Matches in SemOpenAlex for { <https://semopenalex.org/work/W2889773576> ?p ?o ?g. }
- W2889773576 endingPage "124016" @default.
- W2889773576 startingPage "124016" @default.
- W2889773576 abstract "Strained Si/relaxed SiGe heterostructures grown on Si(110) substrates are attractive as a platform for high-hole-mobility Si-wafer-based electronic devices. The thickness of the strained Si has an impact on the performances of devices since the influence of the states at the Si/SiGe interface and the density of the diffused Ge atoms in the channel region can be suppressed by increasing the strained Si thickness. In this study, the critical layer thickness of a solid-source molecular beam epitaxy (MBE) grown strained Si film on a SiGe/Si(110) heterostructure with a Ge composition of about 30% was investigated by using polarized micro-Raman spectroscopy. Evolution of the surface morphology with the growth of the strained Si layer was also studied using atomic force microscopy. As a result, it is concluded that a nearly 70 nm thick smooth and anisotropically strained Si film can be formed on a Si0.7Ge0.3/Si(110) heterostructure by using the solid-source MBE method." @default.
- W2889773576 created "2018-09-27" @default.
- W2889773576 creator A5002286738 @default.
- W2889773576 creator A5004622516 @default.
- W2889773576 creator A5011713899 @default.
- W2889773576 creator A5017131465 @default.
- W2889773576 creator A5021331933 @default.
- W2889773576 creator A5026366957 @default.
- W2889773576 creator A5029779344 @default.
- W2889773576 creator A5035587305 @default.
- W2889773576 creator A5039343762 @default.
- W2889773576 creator A5047245733 @default.
- W2889773576 creator A5052291346 @default.
- W2889773576 creator A5061411120 @default.
- W2889773576 date "2018-11-15" @default.
- W2889773576 modified "2023-09-24" @default.
- W2889773576 title "Stability of strain in Si layers formed on SiGe/Si(110) heterostructures" @default.
- W2889773576 cites W1498191414 @default.
- W2889773576 cites W1963925554 @default.
- W2889773576 cites W1966361357 @default.
- W2889773576 cites W1968130672 @default.
- W2889773576 cites W1977134532 @default.
- W2889773576 cites W1985368728 @default.
- W2889773576 cites W1989073988 @default.
- W2889773576 cites W1998955518 @default.
- W2889773576 cites W1999917484 @default.
- W2889773576 cites W2007623813 @default.
- W2889773576 cites W2010491284 @default.
- W2889773576 cites W2013898108 @default.
- W2889773576 cites W2026318550 @default.
- W2889773576 cites W2031558231 @default.
- W2889773576 cites W2034833523 @default.
- W2889773576 cites W2039791890 @default.
- W2889773576 cites W2053008790 @default.
- W2889773576 cites W2082850968 @default.
- W2889773576 cites W2086523922 @default.
- W2889773576 cites W2091881833 @default.
- W2889773576 cites W2112545891 @default.
- W2889773576 cites W2116300364 @default.
- W2889773576 cites W2137582007 @default.
- W2889773576 cites W2138643547 @default.
- W2889773576 cites W2139546960 @default.
- W2889773576 cites W2528496527 @default.
- W2889773576 cites W2534503600 @default.
- W2889773576 cites W2563405039 @default.
- W2889773576 cites W2566435488 @default.
- W2889773576 cites W2583556347 @default.
- W2889773576 cites W2751372096 @default.
- W2889773576 cites W2767167267 @default.
- W2889773576 cites W2782096721 @default.
- W2889773576 cites W4238384442 @default.
- W2889773576 doi "https://doi.org/10.1088/1361-6641/aaeb10" @default.
- W2889773576 hasPublicationYear "2018" @default.
- W2889773576 type Work @default.
- W2889773576 sameAs 2889773576 @default.
- W2889773576 citedByCount "6" @default.
- W2889773576 countsByYear W28897735762020 @default.
- W2889773576 countsByYear W28897735762021 @default.
- W2889773576 countsByYear W28897735762023 @default.
- W2889773576 crossrefType "journal-article" @default.
- W2889773576 hasAuthorship W2889773576A5002286738 @default.
- W2889773576 hasAuthorship W2889773576A5004622516 @default.
- W2889773576 hasAuthorship W2889773576A5011713899 @default.
- W2889773576 hasAuthorship W2889773576A5017131465 @default.
- W2889773576 hasAuthorship W2889773576A5021331933 @default.
- W2889773576 hasAuthorship W2889773576A5026366957 @default.
- W2889773576 hasAuthorship W2889773576A5029779344 @default.
- W2889773576 hasAuthorship W2889773576A5035587305 @default.
- W2889773576 hasAuthorship W2889773576A5039343762 @default.
- W2889773576 hasAuthorship W2889773576A5047245733 @default.
- W2889773576 hasAuthorship W2889773576A5052291346 @default.
- W2889773576 hasAuthorship W2889773576A5061411120 @default.
- W2889773576 hasConcept C110738630 @default.
- W2889773576 hasConcept C120665830 @default.
- W2889773576 hasConcept C121332964 @default.
- W2889773576 hasConcept C160671074 @default.
- W2889773576 hasConcept C171250308 @default.
- W2889773576 hasConcept C192245399 @default.
- W2889773576 hasConcept C192562407 @default.
- W2889773576 hasConcept C2776390347 @default.
- W2889773576 hasConcept C2779227376 @default.
- W2889773576 hasConcept C2779667780 @default.
- W2889773576 hasConcept C2780389399 @default.
- W2889773576 hasConcept C3792809 @default.
- W2889773576 hasConcept C40003534 @default.
- W2889773576 hasConcept C49040817 @default.
- W2889773576 hasConcept C544956773 @default.
- W2889773576 hasConcept C79794668 @default.
- W2889773576 hasConceptScore W2889773576C110738630 @default.
- W2889773576 hasConceptScore W2889773576C120665830 @default.
- W2889773576 hasConceptScore W2889773576C121332964 @default.
- W2889773576 hasConceptScore W2889773576C160671074 @default.
- W2889773576 hasConceptScore W2889773576C171250308 @default.
- W2889773576 hasConceptScore W2889773576C192245399 @default.
- W2889773576 hasConceptScore W2889773576C192562407 @default.
- W2889773576 hasConceptScore W2889773576C2776390347 @default.
- W2889773576 hasConceptScore W2889773576C2779227376 @default.
- W2889773576 hasConceptScore W2889773576C2779667780 @default.