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- W2890121481 abstract "The crystal quality evolution of AlN films <italic>via</italic> high-temperature (HT) annealing under nitrogen is investigated." @default.
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- W2890121481 date "2018-01-01" @default.
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- W2890121481 title "Crystal quality evolution of AlN films <i>via</i> high-temperature annealing under ambient N<sub>2</sub> conditions" @default.
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- W2890121481 doi "https://doi.org/10.1039/c8ce00967h" @default.
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