hasConcept C8010536 @default.
• W2801127910 hasConceptScore W2801127910C113196181 @default.
• W2801127910 hasConceptScore W2801127910C121332964 @default.
• W2801127910 hasConceptScore W2801127910C123299182 @default.
• W2801127910 hasConceptScore W2801127910C123408415 @default.
• W2801127910 hasConceptScore W2801127910C147438087 @default.
• W2801127910 hasConceptScore W2801127910C159985019 @default.
• W2801127910 hasConceptScore W2801127910C171250308 @default.
• W2801127910 hasConceptScore W2801127910C178790620 @default.
• W2801127910 hasConceptScore W2801127910C185544564 @default.
• W2801127910 hasConceptScore W2801127910C185592680 @default.
• W2801127910 hasConceptScore W2801127910C19067145 @default.
• W2801127910 hasConceptScore W2801127910C191897082 @default.
• W2801127910 hasConceptScore W2801127910C192562407 @default.
• W2801127910 hasConceptScore W2801127910C22423302 @default.
• W2801127910 hasConceptScore W2801127910C25442681 @default.
• W2801127910 hasConceptScore W2801127910C26771246 @default.
• W2801127910 hasConceptScore W2801127910C2779851234 @default.
• W2801127910 hasConceptScore W2801127910C43617362 @default.
• W2801127910 hasConceptScore W2801127910C49040817 @default.
• W2801127910 hasConceptScore W2801127910C547737533 @default.
• W2801127910 hasConceptScore W2801127910C56052488 @default.
• W2801127910 hasConceptScore W2801127910C61427134 @default.
• W2801127910 hasConceptScore W2801127910C62520636 @default.
• W2801127910 hasConceptScore W2801127910C8010536 @default.
• W2801127910 hasIssue "4" @default.
• W2801127910 hasLocation W28011279101 @default.

• next