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- W2890120550 abstract "We report on the fabrication of an oxide-confined 850 nm VCSEL capable of wavelength tuning and small-signal modulation. The wavelength tuning is enabled by actuating a suspended high-contrast grating (HCG) with micro-electro-mechanical structures (MEMS). A resonant frequency up to 6.3 GHz was obtained by small-signal modulation on the fabricated VCSEL with all-top metal contact. The integration of wavelength tuning and high direct-modulation speed in a single VCSEL is deemed promising for high speed data communication applications." @default.
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- W2890120550 date "2018-05-26" @default.
- W2890120550 modified "2023-09-26" @default.
- W2890120550 title "Fabrication of wavelength-tunable and small-signal modulated VCSEL emitting at the 850 nm regime" @default.
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