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- W2885013965 endingPage "1800273" @default.
- W2885013965 startingPage "1800273" @default.
- W2885013965 abstract "Fabrication of diamond micro-patterned structures is a technological challenge due to the outstanding hardness and chemical stability of the material. In this work, the synthetic diamond reactive ion etching (RIE) process is studied. The effects of the gas mixture and bias on the diamond etching rate are investigated. A high etching rate (up to 5 μm h−1) is achieved in SF6 based plasmas with the intensive ion sputtering. The features of protective masks on diamond samples fabrication are discussed. Etching selectivities of Al, Ni, Mo, Al2O3, and AlN as mask materials in SF6 plasma are investigated. The initial size of the mask affects its selectivity. To explain the influence of the initial mask shape on the selectivity, a semi-empirical model of the diamond-mask topography transformation under the ion sputtering is proposed. By setting the shape of the masks, it is possible to form diamond structures with any desirable profile using the same etching process: steep walls with 20 μm height, solid immersion lenses with 2–10 μm radii, conic figures, and developed surface. This is a relatively simple and universal method of diamond microstructures fabrication." @default.
- W2885013965 created "2018-08-03" @default.
- W2885013965 creator A5036127854 @default.
- W2885013965 creator A5049717381 @default.
- W2885013965 creator A5051981302 @default.
- W2885013965 creator A5062219895 @default.
- W2885013965 creator A5067218052 @default.
- W2885013965 creator A5080900590 @default.
- W2885013965 creator A5084831261 @default.
- W2885013965 date "2018-07-25" @default.
- W2885013965 modified "2023-09-26" @default.
- W2885013965 title "Diamond Microstructuring by Deep Anisotropic Reactive Ion Etching" @default.
- W2885013965 cites W1175640373 @default.
- W2885013965 cites W1892221046 @default.
- W2885013965 cites W1980310535 @default.
- W2885013965 cites W1987952117 @default.
- W2885013965 cites W2015726938 @default.
- W2885013965 cites W2018714394 @default.
- W2885013965 cites W2051254450 @default.
- W2885013965 cites W2053531610 @default.
- W2885013965 cites W2073883739 @default.
- W2885013965 cites W2117696518 @default.
- W2885013965 cites W2314314234 @default.
- W2885013965 cites W2592016741 @default.
- W2885013965 cites W2595710595 @default.
- W2885013965 cites W2792165855 @default.
- W2885013965 doi "https://doi.org/10.1002/pssa.201800273" @default.
- W2885013965 hasPublicationYear "2018" @default.
- W2885013965 type Work @default.
- W2885013965 sameAs 2885013965 @default.
- W2885013965 citedByCount "14" @default.
- W2885013965 countsByYear W28850139652019 @default.
- W2885013965 countsByYear W28850139652020 @default.
- W2885013965 countsByYear W28850139652021 @default.
- W2885013965 countsByYear W28850139652022 @default.
- W2885013965 countsByYear W28850139652023 @default.
- W2885013965 crossrefType "journal-article" @default.
- W2885013965 hasAuthorship W2885013965A5036127854 @default.
- W2885013965 hasAuthorship W2885013965A5049717381 @default.
- W2885013965 hasAuthorship W2885013965A5051981302 @default.
- W2885013965 hasAuthorship W2885013965A5062219895 @default.
- W2885013965 hasAuthorship W2885013965A5067218052 @default.
- W2885013965 hasAuthorship W2885013965A5080900590 @default.
- W2885013965 hasAuthorship W2885013965A5084831261 @default.
- W2885013965 hasConcept C100460472 @default.
- W2885013965 hasConcept C107187091 @default.
- W2885013965 hasConcept C130472188 @default.
- W2885013965 hasConcept C136525101 @default.
- W2885013965 hasConcept C142724271 @default.
- W2885013965 hasConcept C159985019 @default.
- W2885013965 hasConcept C171250308 @default.
- W2885013965 hasConcept C19067145 @default.
- W2885013965 hasConcept C192562407 @default.
- W2885013965 hasConcept C204787440 @default.
- W2885013965 hasConcept C22423302 @default.
- W2885013965 hasConcept C2776921476 @default.
- W2885013965 hasConcept C2779227376 @default.
- W2885013965 hasConcept C33220542 @default.
- W2885013965 hasConcept C49040817 @default.
- W2885013965 hasConcept C71924100 @default.
- W2885013965 hasConceptScore W2885013965C100460472 @default.
- W2885013965 hasConceptScore W2885013965C107187091 @default.
- W2885013965 hasConceptScore W2885013965C130472188 @default.
- W2885013965 hasConceptScore W2885013965C136525101 @default.
- W2885013965 hasConceptScore W2885013965C142724271 @default.
- W2885013965 hasConceptScore W2885013965C159985019 @default.
- W2885013965 hasConceptScore W2885013965C171250308 @default.
- W2885013965 hasConceptScore W2885013965C19067145 @default.
- W2885013965 hasConceptScore W2885013965C192562407 @default.
- W2885013965 hasConceptScore W2885013965C204787440 @default.
- W2885013965 hasConceptScore W2885013965C22423302 @default.
- W2885013965 hasConceptScore W2885013965C2776921476 @default.
- W2885013965 hasConceptScore W2885013965C2779227376 @default.
- W2885013965 hasConceptScore W2885013965C33220542 @default.
- W2885013965 hasConceptScore W2885013965C49040817 @default.
- W2885013965 hasConceptScore W2885013965C71924100 @default.
- W2885013965 hasFunder F4320321912 @default.
- W2885013965 hasIssue "22" @default.
- W2885013965 hasLocation W28850139651 @default.
- W2885013965 hasOpenAccess W2885013965 @default.
- W2885013965 hasPrimaryLocation W28850139651 @default.
- W2885013965 hasRelatedWork W1977041013 @default.
- W2885013965 hasRelatedWork W1979872444 @default.
- W2885013965 hasRelatedWork W1997957020 @default.
- W2885013965 hasRelatedWork W2020777840 @default.
- W2885013965 hasRelatedWork W2039034544 @default.
- W2885013965 hasRelatedWork W2093286625 @default.
- W2885013965 hasRelatedWork W2143956740 @default.
- W2885013965 hasRelatedWork W2385387985 @default.
- W2885013965 hasRelatedWork W2620860875 @default.
- W2885013965 hasRelatedWork W2803501115 @default.
- W2885013965 hasVolume "215" @default.
- W2885013965 isParatext "false" @default.
- W2885013965 isRetracted "false" @default.
- W2885013965 magId "2885013965" @default.
- W2885013965 workType "article" @default.