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- W2806233923 abstract "In this work, we analyze compensating defects which are formed after implantation of aluminum (Al) into n-type 4H-SiC epitaxial layers and subsequent thermal annealing. These defects reduce the expected free charge carrier density by 84% for a low doped layer with [Al] impl ≈ 9·10 16 cm -3 and by 27 % for a high doped layer with [Al] impl ≈ 2·10 19 cm -3 . Furthermore, an electrical activation ratio of implanted aluminum ions of 100 % is calculated. The ionization energy of implanted aluminum as measured by Hall effect and admittance spectroscopy ranges from 101 meV to 305 meV depending on the doping concentration." @default.
- W2806233923 created "2018-06-13" @default.
- W2806233923 creator A5004241832 @default.
- W2806233923 creator A5006471811 @default.
- W2806233923 creator A5036213247 @default.
- W2806233923 creator A5047376841 @default.
- W2806233923 creator A5048880686 @default.
- W2806233923 creator A5065059355 @default.
- W2806233923 creator A5067825802 @default.
- W2806233923 creator A5083915541 @default.
- W2806233923 creator A5088382332 @default.
- W2806233923 date "2018-06-01" @default.
- W2806233923 modified "2023-09-27" @default.
- W2806233923 title "Analysis of Compensation Effects in Aluminum-Implanted 4H-SiC Devices" @default.
- W2806233923 cites W182252303 @default.
- W2806233923 cites W1964000466 @default.
- W2806233923 cites W1970105444 @default.
- W2806233923 cites W1992296929 @default.
- W2806233923 cites W2057174595 @default.
- W2806233923 cites W2078565666 @default.
- W2806233923 cites W2292224711 @default.
- W2806233923 cites W4245755231 @default.
- W2806233923 doi "https://doi.org/10.4028/www.scientific.net/msf.924.184" @default.
- W2806233923 hasPublicationYear "2018" @default.
- W2806233923 type Work @default.
- W2806233923 sameAs 2806233923 @default.
- W2806233923 citedByCount "12" @default.
- W2806233923 countsByYear W28062339232018 @default.
- W2806233923 countsByYear W28062339232019 @default.
- W2806233923 countsByYear W28062339232020 @default.
- W2806233923 countsByYear W28062339232021 @default.
- W2806233923 countsByYear W28062339232022 @default.
- W2806233923 countsByYear W28062339232023 @default.
- W2806233923 crossrefType "journal-article" @default.
- W2806233923 hasAuthorship W2806233923A5004241832 @default.
- W2806233923 hasAuthorship W2806233923A5006471811 @default.
- W2806233923 hasAuthorship W2806233923A5036213247 @default.
- W2806233923 hasAuthorship W2806233923A5047376841 @default.
- W2806233923 hasAuthorship W2806233923A5048880686 @default.
- W2806233923 hasAuthorship W2806233923A5065059355 @default.
- W2806233923 hasAuthorship W2806233923A5067825802 @default.
- W2806233923 hasAuthorship W2806233923A5083915541 @default.
- W2806233923 hasAuthorship W2806233923A5088382332 @default.
- W2806233923 hasConcept C11171543 @default.
- W2806233923 hasConcept C127413603 @default.
- W2806233923 hasConcept C15744967 @default.
- W2806233923 hasConcept C191897082 @default.
- W2806233923 hasConcept C192562407 @default.
- W2806233923 hasConcept C2780023022 @default.
- W2806233923 hasConcept C49040817 @default.
- W2806233923 hasConcept C513153333 @default.
- W2806233923 hasConcept C61696701 @default.
- W2806233923 hasConcept C77595967 @default.
- W2806233923 hasConceptScore W2806233923C11171543 @default.
- W2806233923 hasConceptScore W2806233923C127413603 @default.
- W2806233923 hasConceptScore W2806233923C15744967 @default.
- W2806233923 hasConceptScore W2806233923C191897082 @default.
- W2806233923 hasConceptScore W2806233923C192562407 @default.
- W2806233923 hasConceptScore W2806233923C2780023022 @default.
- W2806233923 hasConceptScore W2806233923C49040817 @default.
- W2806233923 hasConceptScore W2806233923C513153333 @default.
- W2806233923 hasConceptScore W2806233923C61696701 @default.
- W2806233923 hasConceptScore W2806233923C77595967 @default.
- W2806233923 hasLocation W28062339231 @default.
- W2806233923 hasOpenAccess W2806233923 @default.
- W2806233923 hasPrimaryLocation W28062339231 @default.
- W2806233923 hasRelatedWork W1559448177 @default.
- W2806233923 hasRelatedWork W1970749972 @default.
- W2806233923 hasRelatedWork W1972926110 @default.
- W2806233923 hasRelatedWork W1976795281 @default.
- W2806233923 hasRelatedWork W1980781092 @default.
- W2806233923 hasRelatedWork W1990452240 @default.
- W2806233923 hasRelatedWork W2012807635 @default.
- W2806233923 hasRelatedWork W2018898542 @default.
- W2806233923 hasRelatedWork W2053549939 @default.
- W2806233923 hasRelatedWork W2056615900 @default.
- W2806233923 hasRelatedWork W2062761881 @default.
- W2806233923 hasRelatedWork W2098457627 @default.
- W2806233923 hasRelatedWork W2156274094 @default.
- W2806233923 hasRelatedWork W2162442950 @default.
- W2806233923 hasRelatedWork W2304135291 @default.
- W2806233923 hasRelatedWork W2518962354 @default.
- W2806233923 hasRelatedWork W2942679282 @default.
- W2806233923 hasRelatedWork W2130662029 @default.
- W2806233923 hasRelatedWork W276932449 @default.
- W2806233923 hasRelatedWork W3098109639 @default.
- W2806233923 isParatext "false" @default.
- W2806233923 isRetracted "false" @default.
- W2806233923 magId "2806233923" @default.
- W2806233923 workType "article" @default.