Matches in SemOpenAlex for { <https://semopenalex.org/work/W2808558112> ?p ?o ?g. }
- W2808558112 endingPage "686" @default.
- W2808558112 startingPage "686" @default.
- W2808558112 abstract "We have designed and realized an athermal 4-channel wavelength (de-)multiplexer in silicon nitride (SiN). Minimized thermal sensitivity is achieved in a wide wavelength range by using wide and narrow waveguides with low and different thermal-optic coefficients in the two arms of Mach–Zehnder interferometers (MZIs). The SiN core layer and SiO2 cladding layers are deposited by a low-temperature plasma-enhanced chemical vapor deposition process. The fabricated MZI filter exhibits a thermal sensitivity within ±2.0 pm/°C in a wavelength range of 55 nm to near 1300 nm. Then, an athermal (de-)multiplexer based on cascaded MZIs has been demonstrated with a crosstalk ≤−22 dB and a thermal sensitivity <4.8 pm/°C for all four channels, reduced by 77% compared to a conventional SiN (de-)multiplexer. Owing to the passive operation and compatibility with the CMOS backend process, our devices have potential applications in 3D integration of photonics and electronics." @default.
- W2808558112 created "2018-06-21" @default.
- W2808558112 creator A5001828128 @default.
- W2808558112 creator A5028699131 @default.
- W2808558112 creator A5035989799 @default.
- W2808558112 creator A5066708654 @default.
- W2808558112 creator A5074438641 @default.
- W2808558112 creator A5084806807 @default.
- W2808558112 creator A5085804477 @default.
- W2808558112 creator A5086681109 @default.
- W2808558112 date "2018-06-14" @default.
- W2808558112 modified "2023-10-16" @default.
- W2808558112 title "Athermal 4-channel (de-)multiplexer in silicon nitride fabricated at low temperature" @default.
- W2808558112 cites W1565759351 @default.
- W2808558112 cites W1966951661 @default.
- W2808558112 cites W1969948398 @default.
- W2808558112 cites W1976590877 @default.
- W2808558112 cites W1977920424 @default.
- W2808558112 cites W1987217112 @default.
- W2808558112 cites W1997340653 @default.
- W2808558112 cites W1997969539 @default.
- W2808558112 cites W2002174447 @default.
- W2808558112 cites W2019633310 @default.
- W2808558112 cites W2021737526 @default.
- W2808558112 cites W2022339775 @default.
- W2808558112 cites W2029405520 @default.
- W2808558112 cites W2067521221 @default.
- W2808558112 cites W2076006541 @default.
- W2808558112 cites W2082175472 @default.
- W2808558112 cites W2084700013 @default.
- W2808558112 cites W2091613865 @default.
- W2808558112 cites W2099610951 @default.
- W2808558112 cites W2107926096 @default.
- W2808558112 cites W2118386806 @default.
- W2808558112 cites W2118936005 @default.
- W2808558112 cites W2165104196 @default.
- W2808558112 cites W2169956444 @default.
- W2808558112 cites W2220870060 @default.
- W2808558112 cites W2222422792 @default.
- W2808558112 cites W2222684113 @default.
- W2808558112 cites W2226240249 @default.
- W2808558112 cites W2228669439 @default.
- W2808558112 cites W2315668778 @default.
- W2808558112 cites W2420787938 @default.
- W2808558112 cites W2439558899 @default.
- W2808558112 cites W2508695551 @default.
- W2808558112 cites W2529995943 @default.
- W2808558112 cites W2562005548 @default.
- W2808558112 cites W2582847004 @default.
- W2808558112 cites W2616372360 @default.
- W2808558112 cites W2762170384 @default.
- W2808558112 cites W2772148077 @default.
- W2808558112 doi "https://doi.org/10.1364/prj.6.000686" @default.
- W2808558112 hasPublicationYear "2018" @default.
- W2808558112 type Work @default.
- W2808558112 sameAs 2808558112 @default.
- W2808558112 citedByCount "21" @default.
- W2808558112 countsByYear W28085581122018 @default.
- W2808558112 countsByYear W28085581122019 @default.
- W2808558112 countsByYear W28085581122020 @default.
- W2808558112 countsByYear W28085581122021 @default.
- W2808558112 countsByYear W28085581122022 @default.
- W2808558112 countsByYear W28085581122023 @default.
- W2808558112 crossrefType "journal-article" @default.
- W2808558112 hasAuthorship W2808558112A5001828128 @default.
- W2808558112 hasAuthorship W2808558112A5028699131 @default.
- W2808558112 hasAuthorship W2808558112A5035989799 @default.
- W2808558112 hasAuthorship W2808558112A5066708654 @default.
- W2808558112 hasAuthorship W2808558112A5074438641 @default.
- W2808558112 hasAuthorship W2808558112A5084806807 @default.
- W2808558112 hasAuthorship W2808558112A5085804477 @default.
- W2808558112 hasAuthorship W2808558112A5086681109 @default.
- W2808558112 hasConcept C127162648 @default.
- W2808558112 hasConcept C171250308 @default.
- W2808558112 hasConcept C192562407 @default.
- W2808558112 hasConcept C19275194 @default.
- W2808558112 hasConcept C2777431650 @default.
- W2808558112 hasConcept C41008148 @default.
- W2808558112 hasConcept C49040817 @default.
- W2808558112 hasConcept C544956773 @default.
- W2808558112 hasConcept C70970002 @default.
- W2808558112 hasConcept C76155785 @default.
- W2808558112 hasConceptScore W2808558112C127162648 @default.
- W2808558112 hasConceptScore W2808558112C171250308 @default.
- W2808558112 hasConceptScore W2808558112C192562407 @default.
- W2808558112 hasConceptScore W2808558112C19275194 @default.
- W2808558112 hasConceptScore W2808558112C2777431650 @default.
- W2808558112 hasConceptScore W2808558112C41008148 @default.
- W2808558112 hasConceptScore W2808558112C49040817 @default.
- W2808558112 hasConceptScore W2808558112C544956773 @default.
- W2808558112 hasConceptScore W2808558112C70970002 @default.
- W2808558112 hasConceptScore W2808558112C76155785 @default.
- W2808558112 hasFunder F4320321001 @default.
- W2808558112 hasFunder F4320335773 @default.
- W2808558112 hasIssue "7" @default.
- W2808558112 hasLocation W28085581121 @default.
- W2808558112 hasOpenAccess W2808558112 @default.
- W2808558112 hasPrimaryLocation W28085581121 @default.