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- W2808760172 endingPage "280" @default.
- W2808760172 startingPage "231" @default.
- W2808760172 abstract "In this chapter, advances in the use of III-V materials for both n- and p-MOSFET devices will be reviewed including progress in gate stack technology and its associated reliability. For the full potential of III-V to be realized in advanced CMOS technology nodes, it must be integrated on 300 mm wafers in order to leverage the benefits of the high-volume manufacturing techniques and toolsets used in advanced Si-CMOS manufacturing. Therefore, a strong emphasis in this chapter is placed on how III-V devices may be integrated onto a Si platform in order to be deployed in a manufacturable VLSI-compatible flow." @default.
- W2808760172 created "2018-06-29" @default.
- W2808760172 creator A5069706368 @default.
- W2808760172 date "2018-01-01" @default.
- W2808760172 modified "2023-10-03" @default.
- W2808760172 title "III-V Devices and Technology for CMOS" @default.
- W2808760172 cites W1155773498 @default.
- W2808760172 cites W1482125208 @default.
- W2808760172 cites W1494286525 @default.
- W2808760172 cites W1538941126 @default.
- W2808760172 cites W1539094466 @default.
- W2808760172 cites W1543888424 @default.
- W2808760172 cites W1556957619 @default.
- W2808760172 cites W1565422544 @default.
- W2808760172 cites W1569397749 @default.
- W2808760172 cites W1570618996 @default.
- W2808760172 cites W1576729065 @default.
- W2808760172 cites W1625565773 @default.
- W2808760172 cites W1627659639 @default.
- W2808760172 cites W1642436573 @default.
- W2808760172 cites W1650491801 @default.
- W2808760172 cites W1652463614 @default.
- W2808760172 cites W1668365559 @default.
- W2808760172 cites W1690798709 @default.
- W2808760172 cites W1725003191 @default.
- W2808760172 cites W1800369145 @default.
- W2808760172 cites W1867408936 @default.
- W2808760172 cites W1910369101 @default.
- W2808760172 cites W1915590810 @default.
- W2808760172 cites W1941406336 @default.
- W2808760172 cites W1944964526 @default.
- W2808760172 cites W1957052048 @default.
- W2808760172 cites W1964755904 @default.
- W2808760172 cites W1966862181 @default.
- W2808760172 cites W1967545802 @default.
- W2808760172 cites W1969030369 @default.
- W2808760172 cites W1969141180 @default.
- W2808760172 cites W1969584769 @default.
- W2808760172 cites W1970587745 @default.
- W2808760172 cites W1971662823 @default.
- W2808760172 cites W1972034862 @default.
- W2808760172 cites W1972986648 @default.
- W2808760172 cites W1974348745 @default.
- W2808760172 cites W1974396913 @default.
- W2808760172 cites W1975434102 @default.
- W2808760172 cites W1976868005 @default.
- W2808760172 cites W1980771070 @default.
- W2808760172 cites W1981258827 @default.
- W2808760172 cites W1984772856 @default.
- W2808760172 cites W1985113505 @default.
- W2808760172 cites W1985158061 @default.
- W2808760172 cites W1985388240 @default.
- W2808760172 cites W1987447205 @default.
- W2808760172 cites W1990207871 @default.
- W2808760172 cites W1990928913 @default.
- W2808760172 cites W1991830517 @default.
- W2808760172 cites W1997197098 @default.
- W2808760172 cites W1999613914 @default.
- W2808760172 cites W1999980158 @default.
- W2808760172 cites W2003720082 @default.
- W2808760172 cites W2003827499 @default.
- W2808760172 cites W2004981593 @default.
- W2808760172 cites W2005147003 @default.
- W2808760172 cites W2005306611 @default.
- W2808760172 cites W2008727661 @default.
- W2808760172 cites W2009312684 @default.
- W2808760172 cites W2009726527 @default.
- W2808760172 cites W2011100764 @default.
- W2808760172 cites W2017156642 @default.
- W2808760172 cites W2019216906 @default.
- W2808760172 cites W2020137323 @default.
- W2808760172 cites W2020161783 @default.
- W2808760172 cites W2022395165 @default.
- W2808760172 cites W2022639531 @default.
- W2808760172 cites W2022646733 @default.
- W2808760172 cites W2023074190 @default.
- W2808760172 cites W2023668401 @default.
- W2808760172 cites W2023677738 @default.
- W2808760172 cites W2024312952 @default.
- W2808760172 cites W2024369960 @default.
- W2808760172 cites W2024477630 @default.
- W2808760172 cites W2024703844 @default.
- W2808760172 cites W2024745200 @default.
- W2808760172 cites W2026207815 @default.
- W2808760172 cites W2029648022 @default.
- W2808760172 cites W2030251253 @default.
- W2808760172 cites W2030603928 @default.
- W2808760172 cites W2031028758 @default.
- W2808760172 cites W2031544920 @default.
- W2808760172 cites W2035968367 @default.
- W2808760172 cites W2036320853 @default.
- W2808760172 cites W2037836544 @default.
- W2808760172 cites W2038842933 @default.
- W2808760172 cites W2042421577 @default.
- W2808760172 cites W2043141080 @default.
- W2808760172 cites W2043690349 @default.
- W2808760172 cites W2044025121 @default.
- W2808760172 cites W2046324731 @default.