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• W2885364385 abstract "As BEOL pitch continues to aggressively scale, contributions from pattern dimension and edge placement constrict the available geometry of interconnects. In particular, the critical minimum insulator spacing which defines a technologies max operating voltage is now limited by Vx to Mx spacing. This spacing has historically been a challenge since the introduction of self-aligned vias due to the loss of CD and chamfer control in the non-self-aligned direction. As pitch continued to shrink from self-aligned via introduction around the 22 nm node, the fraction of via CD control and edge placement compared to the dielectric spacing between interconnects has continued to grow. Alone this trend could be combated by increasing the dielectric spacing, however, the exponential increase in Cu resistivity (under scaling) has forced BEOL technologies into strong line/space asymmetry to keep line resistance under control. At pitches below 32 nm these factors reach a tipping point, either design to exponentially increasing line resistance or lower the technology Vmax. Both approaches cause performance degradation to achieve pitch scaling" @default.
• W2885364385 created "2018-08-22" @default.
• W2885364385 creator A5000569144 @default.
• W2885364385 creator A5002954357 @default.
• W2885364385 creator A5007631381 @default.
• W2885364385 creator A5010337667 @default.
• W2885364385 creator A5010541239 @default.
• W2885364385 creator A5010710504 @default.
• W2885364385 creator A5016605721 @default.
• W2885364385 creator A5018104184 @default.
• W2885364385 creator A5019950172 @default.
• W2885364385 creator A5021079745 @default.
• W2885364385 creator A5021592517 @default.
• W2885364385 creator A5021938968 @default.
• W2885364385 creator A5022232512 @default.
• W2885364385 creator A5022372139 @default.
• W2885364385 creator A5034444643 @default.
• W2885364385 creator A5035747302 @default.
• W2885364385 creator A5036962054 @default.
• W2885364385 creator A5039827034 @default.
• W2885364385 creator A5042481324 @default.
• W2885364385 creator A5053446584 @default.
• W2885364385 creator A5053505854 @default.
• W2885364385 creator A5058065297 @default.
• W2885364385 creator A5062707965 @default.
• W2885364385 creator A5062875585 @default.
• W2885364385 creator A5063546578 @default.
• W2885364385 creator A5069053020 @default.
• W2885364385 creator A5076293916 @default.
• W2885364385 creator A5084355371 @default.
• W2885364385 creator A5091370538 @default.
• W2885364385 date "2018-06-01" @default.
• W2885364385 modified "2023-09-27" @default.
• W2885364385 title "Process Challenges in Fully Aligned Via Integration for sub 32 nm Pitch BEOL" @default.
• W2885364385 doi "https://doi.org/10.1109/iitc.2018.8430476" @default.
• W2885364385 hasPublicationYear "2018" @default.
• W2885364385 type Work @default.
• W2885364385 sameAs 2885364385 @default.
• W2885364385 citedByCount "1" @default.
• W2885364385 countsByYear W28853643852022 @default.
• W2885364385 crossrefType "proceedings-article" @default.
• W2885364385 hasAuthorship W2885364385A5000569144 @default.
• W2885364385 hasAuthorship W2885364385A5002954357 @default.
• W2885364385 hasAuthorship W2885364385A5007631381 @default.
• W2885364385 hasAuthorship W2885364385A5010337667 @default.
• W2885364385 hasAuthorship W2885364385A5010541239 @default.
• W2885364385 hasAuthorship W2885364385A5010710504 @default.
• W2885364385 hasAuthorship W2885364385A5016605721 @default.
• W2885364385 hasAuthorship W2885364385A5018104184 @default.
• W2885364385 hasAuthorship W2885364385A5019950172 @default.
• W2885364385 hasAuthorship W2885364385A5021079745 @default.
• W2885364385 hasAuthorship W2885364385A5021592517 @default.
• W2885364385 hasAuthorship W2885364385A5021938968 @default.
• W2885364385 hasAuthorship W2885364385A5022232512 @default.
• W2885364385 hasAuthorship W2885364385A5022372139 @default.
• W2885364385 hasAuthorship W2885364385A5034444643 @default.
• W2885364385 hasAuthorship W2885364385A5035747302 @default.
• W2885364385 hasAuthorship W2885364385A5036962054 @default.
• W2885364385 hasAuthorship W2885364385A5039827034 @default.
• W2885364385 hasAuthorship W2885364385A5042481324 @default.
• W2885364385 hasAuthorship W2885364385A5053446584 @default.
• W2885364385 hasAuthorship W2885364385A5053505854 @default.
• W2885364385 hasAuthorship W2885364385A5058065297 @default.
• W2885364385 hasAuthorship W2885364385A5062707965 @default.
• W2885364385 hasAuthorship W2885364385A5062875585 @default.
• W2885364385 hasAuthorship W2885364385A5063546578 @default.
• W2885364385 hasAuthorship W2885364385A5069053020 @default.
• W2885364385 hasAuthorship W2885364385A5076293916 @default.
• W2885364385 hasAuthorship W2885364385A5084355371 @default.
• W2885364385 hasAuthorship W2885364385A5091370538 @default.
• W2885364385 hasConcept C111919701 @default.
• W2885364385 hasConcept C127413603 @default.
• W2885364385 hasConcept C192562407 @default.
• W2885364385 hasConcept C21880701 @default.
• W2885364385 hasConcept C41008148 @default.
• W2885364385 hasConcept C49040817 @default.
• W2885364385 hasConcept C54725748 @default.
• W2885364385 hasConcept C98045186 @default.
• W2885364385 hasConceptScore W2885364385C111919701 @default.
• W2885364385 hasConceptScore W2885364385C127413603 @default.
• W2885364385 hasConceptScore W2885364385C192562407 @default.
• W2885364385 hasConceptScore W2885364385C21880701 @default.
• W2885364385 hasConceptScore W2885364385C41008148 @default.
• W2885364385 hasConceptScore W2885364385C49040817 @default.
• W2885364385 hasConceptScore W2885364385C54725748 @default.
• W2885364385 hasConceptScore W2885364385C98045186 @default.
• W2885364385 hasLocation W28853643851 @default.
• W2885364385 hasOpenAccess W2885364385 @default.
• W2885364385 hasPrimaryLocation W28853643851 @default.
• W2885364385 hasRelatedWork W1204499617 @default.
• W2885364385 hasRelatedWork W2264288535 @default.
• W2885364385 hasRelatedWork W2388051719 @default.
• W2885364385 hasRelatedWork W251506767 @default.
• W2885364385 hasRelatedWork W2579320619 @default.
• W2885364385 hasRelatedWork W263780721 @default.
• W2885364385 hasRelatedWork W3130478656 @default.
• W2885364385 hasRelatedWork W3176802382 @default.
• W2885364385 hasRelatedWork W47118603 @default.
• W2885364385 hasRelatedWork W2552689367 @default.
• W2885364385 isParatext "false" @default.

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