FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2804080416> ?p ?o ?g. }

• W2804080416 endingPage "264003" @default.
• W2804080416 startingPage "264003" @default.
• W2804080416 abstract "The surface morphology of molybdenum silicide (Mo x Si1-x ) films has been studied after low-energy Ar+ ion beam sputtering (IBS) to explore eventual pattern formation on compound targets and, simultaneously, gather information about the mechanisms behind silicide-assisted nanopatterning of silicon surfaces by IBS. For this purpose, Mo x Si1-x films with compositions below, equal and above the MoSi2 stoichiometry (x = 0.33) have been produced by magnetron sputtering, as assessed by Rutherford backscattering spectrometry (RBS). The surface morphology of silicon and silicide films before and after IBS has been imaged by atomic force microscopy (AFM), comprising conditions where typical nanodot or ripple patterns emerge on the former. In the case of irradiated Mo x Si1-x surfaces, AFM shows a marked surface smoothing at normal incidence with and without additional Mo incorporation (the former results in nanodot patterns on Si). The morphological analysis also provides no evidence of ion-induced phase separation in irradiated Mo x Si1-x . Contrary to silicon, Mo x Si1-x surfaces also do not display ripple formation for (impurity free) oblique irradiations, except at grazing incidence conditions where parallel ripples emerge in a more evident fashion than in the Si counterpart. By means of RBS, irradiated Mo x Si1-x films with 1 keV Ar+ at normal incidence have also been used to measure experimentally the (absolute) sputtering yield and rate of Si and Mo x Si1-x materials. The analysis reveals that, under the present working conditions, the erosion rate of silicides is larger than for silicon, supporting simulations from the TRIDYN code. This finding questions the shielding effect from silicide regions as roughening mechanism in metal-assisted nanopatterning of silicon. On the contrary, the results highlight the relevance of in situ silicide formation. Ripple formation on Mo x Si1-x under grazing incidence is also attributed to the dominance of sputtering effects under this geometry. In conclusion, our work provides some insights into the complex morphological evolution of compound surfaces and solid experimental evidences regarding the mechanisms behind silicide-assisted nanopatterning." @default.
• W2804080416 created "2018-06-01" @default.
• W2804080416 creator A5027830536 @default.
• W2804080416 creator A5060579181 @default.
• W2804080416 creator A5074624742 @default.
• W2804080416 date "2018-06-06" @default.
• W2804080416 modified "2023-10-16" @default.
• W2804080416 title "Surface morphology of molybdenum silicide films upon low-energy ion beam sputtering" @default.
• W2804080416 cites W1577131311 @default.
• W2804080416 cites W1855873661 @default.
• W2804080416 cites W1965085559 @default.
• W2804080416 cites W1965879164 @default.
• W2804080416 cites W1979545045 @default.
• W2804080416 cites W1987635100 @default.
• W2804080416 cites W1991139606 @default.
• W2804080416 cites W2007318848 @default.
• W2804080416 cites W2009671587 @default.
• W2804080416 cites W2012090246 @default.
• W2804080416 cites W2016770671 @default.
• W2804080416 cites W2017147470 @default.
• W2804080416 cites W2017333555 @default.
• W2804080416 cites W2018398990 @default.
• W2804080416 cites W2022236170 @default.
• W2804080416 cites W2022440027 @default.
• W2804080416 cites W2022572590 @default.
• W2804080416 cites W2030125706 @default.
• W2804080416 cites W2046431289 @default.
• W2804080416 cites W2047205370 @default.
• W2804080416 cites W2053667303 @default.
• W2804080416 cites W2067894730 @default.
• W2804080416 cites W2094821484 @default.
• W2804080416 cites W2105812919 @default.
• W2804080416 cites W2114882294 @default.
• W2804080416 cites W2314944187 @default.
• W2804080416 cites W2326533750 @default.
• W2804080416 cites W2327925688 @default.
• W2804080416 cites W2785534081 @default.
• W2804080416 cites W3099296563 @default.
• W2804080416 cites W3099721034 @default.
• W2804080416 cites W3099925549 @default.
• W2804080416 cites W2095113015 @default.
• W2804080416 doi "https://doi.org/10.1088/1361-648x/aac4f6" @default.
• W2804080416 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/29762135" @default.
• W2804080416 hasPublicationYear "2018" @default.
• W2804080416 type Work @default.
• W2804080416 sameAs 2804080416 @default.
• W2804080416 citedByCount "10" @default.
• W2804080416 countsByYear W28040804162018 @default.
• W2804080416 countsByYear W28040804162019 @default.
• W2804080416 countsByYear W28040804162020 @default.
• W2804080416 countsByYear W28040804162022 @default.
• W2804080416 countsByYear W28040804162023 @default.
• W2804080416 crossrefType "journal-article" @default.
• W2804080416 hasAuthorship W2804080416A5027830536 @default.
• W2804080416 hasAuthorship W2804080416A5060579181 @default.
• W2804080416 hasAuthorship W2804080416A5074624742 @default.
• W2804080416 hasConcept C111337013 @default.
• W2804080416 hasConcept C113196181 @default.
• W2804080416 hasConcept C121332964 @default.
• W2804080416 hasConcept C171250308 @default.
• W2804080416 hasConcept C185544564 @default.
• W2804080416 hasConcept C185592680 @default.
• W2804080416 hasConcept C19067145 @default.
• W2804080416 hasConcept C191897082 @default.
• W2804080416 hasConcept C192562407 @default.
• W2804080416 hasConcept C22423302 @default.
• W2804080416 hasConcept C2780547777 @default.
• W2804080416 hasConcept C2780901251 @default.
• W2804080416 hasConcept C43617362 @default.
• W2804080416 hasConcept C49040817 @default.
• W2804080416 hasConcept C544956773 @default.
• W2804080416 hasConcept C549387045 @default.
• W2804080416 hasConcept C61427134 @default.
• W2804080416 hasConcept C66344492 @default.
• W2804080416 hasConceptScore W2804080416C111337013 @default.
• W2804080416 hasConceptScore W2804080416C113196181 @default.
• W2804080416 hasConceptScore W2804080416C121332964 @default.
• W2804080416 hasConceptScore W2804080416C171250308 @default.
• W2804080416 hasConceptScore W2804080416C185544564 @default.
• W2804080416 hasConceptScore W2804080416C185592680 @default.
• W2804080416 hasConceptScore W2804080416C19067145 @default.
• W2804080416 hasConceptScore W2804080416C191897082 @default.
• W2804080416 hasConceptScore W2804080416C192562407 @default.
• W2804080416 hasConceptScore W2804080416C22423302 @default.
• W2804080416 hasConceptScore W2804080416C2780547777 @default.
• W2804080416 hasConceptScore W2804080416C2780901251 @default.
• W2804080416 hasConceptScore W2804080416C43617362 @default.
• W2804080416 hasConceptScore W2804080416C49040817 @default.
• W2804080416 hasConceptScore W2804080416C544956773 @default.
• W2804080416 hasConceptScore W2804080416C549387045 @default.
• W2804080416 hasConceptScore W2804080416C61427134 @default.
• W2804080416 hasConceptScore W2804080416C66344492 @default.
• W2804080416 hasFunder F4320335204 @default.
• W2804080416 hasIssue "26" @default.
• W2804080416 hasLocation W28040804161 @default.
• W2804080416 hasLocation W28040804162 @default.
• W2804080416 hasOpenAccess W2804080416 @default.
• W2804080416 hasPrimaryLocation W28040804161 @default.

• next