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• W2807336048 abstract "The outstanding material properties of single crystal diamond have been at the origin of the long-standing interest in its exploitation for engineering of high-performance micro- and nanosystems. In particular, the extreme mechanical hardness, the highest elastic modulus of any bulk material, low density, and the promise for low friction have spurred interest most notably for micro-mechanical and MEMS applications. While reactive ion etching of diamond has been reported previously, precision structuring of freestanding micro-mechanical components in single crystal diamond by deep reactive ion etching has hitherto remained elusive, related to limitations in the etch processes, such as the need of thick hard masks, micromasking effects, and limited etch rates. In this work, we report on an optimized reactive ion etching process of single crystal diamond overcoming several of these shortcomings at the same time, and present a robust and reliable method to produce fully released micro-mechanical components in single crystal diamond. Using an optimized Al/SiO2 hard mask and a high-intensity oxygen plasma etch process, we obtain etch rates exceeding 30 µm/h and hard mask selectivity better than 1:50. We demonstrate fully freestanding micro-mechanical components for mechanical watches made of pure single crystal diamond. The components with a thickness of 150 µm are defined by lithography and deep reactive ion etching, and exhibit sidewall angles of 82°-93° with surface roughness better than 200 nm rms, demonstrating the potential of this powerful technique for precision microstructuring of single crystal diamond." @default.
• W2807336048 created "2018-06-13" @default.
• W2807336048 creator A5003485920 @default.
• W2807336048 creator A5035910263 @default.
• W2807336048 creator A5064591043 @default.
• W2807336048 creator A5069683456 @default.
• W2807336048 creator A5086528876 @default.
• W2807336048 creator A5088714594 @default.
• W2807336048 date "2018-06-18" @default.
• W2807336048 modified "2023-10-17" @default.
• W2807336048 title "Precision micro-mechanical components in single crystal diamond by deep reactive ion etching" @default.
• W2807336048 cites W1175640373 @default.
• W2807336048 cites W1867194666 @default.
• W2807336048 cites W1968459880 @default.
• W2807336048 cites W1988339217 @default.
• W2807336048 cites W1992119563 @default.
• W2807336048 cites W1997913942 @default.
• W2807336048 cites W2012272465 @default.
• W2807336048 cites W2014174828 @default.
• W2807336048 cites W2017059501 @default.
• W2807336048 cites W2018596401 @default.
• W2807336048 cites W2018714394 @default.
• W2807336048 cites W2021303295 @default.
• W2807336048 cites W2041019836 @default.
• W2807336048 cites W2042901212 @default.
• W2807336048 cites W2050351808 @default.
• W2807336048 cites W2057043360 @default.
• W2807336048 cites W2071855404 @default.
• W2807336048 cites W2072813189 @default.
• W2807336048 cites W2076649800 @default.
• W2807336048 cites W2081686205 @default.
• W2807336048 cites W2085841108 @default.
• W2807336048 cites W2104428958 @default.
• W2807336048 cites W2122604253 @default.
• W2807336048 cites W2128204209 @default.
• W2807336048 cites W2163332143 @default.
• W2807336048 cites W2166687037 @default.
• W2807336048 cites W2285052045 @default.
• W2807336048 cites W2314314234 @default.
• W2807336048 cites W2331332256 @default.
• W2807336048 cites W2468962298 @default.
• W2807336048 cites W2472501485 @default.
• W2807336048 cites W2537186330 @default.
• W2807336048 cites W2546778902 @default.
• W2807336048 cites W2550291337 @default.
• W2807336048 cites W2565542149 @default.
• W2807336048 cites W2579612670 @default.
• W2807336048 cites W2612057990 @default.
• W2807336048 cites W2765766092 @default.
• W2807336048 cites W2773761429 @default.
• W2807336048 cites W2952809977 @default.
• W2807336048 cites W598413054 @default.
• W2807336048 doi "https://doi.org/10.1038/s41378-018-0014-5" @default.
• W2807336048 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/6161503" @default.
• W2807336048 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/31057900" @default.
• W2807336048 hasPublicationYear "2018" @default.
• W2807336048 type Work @default.
• W2807336048 sameAs 2807336048 @default.
• W2807336048 citedByCount "28" @default.
• W2807336048 countsByYear W28073360482018 @default.
• W2807336048 countsByYear W28073360482019 @default.
• W2807336048 countsByYear W28073360482020 @default.
• W2807336048 countsByYear W28073360482021 @default.
• W2807336048 countsByYear W28073360482022 @default.
• W2807336048 countsByYear W28073360482023 @default.
• W2807336048 crossrefType "journal-article" @default.
• W2807336048 hasAuthorship W2807336048A5003485920 @default.
• W2807336048 hasAuthorship W2807336048A5035910263 @default.
• W2807336048 hasAuthorship W2807336048A5064591043 @default.
• W2807336048 hasAuthorship W2807336048A5069683456 @default.
• W2807336048 hasAuthorship W2807336048A5086528876 @default.
• W2807336048 hasAuthorship W2807336048A5088714594 @default.
• W2807336048 hasBestOaLocation W28073360481 @default.
• W2807336048 hasConcept C100460472 @default.
• W2807336048 hasConcept C107365816 @default.
• W2807336048 hasConcept C124634506 @default.
• W2807336048 hasConcept C130472188 @default.
• W2807336048 hasConcept C159985019 @default.
• W2807336048 hasConcept C171250308 @default.
• W2807336048 hasConcept C192562407 @default.
• W2807336048 hasConcept C199360897 @default.
• W2807336048 hasConcept C2776921476 @default.
• W2807336048 hasConcept C2779227376 @default.
• W2807336048 hasConcept C2781285689 @default.
• W2807336048 hasConcept C37977207 @default.
• W2807336048 hasConcept C41008148 @default.
• W2807336048 hasConcept C49040817 @default.
• W2807336048 hasConcept C71039073 @default.
• W2807336048 hasConceptScore W2807336048C100460472 @default.
• W2807336048 hasConceptScore W2807336048C107365816 @default.
• W2807336048 hasConceptScore W2807336048C124634506 @default.
• W2807336048 hasConceptScore W2807336048C130472188 @default.
• W2807336048 hasConceptScore W2807336048C159985019 @default.
• W2807336048 hasConceptScore W2807336048C171250308 @default.
• W2807336048 hasConceptScore W2807336048C192562407 @default.
• W2807336048 hasConceptScore W2807336048C199360897 @default.
• W2807336048 hasConceptScore W2807336048C2776921476 @default.
• W2807336048 hasConceptScore W2807336048C2779227376 @default.
• W2807336048 hasConceptScore W2807336048C2781285689 @default.
• W2807336048 hasConceptScore W2807336048C37977207 @default.

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