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• W2885733176 abstract "Porous low-k dielectrics play an important role in lowering the circuit capacitance in nano-interconnects. However, these materials are damaged during plasma etching process and subsequent steps, leading to a degradation of their dielectric properties. Many methods have been suggested to solve this issue. The post porosity plasma protection (P4) from IBM [1] is a possible solution which protects the pores of low-k dielectrics by filling them with sacrificial polymers before the plasma process, which are removed later in the flow. In this paper, we suggest a new method to protect the pores, so-called Gas Phase Pore Stuffing (GPPS)." @default.
• W2885733176 created "2018-08-22" @default.
• W2885733176 creator A5025543318 @default.
• W2885733176 creator A5035568494 @default.
• W2885733176 creator A5043413343 @default.
• W2885733176 creator A5044958130 @default.
• W2885733176 creator A5051705053 @default.
• W2885733176 creator A5066757334 @default.
• W2885733176 creator A5079044727 @default.
• W2885733176 creator A5085543186 @default.
• W2885733176 date "2018-06-01" @default.
• W2885733176 modified "2023-10-02" @default.
• W2885733176 title "Gas Phase Pore Stuffing (GPPS)" @default.
• W2885733176 cites W2150864610 @default.
• W2885733176 cites W2312482534 @default.
• W2885733176 doi "https://doi.org/10.1109/iitc.2018.8430424" @default.
• W2885733176 hasPublicationYear "2018" @default.
• W2885733176 type Work @default.
• W2885733176 sameAs 2885733176 @default.
• W2885733176 citedByCount "1" @default.
• W2885733176 countsByYear W28857331762019 @default.
• W2885733176 crossrefType "proceedings-article" @default.
• W2885733176 hasAuthorship W2885733176A5025543318 @default.
• W2885733176 hasAuthorship W2885733176A5035568494 @default.
• W2885733176 hasAuthorship W2885733176A5043413343 @default.
• W2885733176 hasAuthorship W2885733176A5044958130 @default.
• W2885733176 hasAuthorship W2885733176A5051705053 @default.
• W2885733176 hasAuthorship W2885733176A5066757334 @default.
• W2885733176 hasAuthorship W2885733176A5079044727 @default.
• W2885733176 hasAuthorship W2885733176A5085543186 @default.
• W2885733176 hasConcept C100460472 @default.
• W2885733176 hasConcept C105569014 @default.
• W2885733176 hasConcept C107187091 @default.
• W2885733176 hasConcept C111919701 @default.
• W2885733176 hasConcept C121332964 @default.
• W2885733176 hasConcept C127413603 @default.
• W2885733176 hasConcept C133386390 @default.
• W2885733176 hasConcept C147789679 @default.
• W2885733176 hasConcept C159985019 @default.
• W2885733176 hasConcept C171250308 @default.
• W2885733176 hasConcept C17525397 @default.
• W2885733176 hasConcept C185592680 @default.
• W2885733176 hasConcept C192562407 @default.
• W2885733176 hasConcept C2779227376 @default.
• W2885733176 hasConcept C2779679103 @default.
• W2885733176 hasConcept C30066665 @default.
• W2885733176 hasConcept C3020013744 @default.
• W2885733176 hasConcept C41008148 @default.
• W2885733176 hasConcept C42360764 @default.
• W2885733176 hasConcept C49040817 @default.
• W2885733176 hasConcept C521977710 @default.
• W2885733176 hasConcept C62520636 @default.
• W2885733176 hasConcept C6648577 @default.
• W2885733176 hasConcept C76155785 @default.
• W2885733176 hasConcept C82706917 @default.
• W2885733176 hasConcept C98045186 @default.
• W2885733176 hasConceptScore W2885733176C100460472 @default.
• W2885733176 hasConceptScore W2885733176C105569014 @default.
• W2885733176 hasConceptScore W2885733176C107187091 @default.
• W2885733176 hasConceptScore W2885733176C111919701 @default.
• W2885733176 hasConceptScore W2885733176C121332964 @default.
• W2885733176 hasConceptScore W2885733176C127413603 @default.
• W2885733176 hasConceptScore W2885733176C133386390 @default.
• W2885733176 hasConceptScore W2885733176C147789679 @default.
• W2885733176 hasConceptScore W2885733176C159985019 @default.
• W2885733176 hasConceptScore W2885733176C171250308 @default.
• W2885733176 hasConceptScore W2885733176C17525397 @default.
• W2885733176 hasConceptScore W2885733176C185592680 @default.
• W2885733176 hasConceptScore W2885733176C192562407 @default.
• W2885733176 hasConceptScore W2885733176C2779227376 @default.
• W2885733176 hasConceptScore W2885733176C2779679103 @default.
• W2885733176 hasConceptScore W2885733176C30066665 @default.
• W2885733176 hasConceptScore W2885733176C3020013744 @default.
• W2885733176 hasConceptScore W2885733176C41008148 @default.
• W2885733176 hasConceptScore W2885733176C42360764 @default.
• W2885733176 hasConceptScore W2885733176C49040817 @default.
• W2885733176 hasConceptScore W2885733176C521977710 @default.
• W2885733176 hasConceptScore W2885733176C62520636 @default.
• W2885733176 hasConceptScore W2885733176C6648577 @default.
• W2885733176 hasConceptScore W2885733176C76155785 @default.
• W2885733176 hasConceptScore W2885733176C82706917 @default.
• W2885733176 hasConceptScore W2885733176C98045186 @default.
• W2885733176 hasLocation W28857331761 @default.
• W2885733176 hasOpenAccess W2885733176 @default.
• W2885733176 hasPrimaryLocation W28857331761 @default.
• W2885733176 hasRelatedWork W1561501112 @default.
• W2885733176 hasRelatedWork W1594341482 @default.
• W2885733176 hasRelatedWork W1968914638 @default.
• W2885733176 hasRelatedWork W2021603772 @default.
• W2885733176 hasRelatedWork W2038117513 @default.
• W2885733176 hasRelatedWork W2055104950 @default.
• W2885733176 hasRelatedWork W2101479622 @default.
• W2885733176 hasRelatedWork W2139289871 @default.
• W2885733176 hasRelatedWork W2263603392 @default.
• W2885733176 hasRelatedWork W2283592935 @default.
• W2885733176 hasRelatedWork W2300923936 @default.
• W2885733176 hasRelatedWork W2325134846 @default.
• W2885733176 hasRelatedWork W2331223542 @default.
• W2885733176 hasRelatedWork W2965608656 @default.
• W2885733176 hasRelatedWork W805228114 @default.

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