Matches in SemOpenAlex for { <https://semopenalex.org/work/W2801602802> ?p ?o ?g. }
- W2801602802 endingPage "156" @default.
- W2801602802 startingPage "148" @default.
- W2801602802 abstract "The precise control of the growth nanostructured thin films at low temperature is critical for the continued development of microelectronic enabled devices. In this study, nanocomposite Ni-Si-N thin films were deposited at low temperature by reactive high-power impulse magnetron sputtering. A composite Ni-Si target (15 at.% Si) in combination with a Ar/N2 plasma were used to deposit films onto Si(0 0 1) substrates, without any additional substrate heating or any post-annealing. The films microstructure changes from a polycrystalline to nanocomposite structure when the nitrogen content exceeds 16 at.%. X-ray diffraction and (scanning) transmission electron microscopy analyses reveal that the microstructure consists of nanocrystals, NixSi (x > 1) 7–8 nm in size, embedded in an amorphous SiNx matrix. It is proposed that this nanostructure is formed at low temperatures due to the repeated-nucleation of NixSi nanocrystals, the growth of which is restricted by the formation of the SiNx phase. X-ray photoelectron spectroscopy revealed the trace presence of a ternary solid solution mainly induced by the diffusion of Ni into the SiNx matrix. Four-probe electrical measurements reveal all the deposited films are electrically conducting." @default.
- W2801602802 created "2018-05-17" @default.
- W2801602802 creator A5018336932 @default.
- W2801602802 creator A5028508678 @default.
- W2801602802 creator A5031137969 @default.
- W2801602802 creator A5034910199 @default.
- W2801602802 creator A5084216540 @default.
- W2801602802 date "2018-10-01" @default.
- W2801602802 modified "2023-10-03" @default.
- W2801602802 title "Phase separation within NiSiN coatings during reactive HiPIMS discharges: A new pathway to grow NixSi nanocrystals composites at low temperature" @default.
- W2801602802 cites W1525988226 @default.
- W2801602802 cites W1535225240 @default.
- W2801602802 cites W1612981304 @default.
- W2801602802 cites W1966417390 @default.
- W2801602802 cites W1966740732 @default.
- W2801602802 cites W1967376099 @default.
- W2801602802 cites W1968395956 @default.
- W2801602802 cites W1970311596 @default.
- W2801602802 cites W1971111028 @default.
- W2801602802 cites W1972823239 @default.
- W2801602802 cites W1975323968 @default.
- W2801602802 cites W1979864788 @default.
- W2801602802 cites W1987049184 @default.
- W2801602802 cites W1989804294 @default.
- W2801602802 cites W1993299964 @default.
- W2801602802 cites W1997066788 @default.
- W2801602802 cites W2000577584 @default.
- W2801602802 cites W2001088526 @default.
- W2801602802 cites W2006040974 @default.
- W2801602802 cites W2007848992 @default.
- W2801602802 cites W2009487121 @default.
- W2801602802 cites W2009652977 @default.
- W2801602802 cites W2014112127 @default.
- W2801602802 cites W2014222087 @default.
- W2801602802 cites W2014718743 @default.
- W2801602802 cites W2018181731 @default.
- W2801602802 cites W2021253621 @default.
- W2801602802 cites W2026008498 @default.
- W2801602802 cites W2029844492 @default.
- W2801602802 cites W2035260470 @default.
- W2801602802 cites W2035513427 @default.
- W2801602802 cites W2036778133 @default.
- W2801602802 cites W2040179900 @default.
- W2801602802 cites W2042894806 @default.
- W2801602802 cites W2043036922 @default.
- W2801602802 cites W2051757654 @default.
- W2801602802 cites W2056043254 @default.
- W2801602802 cites W2059784933 @default.
- W2801602802 cites W2064437711 @default.
- W2801602802 cites W2065138335 @default.
- W2801602802 cites W2065664067 @default.
- W2801602802 cites W2069530685 @default.
- W2801602802 cites W2072280054 @default.
- W2801602802 cites W2075441058 @default.
- W2801602802 cites W2077741117 @default.
- W2801602802 cites W2083788965 @default.
- W2801602802 cites W2084478069 @default.
- W2801602802 cites W2085647758 @default.
- W2801602802 cites W2088015257 @default.
- W2801602802 cites W2088765806 @default.
- W2801602802 cites W2090051733 @default.
- W2801602802 cites W2095546650 @default.
- W2801602802 cites W2105963759 @default.
- W2801602802 cites W2117441547 @default.
- W2801602802 cites W2119368217 @default.
- W2801602802 cites W2121547466 @default.
- W2801602802 cites W2132196663 @default.
- W2801602802 cites W2133253882 @default.
- W2801602802 cites W2153703866 @default.
- W2801602802 cites W2340409300 @default.
- W2801602802 cites W2513598720 @default.
- W2801602802 cites W2611557186 @default.
- W2801602802 doi "https://doi.org/10.1016/j.apsusc.2018.05.061" @default.
- W2801602802 hasPublicationYear "2018" @default.
- W2801602802 type Work @default.
- W2801602802 sameAs 2801602802 @default.
- W2801602802 citedByCount "0" @default.
- W2801602802 crossrefType "journal-article" @default.
- W2801602802 hasAuthorship W2801602802A5018336932 @default.
- W2801602802 hasAuthorship W2801602802A5028508678 @default.
- W2801602802 hasAuthorship W2801602802A5031137969 @default.
- W2801602802 hasAuthorship W2801602802A5034910199 @default.
- W2801602802 hasAuthorship W2801602802A5084216540 @default.
- W2801602802 hasBestOaLocation W28016028022 @default.
- W2801602802 hasConcept C113196181 @default.
- W2801602802 hasConcept C127413603 @default.
- W2801602802 hasConcept C137637335 @default.
- W2801602802 hasConcept C159985019 @default.
- W2801602802 hasConcept C171250308 @default.
- W2801602802 hasConcept C175708663 @default.
- W2801602802 hasConcept C175854130 @default.
- W2801602802 hasConcept C178790620 @default.
- W2801602802 hasConcept C185592680 @default.
- W2801602802 hasConcept C19067145 @default.
- W2801602802 hasConcept C191897082 @default.
- W2801602802 hasConcept C192562407 @default.
- W2801602802 hasConcept C22423302 @default.
- W2801602802 hasConcept C2777855556 @default.