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• W2886773281 abstract "The influence of aluminum composition (Al%) nonuniformity on AlGaN metal-semiconductor-metal photodetectors was thoroughly studied on a device level. The Al% fluctuation was precisely measured by X-ray photoelectron spectroscopy and mapped by energy dispersive spectrometry; the dislocation density was investigated by X-ray diffraction rocking curve. Both theoretical simulation and experimental testing showed a significant difference in the responsivity, dark current, and decay time in the device with different Al%. The Al% fluctuation is also a likely cause of the long decay time of the device." @default.
• W2886773281 created "2018-08-22" @default.
• W2886773281 creator A5077360924 @default.
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• W2886773281 date "2018-10-01" @default.
• W2886773281 modified "2023-09-23" @default.
• W2886773281 title "Systematic Study on Aluminum Composition Nonuniformity in Aluminum Gallium Nitride Metal–Semiconductor–Metal Photodetectors" @default.
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• W2886773281 doi "https://doi.org/10.1109/ted.2018.2862901" @default.
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