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- W2877182479 abstract "Abstract Structural evolution in Si(0 0 1) surface layers after high-dose (D = 5 × 1017 cm–2) low-energy (2 and 5 keV) plasma immersion He+ ion implantation (He+ PIII) and subsequent annealing at 853 and 1073 K was studied by complementary structural sensitive methods (TEM, XRR, RBS, and AFM). Formation of a three-layer structure (amorphous a-SiOx sublayer at the surface, amorphous a-Si sublayer with large size helium-filled bubbles, and heavily damaged crystalline c-Si sublayer containing small-size bubbles and Si nanocrystallites) was observed for both implantation energies. This three-layer structure is retained after annealing. It was shown that the thickness of the oxide sublayer does not depend on implantation energy and does not change after annealing. This amorphous oxide sublayer together with dense top part of the a-Si sublayer forms a cap layer with a thickness of 15 nm that can be considered as a protective layer for the sublayers containing He-filled bubbles and Si nanocrystallites. The Si nanocrystallites were revealed at the boundary of the a-Si and the c-Si sublayers both in as-implanted at 5 keV and annealed samples." @default.
- W2877182479 created "2018-07-19" @default.
- W2877182479 creator A5034918299 @default.
- W2877182479 creator A5043364354 @default.
- W2877182479 creator A5045644608 @default.
- W2877182479 creator A5049875701 @default.
- W2877182479 creator A5087193300 @default.
- W2877182479 date "2018-09-01" @default.
- W2877182479 modified "2023-10-02" @default.
- W2877182479 title "Structural evolution of thermal annealed Si(0 0 1) surface layers fabricated by plasma immersion He + implantation" @default.
- W2877182479 cites W1975607009 @default.
- W2877182479 cites W1982381330 @default.
- W2877182479 cites W1985283343 @default.
- W2877182479 cites W1988344736 @default.
- W2877182479 cites W1990689097 @default.
- W2877182479 cites W2002444592 @default.
- W2877182479 cites W2003529174 @default.
- W2877182479 cites W2004050152 @default.
- W2877182479 cites W2015839281 @default.
- W2877182479 cites W2017512312 @default.
- W2877182479 cites W2032611807 @default.
- W2877182479 cites W2035025466 @default.
- W2877182479 cites W2038530219 @default.
- W2877182479 cites W2045831397 @default.
- W2877182479 cites W2051501072 @default.
- W2877182479 cites W2052973389 @default.
- W2877182479 cites W2055323063 @default.
- W2877182479 cites W2079938205 @default.
- W2877182479 cites W2086065816 @default.
- W2877182479 cites W2086179403 @default.
- W2877182479 cites W2128884739 @default.
- W2877182479 cites W2338719526 @default.
- W2877182479 doi "https://doi.org/10.1016/j.nimb.2018.06.024" @default.
- W2877182479 hasPublicationYear "2018" @default.
- W2877182479 type Work @default.
- W2877182479 sameAs 2877182479 @default.
- W2877182479 citedByCount "0" @default.
- W2877182479 crossrefType "journal-article" @default.
- W2877182479 hasAuthorship W2877182479A5034918299 @default.
- W2877182479 hasAuthorship W2877182479A5043364354 @default.
- W2877182479 hasAuthorship W2877182479A5045644608 @default.
- W2877182479 hasAuthorship W2877182479A5049875701 @default.
- W2877182479 hasAuthorship W2877182479A5087193300 @default.
- W2877182479 hasConcept C113196181 @default.
- W2877182479 hasConcept C145148216 @default.
- W2877182479 hasConcept C159985019 @default.
- W2877182479 hasConcept C178790620 @default.
- W2877182479 hasConcept C185592680 @default.
- W2877182479 hasConcept C191897082 @default.
- W2877182479 hasConcept C192562407 @default.
- W2877182479 hasConcept C2777855556 @default.
- W2877182479 hasConcept C2778702798 @default.
- W2877182479 hasConcept C2779851234 @default.
- W2877182479 hasConcept C41823505 @default.
- W2877182479 hasConcept C43617362 @default.
- W2877182479 hasConcept C56052488 @default.
- W2877182479 hasConcept C8010536 @default.
- W2877182479 hasConceptScore W2877182479C113196181 @default.
- W2877182479 hasConceptScore W2877182479C145148216 @default.
- W2877182479 hasConceptScore W2877182479C159985019 @default.
- W2877182479 hasConceptScore W2877182479C178790620 @default.
- W2877182479 hasConceptScore W2877182479C185592680 @default.
- W2877182479 hasConceptScore W2877182479C191897082 @default.
- W2877182479 hasConceptScore W2877182479C192562407 @default.
- W2877182479 hasConceptScore W2877182479C2777855556 @default.
- W2877182479 hasConceptScore W2877182479C2778702798 @default.
- W2877182479 hasConceptScore W2877182479C2779851234 @default.
- W2877182479 hasConceptScore W2877182479C41823505 @default.
- W2877182479 hasConceptScore W2877182479C43617362 @default.
- W2877182479 hasConceptScore W2877182479C56052488 @default.
- W2877182479 hasConceptScore W2877182479C8010536 @default.
- W2877182479 hasLocation W28771824791 @default.
- W2877182479 hasOpenAccess W2877182479 @default.
- W2877182479 hasPrimaryLocation W28771824791 @default.
- W2877182479 hasRelatedWork W2021492141 @default.
- W2877182479 hasRelatedWork W2033341730 @default.
- W2877182479 hasRelatedWork W2039918793 @default.
- W2877182479 hasRelatedWork W2087017819 @default.
- W2877182479 hasRelatedWork W2126197522 @default.
- W2877182479 hasRelatedWork W2601813346 @default.
- W2877182479 hasRelatedWork W2877182479 @default.
- W2877182479 hasRelatedWork W2916439291 @default.
- W2877182479 hasRelatedWork W3020168110 @default.
- W2877182479 hasRelatedWork W3023214042 @default.
- W2877182479 isParatext "false" @default.
- W2877182479 isRetracted "false" @default.
- W2877182479 magId "2877182479" @default.
- W2877182479 workType "article" @default.