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- W2808479916 abstract "Micro cantilevers are an important component of smart sensors as they detect the stress on surfaces caused by various physical/ chemical or biological parameters. The proper design of the cantilever dimension helps to achieve optimum sensitivity of sensor. This work presents the design simulations of Si cantilever beam using Finite element method. The design is implemented by fabrication of a pair of cantilevers on a single trench. Deep Reactive-Ion Etching (DRIE) was employed to release the Sicantilever from bulk silicon. The released structure was characterized by using Laser Doppler Vibrometer (LDV). The Eigen frequency of the cantilever measured by LDV is found to be similar to the designed specifications. The design and fabrication aspects have been discussed in the paper along with analysis of the Eigen frequency achieved." @default.
- W2808479916 created "2018-06-21" @default.
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- W2808479916 date "2017-10-01" @default.
- W2808479916 modified "2023-09-27" @default.
- W2808479916 title "Realization of MEMS-based silicon cantilever using bulk micromachining" @default.
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- W2808479916 doi "https://doi.org/10.1109/rise.2017.8378193" @default.
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