Matches in SemOpenAlex for { <https://semopenalex.org/work/W2805662956> ?p ?o ?g. }
- W2805662956 endingPage "916" @default.
- W2805662956 startingPage "909" @default.
- W2805662956 abstract "It was shown that the residual stress of the tetrahedral amorphous carbon (ta-C) thin film deposited on insulating material by filtered cathodic vacuum arc (FCVA) source can be controlled with mid-frequency pulse bias voltage. The residual stress of ta-C thin film decreased monotonically with the substrate pulse bias when the base material to be coated was insulating. There was not the apparent peak of residual stress about the substrate pulse bias which appeared for the electrically conducting base material. It was observed that the residual stress increased with the arc current and dielectric thickness at some pulse voltage range (100 V–1000 V). The sp3 contents calculated by using Raman spectra and the surface hardness values as a function of substrate pulse voltage showed the similar trend with the residual stress values. For ta-C thin film deposited on the polished alumina sample, it was shown that the critical load in the scratch test decreased with the residual stress. The residual stress of ta-C on the insulating base material was explained with the change of the sheath voltage in the equivalent circuit model." @default.
- W2805662956 created "2018-06-13" @default.
- W2805662956 creator A5002119349 @default.
- W2805662956 creator A5013639225 @default.
- W2805662956 creator A5030034555 @default.
- W2805662956 creator A5075981884 @default.
- W2805662956 date "2018-09-01" @default.
- W2805662956 modified "2023-10-13" @default.
- W2805662956 title "Control of residual stress of tetrahedral amorphous carbon thin film deposited on dielectric material by filtered cathodic vacuum arc source by using mid-frequency pulse bias voltage" @default.
- W2805662956 cites W1965742079 @default.
- W2805662956 cites W1967387078 @default.
- W2805662956 cites W1969730859 @default.
- W2805662956 cites W1970087575 @default.
- W2805662956 cites W1971802197 @default.
- W2805662956 cites W1988133629 @default.
- W2805662956 cites W1995109857 @default.
- W2805662956 cites W1999023192 @default.
- W2805662956 cites W2018790967 @default.
- W2805662956 cites W2046113668 @default.
- W2805662956 cites W2046830675 @default.
- W2805662956 cites W2054104743 @default.
- W2805662956 cites W2054800181 @default.
- W2805662956 cites W2064467938 @default.
- W2805662956 cites W2074672014 @default.
- W2805662956 cites W2081225107 @default.
- W2805662956 cites W2081936709 @default.
- W2805662956 cites W2087536102 @default.
- W2805662956 cites W2095184126 @default.
- W2805662956 cites W2126364300 @default.
- W2805662956 cites W2126477580 @default.
- W2805662956 cites W2159174698 @default.
- W2805662956 cites W2168785444 @default.
- W2805662956 doi "https://doi.org/10.1016/j.surfcoat.2018.06.004" @default.
- W2805662956 hasPublicationYear "2018" @default.
- W2805662956 type Work @default.
- W2805662956 sameAs 2805662956 @default.
- W2805662956 citedByCount "13" @default.
- W2805662956 countsByYear W28056629562019 @default.
- W2805662956 countsByYear W28056629562020 @default.
- W2805662956 countsByYear W28056629562021 @default.
- W2805662956 countsByYear W28056629562022 @default.
- W2805662956 countsByYear W28056629562023 @default.
- W2805662956 crossrefType "journal-article" @default.
- W2805662956 hasAuthorship W2805662956A5002119349 @default.
- W2805662956 hasAuthorship W2805662956A5013639225 @default.
- W2805662956 hasAuthorship W2805662956A5030034555 @default.
- W2805662956 hasAuthorship W2805662956A5075981884 @default.
- W2805662956 hasConcept C111368507 @default.
- W2805662956 hasConcept C113196181 @default.
- W2805662956 hasConcept C119599485 @default.
- W2805662956 hasConcept C127313418 @default.
- W2805662956 hasConcept C127413603 @default.
- W2805662956 hasConcept C133386390 @default.
- W2805662956 hasConcept C138885662 @default.
- W2805662956 hasConcept C159985019 @default.
- W2805662956 hasConcept C165801399 @default.
- W2805662956 hasConcept C171250308 @default.
- W2805662956 hasConcept C185592680 @default.
- W2805662956 hasConcept C19067145 @default.
- W2805662956 hasConcept C192562407 @default.
- W2805662956 hasConcept C201931942 @default.
- W2805662956 hasConcept C20254490 @default.
- W2805662956 hasConcept C21036866 @default.
- W2805662956 hasConcept C2777289219 @default.
- W2805662956 hasConcept C37292000 @default.
- W2805662956 hasConcept C41895202 @default.
- W2805662956 hasConcept C43617362 @default.
- W2805662956 hasConcept C44441586 @default.
- W2805662956 hasConcept C49040817 @default.
- W2805662956 hasConcept C49110097 @default.
- W2805662956 hasConcept C56052488 @default.
- W2805662956 hasConcept C8010536 @default.
- W2805662956 hasConceptScore W2805662956C111368507 @default.
- W2805662956 hasConceptScore W2805662956C113196181 @default.
- W2805662956 hasConceptScore W2805662956C119599485 @default.
- W2805662956 hasConceptScore W2805662956C127313418 @default.
- W2805662956 hasConceptScore W2805662956C127413603 @default.
- W2805662956 hasConceptScore W2805662956C133386390 @default.
- W2805662956 hasConceptScore W2805662956C138885662 @default.
- W2805662956 hasConceptScore W2805662956C159985019 @default.
- W2805662956 hasConceptScore W2805662956C165801399 @default.
- W2805662956 hasConceptScore W2805662956C171250308 @default.
- W2805662956 hasConceptScore W2805662956C185592680 @default.
- W2805662956 hasConceptScore W2805662956C19067145 @default.
- W2805662956 hasConceptScore W2805662956C192562407 @default.
- W2805662956 hasConceptScore W2805662956C201931942 @default.
- W2805662956 hasConceptScore W2805662956C20254490 @default.
- W2805662956 hasConceptScore W2805662956C21036866 @default.
- W2805662956 hasConceptScore W2805662956C2777289219 @default.
- W2805662956 hasConceptScore W2805662956C37292000 @default.
- W2805662956 hasConceptScore W2805662956C41895202 @default.
- W2805662956 hasConceptScore W2805662956C43617362 @default.
- W2805662956 hasConceptScore W2805662956C44441586 @default.
- W2805662956 hasConceptScore W2805662956C49040817 @default.
- W2805662956 hasConceptScore W2805662956C49110097 @default.
- W2805662956 hasConceptScore W2805662956C56052488 @default.
- W2805662956 hasConceptScore W2805662956C8010536 @default.
- W2805662956 hasFunder F4320321681 @default.