Matches in SemOpenAlex for { <https://semopenalex.org/work/W2883511207> ?p ?o ?g. }
Showing items 1 to 90 of
90
with 100 items per page.
- W2883511207 endingPage "142" @default.
- W2883511207 startingPage "137" @default.
- W2883511207 abstract "To reduce the leakage current of InAs/AlSb HEMTs, deposition of a high-k dielectric is required between the InAlAs protection layer and the gate electrode to form a metal-oxide-semiconductor capacitor insulated gate. In this paper, two kinds of high-k/n-InAlAs MOS-capacitors with HfO2 and HfAlO dielectric, respectively, were successfully fabricated. Both devices presented a low leakage current density of 10−9–10−4 A/cm2 under the bias voltage range from −5 V to 5 V. A Space-charge-limited conduction was observed at a low bias condition, Schottky emission and Frenkel–Poole emission mechanisms began to dominate when voltage was increased, and Fowler–Nordheim tunneling occurred at high fields for both devices. Compared with the HfO2/n-InAlAs MOS-capacitor, the extracted barrier height ϕB and conduction band offset ΔECB of the HfAlO/n-InAlAs MOS-capacitor were clearly higher, this effect resulted in HfAlO/n-InAlAs MOS-capacitor presenting a lower leakage current density. It is demonstrated that HfAlO deposited on InAlAs can suppress the leakage current more effectively than HfO2, which suggests good potential for applications of HfAlO/n-InAlAs MOS-capacitors as the insulated-gate of InAs/AlSb high-electron-mobility transistors." @default.
- W2883511207 created "2018-08-03" @default.
- W2883511207 creator A5026196460 @default.
- W2883511207 creator A5055887546 @default.
- W2883511207 date "2018-09-01" @default.
- W2883511207 modified "2023-09-23" @default.
- W2883511207 title "Study on leakage current mechanism and band offset of high-k/n-InAlAs metal-oxide-semiconductor capacitors with HfO2 and HfAlO dielectric" @default.
- W2883511207 cites W1643392277 @default.
- W2883511207 cites W1668365559 @default.
- W2883511207 cites W1967596976 @default.
- W2883511207 cites W1969258945 @default.
- W2883511207 cites W1977967050 @default.
- W2883511207 cites W1979299224 @default.
- W2883511207 cites W1982994145 @default.
- W2883511207 cites W2009697722 @default.
- W2883511207 cites W2035371486 @default.
- W2883511207 cites W2045436518 @default.
- W2883511207 cites W2052506173 @default.
- W2883511207 cites W2059785548 @default.
- W2883511207 cites W2069556188 @default.
- W2883511207 cites W2077714826 @default.
- W2883511207 cites W2106200239 @default.
- W2883511207 cites W2121170860 @default.
- W2883511207 cites W2144496401 @default.
- W2883511207 cites W2327038069 @default.
- W2883511207 cites W2512412285 @default.
- W2883511207 doi "https://doi.org/10.1016/j.tsf.2018.07.009" @default.
- W2883511207 hasPublicationYear "2018" @default.
- W2883511207 type Work @default.
- W2883511207 sameAs 2883511207 @default.
- W2883511207 citedByCount "2" @default.
- W2883511207 countsByYear W28835112072019 @default.
- W2883511207 countsByYear W28835112072020 @default.
- W2883511207 crossrefType "journal-article" @default.
- W2883511207 hasAuthorship W2883511207A5026196460 @default.
- W2883511207 hasAuthorship W2883511207A5055887546 @default.
- W2883511207 hasConcept C119599485 @default.
- W2883511207 hasConcept C120398109 @default.
- W2883511207 hasConcept C127413603 @default.
- W2883511207 hasConcept C133386390 @default.
- W2883511207 hasConcept C139719470 @default.
- W2883511207 hasConcept C162324750 @default.
- W2883511207 hasConcept C16317505 @default.
- W2883511207 hasConcept C165801399 @default.
- W2883511207 hasConcept C166972891 @default.
- W2883511207 hasConcept C172385210 @default.
- W2883511207 hasConcept C192562407 @default.
- W2883511207 hasConcept C205200001 @default.
- W2883511207 hasConcept C2777042071 @default.
- W2883511207 hasConcept C49040817 @default.
- W2883511207 hasConcept C52192207 @default.
- W2883511207 hasConcept C78434282 @default.
- W2883511207 hasConceptScore W2883511207C119599485 @default.
- W2883511207 hasConceptScore W2883511207C120398109 @default.
- W2883511207 hasConceptScore W2883511207C127413603 @default.
- W2883511207 hasConceptScore W2883511207C133386390 @default.
- W2883511207 hasConceptScore W2883511207C139719470 @default.
- W2883511207 hasConceptScore W2883511207C162324750 @default.
- W2883511207 hasConceptScore W2883511207C16317505 @default.
- W2883511207 hasConceptScore W2883511207C165801399 @default.
- W2883511207 hasConceptScore W2883511207C166972891 @default.
- W2883511207 hasConceptScore W2883511207C172385210 @default.
- W2883511207 hasConceptScore W2883511207C192562407 @default.
- W2883511207 hasConceptScore W2883511207C205200001 @default.
- W2883511207 hasConceptScore W2883511207C2777042071 @default.
- W2883511207 hasConceptScore W2883511207C49040817 @default.
- W2883511207 hasConceptScore W2883511207C52192207 @default.
- W2883511207 hasConceptScore W2883511207C78434282 @default.
- W2883511207 hasFunder F4320335432 @default.
- W2883511207 hasFunder F4320335595 @default.
- W2883511207 hasLocation W28835112071 @default.
- W2883511207 hasOpenAccess W2883511207 @default.
- W2883511207 hasPrimaryLocation W28835112071 @default.
- W2883511207 hasRelatedWork W1480434523 @default.
- W2883511207 hasRelatedWork W1502038554 @default.
- W2883511207 hasRelatedWork W1550130021 @default.
- W2883511207 hasRelatedWork W2023016175 @default.
- W2883511207 hasRelatedWork W2032765013 @default.
- W2883511207 hasRelatedWork W2359906914 @default.
- W2883511207 hasRelatedWork W2544293659 @default.
- W2883511207 hasRelatedWork W2903976092 @default.
- W2883511207 hasRelatedWork W3211886203 @default.
- W2883511207 hasRelatedWork W4253731651 @default.
- W2883511207 hasVolume "661" @default.
- W2883511207 isParatext "false" @default.
- W2883511207 isRetracted "false" @default.
- W2883511207 magId "2883511207" @default.
- W2883511207 workType "article" @default.