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• W2889905605 abstract "To preserve the brightness and coherence of x-rays produced by diffraction-limited-storage-ring (DLSR) and free-electron-laser (FEL) light sources, beamline optics must have unprecedented quality. For example, in the case of themost advanced beamlines for the DLSR source under development at the Advanced Light Source (ALS), the ALS-U, weneed highly curved x-ray mirrors with surface slope tolerances better than 50–100 nrad (root-mean-square, rms). At theALS X-Ray Optics Lab (XROL), we are working on the development of a new Optical Surface Measuring System(OSMS) with the required measurement accuracy. The OSMS is capable for the two-dimensional (2D) surface slopemetrology over the spatial range from the sub-mm scale to the clear aperture. Usage of different arrangements of theOSMS sensors allows measuring the mirrors in the face-up or side-facing orientation, corresponding to the beamlineapplication. The OSMS translation system and data acquisition software are designed to support multi scan measurementruns optimized for automatic suppression and compensation of instrumental drifts and major angular and spatialsystematic errors. Here, we discuss the recent results of the OSMS research and development project. We provide detailsof the OSMS design and describe results of experimental performance tests of the gantry system. In particular, we showthat the system is capable for measurement repeatability with strongly curved mirrors on the level of 20 nrad (rms). Thehigh angular resolution of the OSMS rotational tip-tilt stage is adequate for implementation of instrumental calibrationwith using the mirror under test as a reference. The achieved measuring accuracy is demonstrated via comparison tometrology with the carefully calibrated Developmental Long Trace Profiler, also available at the XROL." @default.
• W2889905605 created "2018-09-27" @default.
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• W2889905605 date "2018-09-17" @default.
• W2889905605 modified "2023-09-28" @default.
• W2889905605 title "The ALS OSMS: Optical Surface Measuring System for high accuracy two-dimensional slope metrology with state-of-the-art x-ray mirrors" @default.
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• W2889905605 doi "https://doi.org/10.1117/12.2321347" @default.
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