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- W2804526384 abstract "The increasing use of chromatic confocal technology for, e.g. fast, in-line optical topography, and measuring thickness, roughness and profiles implies a need for the characterization of various aspects of the sensors. Single-point, line and matrix versions of chromatic confocal technology, encoding depth information into wavelength, have been developed. Of these, line sensors are particularly suitable for in-line process measurement. Metrological characterization and development of practical methods for calibration and checking is needed for new optical methods and devices." @default.
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- W2804526384 date "2018-04-09" @default.
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- W2804526384 title "Metrological characterization methods for confocal chromatic line sensors and optical topography sensors" @default.
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- W2804526384 doi "https://doi.org/10.1088/1361-6501/aaad2b" @default.
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