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• W2801526583 abstract "The mechanisms to remove the native oxide layer on Ge(001) surfaces by an in situ hydrogen plasma inside an atomic layer deposition (ALD) reactor has been studied. A strong dependence of the reaction mechanism in the temperature range commonly employed by ALD has been identified through the combined analysis of atomic force microscopy, x-ray photoelectron and Raman spectroscopy. At low temperatures (e.g., 110 °C), the hydrogen plasma removed both Ge and O species from the native GeO2 layer, but also induced surface damage to Ge substrate. At high temperatures (e.g., 330 °C), only O species were removed from the native oxide leaving a nanocrystalline Ge overlayer behind. The thermodynamically unstable nature of hydrogen passivation on Ge resulted in a Ge surface with a high density of dangling bonds. The transition temperature between the two reaction mechanisms was determined to be about 270 °C, allowing to compromise between removing a native oxide layer entirely and hydrogenating the underlying Ge surface without surface damage." @default.
• W2801526583 created "2018-05-17" @default.
• W2801526583 creator A5020002554 @default.
• W2801526583 creator A5051699358 @default.
• W2801526583 creator A5054723061 @default.
• W2801526583 creator A5065898997 @default.
• W2801526583 date "2018-05-01" @default.
• W2801526583 modified "2023-10-18" @default.
• W2801526583 title "Native oxide removal from Ge surfaces by hydrogen plasma" @default.
• W2801526583 cites W1554286156 @default.
• W2801526583 cites W1965805242 @default.
• W2801526583 cites W1977758722 @default.
• W2801526583 cites W1978733817 @default.
• W2801526583 cites W1992275686 @default.
• W2801526583 cites W1995207142 @default.
• W2801526583 cites W2001730578 @default.
• W2801526583 cites W2001944474 @default.
• W2801526583 cites W2017062950 @default.
• W2801526583 cites W2029165309 @default.
• W2801526583 cites W2033089641 @default.
• W2801526583 cites W2042356147 @default.
• W2801526583 cites W2046245233 @default.
• W2801526583 cites W2065592458 @default.
• W2801526583 cites W2084756839 @default.
• W2801526583 cites W2154569170 @default.
• W2801526583 cites W2171695562 @default.
• W2801526583 cites W2329055523 @default.
• W2801526583 cites W2332454650 @default.
• W2801526583 cites W2604657610 @default.
• W2801526583 cites W2694351310 @default.
• W2801526583 cites W3104501828 @default.
• W2801526583 doi "https://doi.org/10.1116/1.5020966" @default.
• W2801526583 hasPublicationYear "2018" @default.
• W2801526583 type Work @default.
• W2801526583 sameAs 2801526583 @default.
• W2801526583 citedByCount "1" @default.
• W2801526583 countsByYear W28015265832023 @default.
• W2801526583 crossrefType "journal-article" @default.
• W2801526583 hasAuthorship W2801526583A5020002554 @default.
• W2801526583 hasAuthorship W2801526583A5051699358 @default.
• W2801526583 hasAuthorship W2801526583A5054723061 @default.
• W2801526583 hasAuthorship W2801526583A5065898997 @default.
• W2801526583 hasConcept C111368507 @default.
• W2801526583 hasConcept C113196181 @default.
• W2801526583 hasConcept C120665830 @default.
• W2801526583 hasConcept C121332964 @default.
• W2801526583 hasConcept C127313418 @default.
• W2801526583 hasConcept C127413603 @default.
• W2801526583 hasConcept C147789679 @default.
• W2801526583 hasConcept C171250308 @default.
• W2801526583 hasConcept C175708663 @default.
• W2801526583 hasConcept C178790620 @default.
• W2801526583 hasConcept C185592680 @default.
• W2801526583 hasConcept C191897082 @default.
• W2801526583 hasConcept C192562407 @default.
• W2801526583 hasConcept C2775913835 @default.
• W2801526583 hasConcept C2777289219 @default.
• W2801526583 hasConcept C2779227376 @default.
• W2801526583 hasConcept C2779851234 @default.
• W2801526583 hasConcept C32424582 @default.
• W2801526583 hasConcept C33574316 @default.
• W2801526583 hasConcept C40003534 @default.
• W2801526583 hasConcept C42360764 @default.
• W2801526583 hasConcept C43617362 @default.
• W2801526583 hasConcept C512968161 @default.
• W2801526583 hasConcept C69544855 @default.
• W2801526583 hasConceptScore W2801526583C111368507 @default.
• W2801526583 hasConceptScore W2801526583C113196181 @default.
• W2801526583 hasConceptScore W2801526583C120665830 @default.
• W2801526583 hasConceptScore W2801526583C121332964 @default.
• W2801526583 hasConceptScore W2801526583C127313418 @default.
• W2801526583 hasConceptScore W2801526583C127413603 @default.
• W2801526583 hasConceptScore W2801526583C147789679 @default.
• W2801526583 hasConceptScore W2801526583C171250308 @default.
• W2801526583 hasConceptScore W2801526583C175708663 @default.
• W2801526583 hasConceptScore W2801526583C178790620 @default.
• W2801526583 hasConceptScore W2801526583C185592680 @default.
• W2801526583 hasConceptScore W2801526583C191897082 @default.
• W2801526583 hasConceptScore W2801526583C192562407 @default.
• W2801526583 hasConceptScore W2801526583C2775913835 @default.
• W2801526583 hasConceptScore W2801526583C2777289219 @default.
• W2801526583 hasConceptScore W2801526583C2779227376 @default.
• W2801526583 hasConceptScore W2801526583C2779851234 @default.
• W2801526583 hasConceptScore W2801526583C32424582 @default.
• W2801526583 hasConceptScore W2801526583C33574316 @default.
• W2801526583 hasConceptScore W2801526583C40003534 @default.
• W2801526583 hasConceptScore W2801526583C42360764 @default.
• W2801526583 hasConceptScore W2801526583C43617362 @default.
• W2801526583 hasConceptScore W2801526583C512968161 @default.
• W2801526583 hasConceptScore W2801526583C69544855 @default.
• W2801526583 hasFunder F4320306076 @default.
• W2801526583 hasIssue "3" @default.
• W2801526583 hasLocation W28015265831 @default.
• W2801526583 hasOpenAccess W2801526583 @default.
• W2801526583 hasPrimaryLocation W28015265831 @default.
• W2801526583 hasRelatedWork W1972461716 @default.
• W2801526583 hasRelatedWork W1996883039 @default.
• W2801526583 hasRelatedWork W2026191106 @default.
• W2801526583 hasRelatedWork W2043802624 @default.
• W2801526583 hasRelatedWork W2045974853 @default.

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