Matches in SemOpenAlex for { <https://semopenalex.org/work/W2890111977> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W2890111977 endingPage "627" @default.
- W2890111977 startingPage "620" @default.
- W2890111977 abstract "Abstract Numerical modeling of RF magnetron sputtering discharge of argon plasma properties, using a one-dimensional time-dependent fluid model in presence of the magnetic field, has been developed. The model is based on continuity equation and electron temperature equation coupled with Poisson’s equation. The electron mobility depends on magnetic field and the electron diffusivity is assumed to be dependent of electron energy by Einstein's relation. The flux is calculated by Scharfetter and Gummel schemes. Numerical simulations were resolved by using the Finite Volume Method (FVM) and the Thomas algorithm. The obtained results for the electrical properties, electron and ion densities, electrical potential, electric field and electron temperature, are in good agreement with previous works. A parametric study varying the magnetic field intensity on the discharge properties is done." @default.
- W2890111977 created "2018-09-27" @default.
- W2890111977 creator A5076614363 @default.
- W2890111977 creator A5083976477 @default.
- W2890111977 date "2020-01-01" @default.
- W2890111977 modified "2023-09-26" @default.
- W2890111977 title "Numerical modeling of the electrical properties plasma argon in a RF magnetron sputtering and with Einstein's relation of electron diffusivity" @default.
- W2890111977 cites W1967994058 @default.
- W2890111977 cites W1984987928 @default.
- W2890111977 cites W2009674323 @default.
- W2890111977 cites W2020073736 @default.
- W2890111977 cites W2027661432 @default.
- W2890111977 cites W2033856004 @default.
- W2890111977 cites W2037717684 @default.
- W2890111977 cites W2060212399 @default.
- W2890111977 cites W2065725998 @default.
- W2890111977 cites W2067946574 @default.
- W2890111977 cites W2069496119 @default.
- W2890111977 cites W2076077493 @default.
- W2890111977 cites W2076351553 @default.
- W2890111977 cites W2122374175 @default.
- W2890111977 cites W2136580614 @default.
- W2890111977 cites W2152178059 @default.
- W2890111977 doi "https://doi.org/10.1016/j.jksus.2018.09.004" @default.
- W2890111977 hasPublicationYear "2020" @default.
- W2890111977 type Work @default.
- W2890111977 sameAs 2890111977 @default.
- W2890111977 citedByCount "1" @default.
- W2890111977 countsByYear W28901119772022 @default.
- W2890111977 crossrefType "journal-article" @default.
- W2890111977 hasAuthorship W2890111977A5076614363 @default.
- W2890111977 hasAuthorship W2890111977A5083976477 @default.
- W2890111977 hasBestOaLocation W28901119771 @default.
- W2890111977 hasConcept C121332964 @default.
- W2890111977 hasConcept C127413603 @default.
- W2890111977 hasConcept C147120987 @default.
- W2890111977 hasConcept C171250308 @default.
- W2890111977 hasConcept C176217482 @default.
- W2890111977 hasConcept C184779094 @default.
- W2890111977 hasConcept C185544564 @default.
- W2890111977 hasConcept C19067145 @default.
- W2890111977 hasConcept C192562407 @default.
- W2890111977 hasConcept C21547014 @default.
- W2890111977 hasConcept C22423302 @default.
- W2890111977 hasConcept C25343380 @default.
- W2890111977 hasConcept C2780790625 @default.
- W2890111977 hasConcept C30475298 @default.
- W2890111977 hasConcept C37668627 @default.
- W2890111977 hasConcept C41008148 @default.
- W2890111977 hasConcept C547737533 @default.
- W2890111977 hasConcept C61427134 @default.
- W2890111977 hasConcept C69357855 @default.
- W2890111977 hasConcept C77088390 @default.
- W2890111977 hasConcept C82706917 @default.
- W2890111977 hasConcept C97355855 @default.
- W2890111977 hasConceptScore W2890111977C121332964 @default.
- W2890111977 hasConceptScore W2890111977C127413603 @default.
- W2890111977 hasConceptScore W2890111977C147120987 @default.
- W2890111977 hasConceptScore W2890111977C171250308 @default.
- W2890111977 hasConceptScore W2890111977C176217482 @default.
- W2890111977 hasConceptScore W2890111977C184779094 @default.
- W2890111977 hasConceptScore W2890111977C185544564 @default.
- W2890111977 hasConceptScore W2890111977C19067145 @default.
- W2890111977 hasConceptScore W2890111977C192562407 @default.
- W2890111977 hasConceptScore W2890111977C21547014 @default.
- W2890111977 hasConceptScore W2890111977C22423302 @default.
- W2890111977 hasConceptScore W2890111977C25343380 @default.
- W2890111977 hasConceptScore W2890111977C2780790625 @default.
- W2890111977 hasConceptScore W2890111977C30475298 @default.
- W2890111977 hasConceptScore W2890111977C37668627 @default.
- W2890111977 hasConceptScore W2890111977C41008148 @default.
- W2890111977 hasConceptScore W2890111977C547737533 @default.
- W2890111977 hasConceptScore W2890111977C61427134 @default.
- W2890111977 hasConceptScore W2890111977C69357855 @default.
- W2890111977 hasConceptScore W2890111977C77088390 @default.
- W2890111977 hasConceptScore W2890111977C82706917 @default.
- W2890111977 hasConceptScore W2890111977C97355855 @default.
- W2890111977 hasIssue "1" @default.
- W2890111977 hasLocation W28901119771 @default.
- W2890111977 hasOpenAccess W2890111977 @default.
- W2890111977 hasPrimaryLocation W28901119771 @default.
- W2890111977 hasRelatedWork W1624341531 @default.
- W2890111977 hasRelatedWork W1964463203 @default.
- W2890111977 hasRelatedWork W1991214065 @default.
- W2890111977 hasRelatedWork W1997830337 @default.
- W2890111977 hasRelatedWork W2033091496 @default.
- W2890111977 hasRelatedWork W2093114583 @default.
- W2890111977 hasRelatedWork W2334620464 @default.
- W2890111977 hasRelatedWork W2610459968 @default.
- W2890111977 hasRelatedWork W301690088 @default.
- W2890111977 hasRelatedWork W3104083206 @default.
- W2890111977 hasVolume "32" @default.
- W2890111977 isParatext "false" @default.
- W2890111977 isRetracted "false" @default.
- W2890111977 magId "2890111977" @default.
- W2890111977 workType "article" @default.