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• W2887494401 abstract "Abstract SrTiO 3 ( STO ) film was prepared on quartz glass by laser chemical vapor deposition at a deposition temperature ( T dep ) ranged from 760 to 1104 K. Effect of the T dep on the orientation, crystallinity, texture, and microstructure of the STO film was investigated. As the T dep was increased, the preferred orientation of the STO film tended to be (110)‐orientated with corresponding texture coefficient (TC) on the (110) reflection enhanced from 2.3 to 6; meanwhile, the full width at half maximum of the ω‐scan on the (110) reflection decreased from 0.85° to 0.59°. The (110)‐oriented grains were in wedge shape about 60 × 150 nm in size, which tended to be flat at an elevated T dep of 1104 K." @default.
• W2887494401 created "2018-08-22" @default.
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• W2887494401 date "2018-09-17" @default.
• W2887494401 modified "2023-09-27" @default.
• W2887494401 title "Preparation of (110)-oriented SrTiO3 film on quartz glass by laser chemical vapor deposition" @default.
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• W2887494401 doi "https://doi.org/10.1111/jace.16009" @default.
• W2887494401 hasPublicationYear "2018" @default.
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