Matches in SemOpenAlex for { <https://semopenalex.org/work/W2884580934> ?p ?o ?g. }
- W2884580934 endingPage "012181" @default.
- W2884580934 startingPage "012181" @default.
- W2884580934 abstract "In-depth studies on transition metal are required to understand about different properties of materials. Different deposition techniques like rf magnetron sputtering, hot pressing, ion beam assisted deposition, ion arc plating and chemical vapour deposition were employed to deposit TiSiN. The morphology, mechanical and structural properties of TiSiN thin film coating has been characterized by different processes (e.g. AFM, SEM, TEM, XRD, Nanoindentation etc.). Many researchers also studied mechanical properties to investigate different parameters like hardness, fracture toughness, Young's modulus etc. This review paper is aimed to summarize all the properties studied by the different researchers on titanium silicon nitride." @default.
- W2884580934 created "2018-08-03" @default.
- W2884580934 creator A5025052665 @default.
- W2884580934 creator A5047188680 @default.
- W2884580934 creator A5049800346 @default.
- W2884580934 creator A5071688825 @default.
- W2884580934 date "2018-06-01" @default.
- W2884580934 modified "2023-09-23" @default.
- W2884580934 title "Synthesis and characterization of Titanium Silicon Nitride (TiSiN) thin film: A review" @default.
- W2884580934 cites W1847034624 @default.
- W2884580934 cites W1960930153 @default.
- W2884580934 cites W1964695246 @default.
- W2884580934 cites W1965282189 @default.
- W2884580934 cites W1966799544 @default.
- W2884580934 cites W1967856827 @default.
- W2884580934 cites W1970520942 @default.
- W2884580934 cites W1971649721 @default.
- W2884580934 cites W1973847348 @default.
- W2884580934 cites W1979815857 @default.
- W2884580934 cites W1982462467 @default.
- W2884580934 cites W1983903203 @default.
- W2884580934 cites W1990166804 @default.
- W2884580934 cites W1990415722 @default.
- W2884580934 cites W1992448517 @default.
- W2884580934 cites W1993527439 @default.
- W2884580934 cites W1996210581 @default.
- W2884580934 cites W1998413803 @default.
- W2884580934 cites W2002206234 @default.
- W2884580934 cites W2004629680 @default.
- W2884580934 cites W2006031577 @default.
- W2884580934 cites W2006164733 @default.
- W2884580934 cites W2009188688 @default.
- W2884580934 cites W2013442619 @default.
- W2884580934 cites W2013886969 @default.
- W2884580934 cites W2015887402 @default.
- W2884580934 cites W2019046444 @default.
- W2884580934 cites W2019674023 @default.
- W2884580934 cites W2020231246 @default.
- W2884580934 cites W2032930596 @default.
- W2884580934 cites W2034720733 @default.
- W2884580934 cites W2040294519 @default.
- W2884580934 cites W2043460050 @default.
- W2884580934 cites W2043702238 @default.
- W2884580934 cites W2047684896 @default.
- W2884580934 cites W2050531448 @default.
- W2884580934 cites W2051166244 @default.
- W2884580934 cites W2053687665 @default.
- W2884580934 cites W2054772942 @default.
- W2884580934 cites W2066390448 @default.
- W2884580934 cites W2066649275 @default.
- W2884580934 cites W2069189106 @default.
- W2884580934 cites W2070747773 @default.
- W2884580934 cites W2071934829 @default.
- W2884580934 cites W2072625023 @default.
- W2884580934 cites W2073277352 @default.
- W2884580934 cites W2077888386 @default.
- W2884580934 cites W2079360748 @default.
- W2884580934 cites W2079770031 @default.
- W2884580934 cites W2080651221 @default.
- W2884580934 cites W2083660544 @default.
- W2884580934 cites W2084714749 @default.
- W2884580934 cites W2084984929 @default.
- W2884580934 cites W2085530731 @default.
- W2884580934 cites W2086073500 @default.
- W2884580934 cites W2086933933 @default.
- W2884580934 cites W2089308430 @default.
- W2884580934 cites W2093192991 @default.
- W2884580934 cites W2093919240 @default.
- W2884580934 cites W2094491269 @default.
- W2884580934 cites W2104926958 @default.
- W2884580934 cites W2106591441 @default.
- W2884580934 cites W2107155678 @default.
- W2884580934 cites W2107898214 @default.
- W2884580934 cites W2112455878 @default.
- W2884580934 cites W2253252155 @default.
- W2884580934 cites W2505396311 @default.
- W2884580934 cites W253181891 @default.
- W2884580934 cites W2762801360 @default.
- W2884580934 cites W2775179562 @default.
- W2884580934 cites W2950643265 @default.
- W2884580934 cites W2951687997 @default.
- W2884580934 cites W3150248096 @default.
- W2884580934 cites W3215230530 @default.
- W2884580934 cites W4232186699 @default.
- W2884580934 cites W4302083512 @default.
- W2884580934 cites W589094676 @default.
- W2884580934 doi "https://doi.org/10.1088/1757-899x/377/1/012181" @default.
- W2884580934 hasPublicationYear "2018" @default.
- W2884580934 type Work @default.
- W2884580934 sameAs 2884580934 @default.
- W2884580934 citedByCount "11" @default.
- W2884580934 countsByYear W28845809342019 @default.
- W2884580934 countsByYear W28845809342020 @default.
- W2884580934 countsByYear W28845809342022 @default.
- W2884580934 countsByYear W28845809342023 @default.
- W2884580934 crossrefType "journal-article" @default.
- W2884580934 hasAuthorship W2884580934A5025052665 @default.
- W2884580934 hasAuthorship W2884580934A5047188680 @default.