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- W2884956722 abstract "The influence of the implantation parameters fluence, substrate temperature, and chemical species on the formation of amorphous phases in Al/sub 2/O/sub 3/ and ..cap alpha..-SiC was studied. At 300/sup 0/K, fluences in excess of 10/sup 17/ ions.cm/sup -2/ were generally required to amorphize Al/sub 2/O/sub 3/; however, implantation of zirconium formed the amorphous phase at a fluence of 4 x 10/sup 16/ Zr.cm/sup -2/. At 77/sup 0/K, the threshold fluence was lowered to about 2 x 10/sup 15/ Cr.cm/sup -2/. Single crystals of ..cap alpha..-SiC were amorphized at 300/sup 0/K by a fluence of 2 x 10/sup 14/ Cr.cm/sup -2/ or 1 x 10/sup 15/ N.cm/sup -2/. Implantation at 1023/sup 0/K did not produce the amorphous phase in SiC. The micro-indentation hardness of the amorphous material was about 60% of that of the crystalline counterpart." @default.
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- W2884956722 date "1984-01-01" @default.
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- W2884956722 title "Amorphization of ceramics by ion beams" @default.
- W2884956722 hasPublicationYear "1984" @default.
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