Matches in SemOpenAlex for { <https://semopenalex.org/work/W2885705086> ?p ?o ?g. }
Showing items 1 to 74 of
74
with 100 items per page.
- W2885705086 abstract "There are a lot of surface shape measurement methods. Appropriate method is selected from them in consideration of measurement accuracy, range, speed, etc. We have recently developed a system using a method among them called “linear scanning confocal surface shape measurement system” [1] for measuring micro objects. In this paper, we describe the method to measure the horizontal dimensions of micro objects concurrently with the measurement of the vertical dimension using this system. Generally, it is difficult to get the focused image for the horizontal dimensional measurement of micro objects because of insufficient depth of field of the optics. However, as the system has plural images at multiple Z positions for vertical dimension measurement, we thought that the focus problem could be solved by calculating the focused image from these images. As a concrete example of micro objects, microelectrodes of semiconductor products [2] are realistic. Microelectrodes are called bumps and electrically connects the integrated circuit chip and the package substrate. For guaranteeing the reliability of electrical connection, dimensional measurements of the bumps are required. Currently, as the density of integrated circuits increases, the arrangement density of bumps also increases. Therefore precise dimensional measurement of bumps is becoming important more and more. By using the bumps as the object under test and measuring its diameter, position and height, we confirmed the performance of developed dimensional measurement method on the system. The results showed that the system could measure a lot of bumps within a second with an accuracy of 1μm or less." @default.
- W2885705086 created "2018-08-22" @default.
- W2885705086 creator A5040823665 @default.
- W2885705086 creator A5047112507 @default.
- W2885705086 creator A5062760696 @default.
- W2885705086 date "2018-08-18" @default.
- W2885705086 modified "2023-09-23" @default.
- W2885705086 title "The dimensional measurement of micro objects using the linear scanning confocal surface shape measurement system" @default.
- W2885705086 cites W2019331533 @default.
- W2885705086 cites W4251885025 @default.
- W2885705086 doi "https://doi.org/10.1117/12.2319812" @default.
- W2885705086 hasPublicationYear "2018" @default.
- W2885705086 type Work @default.
- W2885705086 sameAs 2885705086 @default.
- W2885705086 citedByCount "0" @default.
- W2885705086 crossrefType "proceedings-article" @default.
- W2885705086 hasAuthorship W2885705086A5040823665 @default.
- W2885705086 hasAuthorship W2885705086A5047112507 @default.
- W2885705086 hasAuthorship W2885705086A5062760696 @default.
- W2885705086 hasConcept C10138342 @default.
- W2885705086 hasConcept C120665830 @default.
- W2885705086 hasConcept C121332964 @default.
- W2885705086 hasConcept C1276947 @default.
- W2885705086 hasConcept C154945302 @default.
- W2885705086 hasConcept C162324750 @default.
- W2885705086 hasConcept C192209626 @default.
- W2885705086 hasConcept C198082294 @default.
- W2885705086 hasConcept C202444582 @default.
- W2885705086 hasConcept C202799725 @default.
- W2885705086 hasConcept C2780009758 @default.
- W2885705086 hasConcept C31972630 @default.
- W2885705086 hasConcept C33676613 @default.
- W2885705086 hasConcept C33923547 @default.
- W2885705086 hasConcept C37649242 @default.
- W2885705086 hasConcept C41008148 @default.
- W2885705086 hasConcept C62520636 @default.
- W2885705086 hasConcept C71928083 @default.
- W2885705086 hasConcept C77088390 @default.
- W2885705086 hasConceptScore W2885705086C10138342 @default.
- W2885705086 hasConceptScore W2885705086C120665830 @default.
- W2885705086 hasConceptScore W2885705086C121332964 @default.
- W2885705086 hasConceptScore W2885705086C1276947 @default.
- W2885705086 hasConceptScore W2885705086C154945302 @default.
- W2885705086 hasConceptScore W2885705086C162324750 @default.
- W2885705086 hasConceptScore W2885705086C192209626 @default.
- W2885705086 hasConceptScore W2885705086C198082294 @default.
- W2885705086 hasConceptScore W2885705086C202444582 @default.
- W2885705086 hasConceptScore W2885705086C202799725 @default.
- W2885705086 hasConceptScore W2885705086C2780009758 @default.
- W2885705086 hasConceptScore W2885705086C31972630 @default.
- W2885705086 hasConceptScore W2885705086C33676613 @default.
- W2885705086 hasConceptScore W2885705086C33923547 @default.
- W2885705086 hasConceptScore W2885705086C37649242 @default.
- W2885705086 hasConceptScore W2885705086C41008148 @default.
- W2885705086 hasConceptScore W2885705086C62520636 @default.
- W2885705086 hasConceptScore W2885705086C71928083 @default.
- W2885705086 hasConceptScore W2885705086C77088390 @default.
- W2885705086 hasLocation W28857050861 @default.
- W2885705086 hasOpenAccess W2885705086 @default.
- W2885705086 hasPrimaryLocation W28857050861 @default.
- W2885705086 hasRelatedWork W2352977887 @default.
- W2885705086 hasRelatedWork W2360764675 @default.
- W2885705086 hasRelatedWork W2371433080 @default.
- W2885705086 hasRelatedWork W2371448264 @default.
- W2885705086 hasRelatedWork W2376511765 @default.
- W2885705086 hasRelatedWork W2382985916 @default.
- W2885705086 hasRelatedWork W2898044248 @default.
- W2885705086 hasRelatedWork W2990667865 @default.
- W2885705086 hasRelatedWork W43236265 @default.
- W2885705086 hasRelatedWork W1967038630 @default.
- W2885705086 isParatext "false" @default.
- W2885705086 isRetracted "false" @default.
- W2885705086 magId "2885705086" @default.
- W2885705086 workType "article" @default.