FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2809207981> ?p ?o ?g. }

• W2809207981 endingPage "068104" @default.
• W2809207981 startingPage "068104" @default.
• W2809207981 abstract "The polymer spin coating is critical in flexible electronic manufaction and micro-electro-mechanical system (MEMS) devices due to its simple operation, and uniformly coated layers. Some researchers focus on the effects of spin coating parameters such as wafer rotating speed, the viscosity of the coating liquid and solvent evaporation on final film thickness. In this work, the influence of substrate curvature on film thickness distribution is considered. A new parameter which represents the edge bead effect ratio (re) is proposed to investigate the influence factor of edge bead effect. Several operation parameters including the curvature of the substrate and the wafer-spin speed are taken into account to study the effects on the film thickness uniformity and edge-bead ratio. The morphologies and film thickness values of the spin-coated PDMS films under various substrate curvatures and coating speeds are measured with laser confocal microscopy. According to the results, both the convex and concave substrate will help to reduce the edge-bead effect significantly and thin film with better surface morphology can be obtained at high spin speed. Additionally, the relationship between the edge-bead ratio and the thin film thickness is like parabolic curve instead of linear dependence. This work may contribute to the mass production of flexible electronic devices." @default.
• W2809207981 created "2018-06-29" @default.
• W2809207981 creator A5006449883 @default.
• W2809207981 creator A5008890463 @default.
• W2809207981 creator A5053302644 @default.
• W2809207981 creator A5055009375 @default.
• W2809207981 creator A5082621273 @default.
• W2809207981 date "2018-06-01" @default.
• W2809207981 modified "2023-10-10" @default.
• W2809207981 title "Effect of substrate curvature on thickness distribution of polydimethylsiloxane thin film in spin coating process" @default.
• W2809207981 cites W1875304204 @default.
• W2809207981 cites W1971331302 @default.
• W2809207981 cites W1996473926 @default.
• W2809207981 cites W2015770028 @default.
• W2809207981 cites W2023868983 @default.
• W2809207981 cites W2025064062 @default.
• W2809207981 cites W2032325097 @default.
• W2809207981 cites W2038232799 @default.
• W2809207981 cites W2045776923 @default.
• W2809207981 cites W2057134102 @default.
• W2809207981 cites W2065917075 @default.
• W2809207981 cites W2071500439 @default.
• W2809207981 cites W2071547430 @default.
• W2809207981 cites W2071766879 @default.
• W2809207981 cites W2075515882 @default.
• W2809207981 cites W2080210760 @default.
• W2809207981 cites W2080538633 @default.
• W2809207981 cites W2090955920 @default.
• W2809207981 cites W2096112217 @default.
• W2809207981 cites W2127318882 @default.
• W2809207981 cites W2169257461 @default.
• W2809207981 cites W2425602344 @default.
• W2809207981 cites W2621117113 @default.
• W2809207981 doi "https://doi.org/10.1088/1674-1056/27/6/068104" @default.
• W2809207981 hasPublicationYear "2018" @default.
• W2809207981 type Work @default.
• W2809207981 sameAs 2809207981 @default.
• W2809207981 citedByCount "11" @default.
• W2809207981 countsByYear W28092079812019 @default.
• W2809207981 countsByYear W28092079812021 @default.
• W2809207981 countsByYear W28092079812022 @default.
• W2809207981 countsByYear W28092079812023 @default.
• W2809207981 crossrefType "journal-article" @default.
• W2809207981 hasAuthorship W2809207981A5006449883 @default.
• W2809207981 hasAuthorship W2809207981A5008890463 @default.
• W2809207981 hasAuthorship W2809207981A5053302644 @default.
• W2809207981 hasAuthorship W2809207981A5055009375 @default.
• W2809207981 hasAuthorship W2809207981A5082621273 @default.
• W2809207981 hasConcept C111368507 @default.
• W2809207981 hasConcept C115196108 @default.
• W2809207981 hasConcept C127313418 @default.
• W2809207981 hasConcept C159985019 @default.
• W2809207981 hasConcept C160671074 @default.
• W2809207981 hasConcept C162307627 @default.
• W2809207981 hasConcept C171250308 @default.
• W2809207981 hasConcept C19067145 @default.
• W2809207981 hasConcept C192562407 @default.
• W2809207981 hasConcept C195065555 @default.
• W2809207981 hasConcept C2524010 @default.
• W2809207981 hasConcept C2777289219 @default.
• W2809207981 hasConcept C2779849746 @default.
• W2809207981 hasConcept C2781448156 @default.
• W2809207981 hasConcept C33923547 @default.
• W2809207981 hasConcept C41008148 @default.
• W2809207981 hasConcept C49040817 @default.
• W2809207981 hasConcept C76155785 @default.
• W2809207981 hasConceptScore W2809207981C111368507 @default.
• W2809207981 hasConceptScore W2809207981C115196108 @default.
• W2809207981 hasConceptScore W2809207981C127313418 @default.
• W2809207981 hasConceptScore W2809207981C159985019 @default.
• W2809207981 hasConceptScore W2809207981C160671074 @default.
• W2809207981 hasConceptScore W2809207981C162307627 @default.
• W2809207981 hasConceptScore W2809207981C171250308 @default.
• W2809207981 hasConceptScore W2809207981C19067145 @default.
• W2809207981 hasConceptScore W2809207981C192562407 @default.
• W2809207981 hasConceptScore W2809207981C195065555 @default.
• W2809207981 hasConceptScore W2809207981C2524010 @default.
• W2809207981 hasConceptScore W2809207981C2777289219 @default.
• W2809207981 hasConceptScore W2809207981C2779849746 @default.
• W2809207981 hasConceptScore W2809207981C2781448156 @default.
• W2809207981 hasConceptScore W2809207981C33923547 @default.
• W2809207981 hasConceptScore W2809207981C41008148 @default.
• W2809207981 hasConceptScore W2809207981C49040817 @default.
• W2809207981 hasConceptScore W2809207981C76155785 @default.
• W2809207981 hasIssue "6" @default.
• W2809207981 hasLocation W28092079811 @default.
• W2809207981 hasOpenAccess W2809207981 @default.
• W2809207981 hasPrimaryLocation W28092079811 @default.
• W2809207981 hasRelatedWork W1949554935 @default.
• W2809207981 hasRelatedWork W1958097584 @default.
• W2809207981 hasRelatedWork W2005929677 @default.
• W2809207981 hasRelatedWork W2030929446 @default.
• W2809207981 hasRelatedWork W2044352109 @default.
• W2809207981 hasRelatedWork W2076280938 @default.
• W2809207981 hasRelatedWork W2139873166 @default.
• W2809207981 hasRelatedWork W2150963316 @default.
• W2809207981 hasRelatedWork W2902516541 @default.
• W2809207981 hasRelatedWork W4321444198 @default.

• next