Matches in SemOpenAlex for { <https://semopenalex.org/work/W2890170356> ?p ?o ?g. }
- W2890170356 endingPage "149" @default.
- W2890170356 startingPage "143" @default.
- W2890170356 abstract "This paper discussed about the morphological and electrical properties of c-axis oriented aluminium nitride (AlN) thin films grown on Si (100) and Si (110) substrates by direct current (DC) reactive sputtering technique. Both the films showed intense (002) peak with the texture coefficient (γ) of 3.1 and 2.8 corresponding to Si (100) and (110) substrates. The AlN/Si (110) have grain sizes (20–30 nm) compared to the relatively denser grains (30–40 nm) of the film on Si (100) substrate. Both the films exhibited slanted columnar structures with slanting angle of 15° (Si (100) substrate) and 20° (Si (110) substrate). The dielectric constant values of the films at low frequency are found to be 7.4 and 8.8 corresponding to the Si (100) and Si (110) substrates respectively. The variation in dielectric constant values over the low frequency regime seems to be due to the presence of trapped charges present in the AlN layer and AlN‑silicon interface (interface trap density~1012 cm-2 eV−1). The flat band voltages are found to be 0.85 V and − 0.35 V corresponding to the Si (100) and (110) substrates respectively. The AlN/Si (100) film showed poor leakage current density ~ 10−4 A/cm−2 as compared to AlN/Si (110) (~ 10−5 A/cm−2). The AlN films exhibited dielectric breakdown field of 4.4 MV/cm and 6.6 MV/cm corresponding to the Si (100) and Si (110) substrates respectively." @default.
- W2890170356 created "2018-09-27" @default.
- W2890170356 creator A5015269967 @default.
- W2890170356 creator A5016015126 @default.
- W2890170356 creator A5030232966 @default.
- W2890170356 creator A5032572076 @default.
- W2890170356 creator A5071261693 @default.
- W2890170356 date "2018-11-01" @default.
- W2890170356 modified "2023-09-23" @default.
- W2890170356 title "Electrical and structural characteristics of sputtered c-oriented AlN thin films on Si (100) and Si (110) substrates" @default.
- W2890170356 cites W1492740626 @default.
- W2890170356 cites W1965740302 @default.
- W2890170356 cites W1967115416 @default.
- W2890170356 cites W1967888975 @default.
- W2890170356 cites W1971958003 @default.
- W2890170356 cites W1975457067 @default.
- W2890170356 cites W1978306416 @default.
- W2890170356 cites W1978665828 @default.
- W2890170356 cites W1983834213 @default.
- W2890170356 cites W1985281027 @default.
- W2890170356 cites W1986284610 @default.
- W2890170356 cites W1988009429 @default.
- W2890170356 cites W1993111792 @default.
- W2890170356 cites W1996886220 @default.
- W2890170356 cites W2000529034 @default.
- W2890170356 cites W2008618812 @default.
- W2890170356 cites W2017625189 @default.
- W2890170356 cites W2024697034 @default.
- W2890170356 cites W2026452398 @default.
- W2890170356 cites W2030664155 @default.
- W2890170356 cites W2032261336 @default.
- W2890170356 cites W2043157933 @default.
- W2890170356 cites W2044341201 @default.
- W2890170356 cites W2047723912 @default.
- W2890170356 cites W2059310165 @default.
- W2890170356 cites W2062195023 @default.
- W2890170356 cites W2066129911 @default.
- W2890170356 cites W2075033284 @default.
- W2890170356 cites W2091294104 @default.
- W2890170356 cites W2096109888 @default.
- W2890170356 cites W2124879210 @default.
- W2890170356 cites W2130123221 @default.
- W2890170356 cites W2130736257 @default.
- W2890170356 cites W2145377689 @default.
- W2890170356 cites W2184486251 @default.
- W2890170356 cites W2413291027 @default.
- W2890170356 cites W2560308486 @default.
- W2890170356 cites W2770021302 @default.
- W2890170356 doi "https://doi.org/10.1016/j.tsf.2018.09.016" @default.
- W2890170356 hasPublicationYear "2018" @default.
- W2890170356 type Work @default.
- W2890170356 sameAs 2890170356 @default.
- W2890170356 citedByCount "13" @default.
- W2890170356 countsByYear W28901703562020 @default.
- W2890170356 countsByYear W28901703562021 @default.
- W2890170356 countsByYear W28901703562022 @default.
- W2890170356 countsByYear W28901703562023 @default.
- W2890170356 crossrefType "journal-article" @default.
- W2890170356 hasAuthorship W2890170356A5015269967 @default.
- W2890170356 hasAuthorship W2890170356A5016015126 @default.
- W2890170356 hasAuthorship W2890170356A5030232966 @default.
- W2890170356 hasAuthorship W2890170356A5032572076 @default.
- W2890170356 hasAuthorship W2890170356A5071261693 @default.
- W2890170356 hasConcept C111368507 @default.
- W2890170356 hasConcept C113196181 @default.
- W2890170356 hasConcept C115961682 @default.
- W2890170356 hasConcept C127313418 @default.
- W2890170356 hasConcept C133386390 @default.
- W2890170356 hasConcept C154945302 @default.
- W2890170356 hasConcept C159985019 @default.
- W2890170356 hasConcept C171250308 @default.
- W2890170356 hasConcept C185592680 @default.
- W2890170356 hasConcept C19067145 @default.
- W2890170356 hasConcept C192562407 @default.
- W2890170356 hasConcept C194760766 @default.
- W2890170356 hasConcept C22423302 @default.
- W2890170356 hasConcept C2777289219 @default.
- W2890170356 hasConcept C2779227376 @default.
- W2890170356 hasConcept C2780162792 @default.
- W2890170356 hasConcept C2781195486 @default.
- W2890170356 hasConcept C41008148 @default.
- W2890170356 hasConcept C43617362 @default.
- W2890170356 hasConcept C49040817 @default.
- W2890170356 hasConcept C513153333 @default.
- W2890170356 hasConcept C544956773 @default.
- W2890170356 hasConceptScore W2890170356C111368507 @default.
- W2890170356 hasConceptScore W2890170356C113196181 @default.
- W2890170356 hasConceptScore W2890170356C115961682 @default.
- W2890170356 hasConceptScore W2890170356C127313418 @default.
- W2890170356 hasConceptScore W2890170356C133386390 @default.
- W2890170356 hasConceptScore W2890170356C154945302 @default.
- W2890170356 hasConceptScore W2890170356C159985019 @default.
- W2890170356 hasConceptScore W2890170356C171250308 @default.
- W2890170356 hasConceptScore W2890170356C185592680 @default.
- W2890170356 hasConceptScore W2890170356C19067145 @default.
- W2890170356 hasConceptScore W2890170356C192562407 @default.
- W2890170356 hasConceptScore W2890170356C194760766 @default.
- W2890170356 hasConceptScore W2890170356C22423302 @default.