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- W2887742400 endingPage "094001" @default.
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- W2887742400 abstract "In this work, a reactive argon−nitrogen dc magnetron plasma for sputtering of a chromium (Cr) target is characterized with high spatial resolution by optical emission spectroscopy (OES) using molecular nitrogen emission bands at 0.5 Pa and 100 W. Beside the global gas temperature Tg, the electron temperature Te, electron density ne, and the steady-state Cr density nCr are also determined spatially resolved using a movable OES setup inside the chamber and Abel inversion. ne and Te are found to be consistent with the values measured by a Langmuir probe (LP) within the non-magnetized region along the magnetron axis in a pure Ar plasma for the same process parameters. Finally, a nitrogen content cN of 4% in the target surface is found for the reactive plasma by matching the mean steady-state chromium density measured by OES and calculated from TRIDYN simulations." @default.
- W2887742400 created "2018-08-22" @default.
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- W2887742400 date "2018-09-13" @default.
- W2887742400 modified "2023-10-18" @default.
- W2887742400 title "Spatially resolved characterization of a dc magnetron plasma using optical emission spectroscopy" @default.
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- W2887742400 doi "https://doi.org/10.1088/1361-6595/aad6d9" @default.
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