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- W2890179157 abstract "We propose a new Cu/SiO hybrid bonding process using ultrathin Mn film at the bonding interface. In this process, bonding stability is improved because the bonding interface consists of only Mn. In addition, Mn on SiO forms a MnSiO, which is known as a diffusion barrier for Cu during thermal processing, resulting in improved reliability of interconnects in areas of misalignment. To demonstrate the feasibility of this process, we evaluated the bonding strength of Mn/Mn interface and electrical properties of ultrathin Mn film on SiO layer. Good bonding strength was obtained at heating temperatures of 350°C or more. Moreover, it was confirmed that the resistivity of ultrathin Mn film on SiO layer was increased by heat treatment." @default.
- W2890179157 created "2018-09-27" @default.
- W2890179157 creator A5019985872 @default.
- W2890179157 creator A5033522066 @default.
- W2890179157 creator A5037730997 @default.
- W2890179157 creator A5046975249 @default.
- W2890179157 creator A5047364917 @default.
- W2890179157 creator A5091638263 @default.
- W2890179157 date "2018-06-01" @default.
- W2890179157 modified "2023-09-26" @default.
- W2890179157 title "Novel Bonding Process Using Ultra-thin Mn for Highly Robust and Reliable Cu/SiO Hybrid Bonding" @default.
- W2890179157 doi "https://doi.org/10.1109/iitc.2018.8457124" @default.
- W2890179157 hasPublicationYear "2018" @default.
- W2890179157 type Work @default.
- W2890179157 sameAs 2890179157 @default.
- W2890179157 citedByCount "2" @default.
- W2890179157 countsByYear W28901791572019 @default.
- W2890179157 countsByYear W28901791572020 @default.
- W2890179157 crossrefType "proceedings-article" @default.
- W2890179157 hasAuthorship W2890179157A5019985872 @default.
- W2890179157 hasAuthorship W2890179157A5033522066 @default.
- W2890179157 hasAuthorship W2890179157A5037730997 @default.
- W2890179157 hasAuthorship W2890179157A5046975249 @default.
- W2890179157 hasAuthorship W2890179157A5047364917 @default.
- W2890179157 hasAuthorship W2890179157A5091638263 @default.
- W2890179157 hasConcept C119599485 @default.
- W2890179157 hasConcept C127413603 @default.
- W2890179157 hasConcept C159985019 @default.
- W2890179157 hasConcept C178213299 @default.
- W2890179157 hasConcept C178790620 @default.
- W2890179157 hasConcept C185592680 @default.
- W2890179157 hasConcept C191897082 @default.
- W2890179157 hasConcept C192562407 @default.
- W2890179157 hasConcept C201414436 @default.
- W2890179157 hasConcept C201845621 @default.
- W2890179157 hasConcept C24326235 @default.
- W2890179157 hasConcept C2778856520 @default.
- W2890179157 hasConcept C2779227376 @default.
- W2890179157 hasConcept C2984173401 @default.
- W2890179157 hasConcept C42360764 @default.
- W2890179157 hasConcept C59061564 @default.
- W2890179157 hasConcept C69990965 @default.
- W2890179157 hasConceptScore W2890179157C119599485 @default.
- W2890179157 hasConceptScore W2890179157C127413603 @default.
- W2890179157 hasConceptScore W2890179157C159985019 @default.
- W2890179157 hasConceptScore W2890179157C178213299 @default.
- W2890179157 hasConceptScore W2890179157C178790620 @default.
- W2890179157 hasConceptScore W2890179157C185592680 @default.
- W2890179157 hasConceptScore W2890179157C191897082 @default.
- W2890179157 hasConceptScore W2890179157C192562407 @default.
- W2890179157 hasConceptScore W2890179157C201414436 @default.
- W2890179157 hasConceptScore W2890179157C201845621 @default.
- W2890179157 hasConceptScore W2890179157C24326235 @default.
- W2890179157 hasConceptScore W2890179157C2778856520 @default.
- W2890179157 hasConceptScore W2890179157C2779227376 @default.
- W2890179157 hasConceptScore W2890179157C2984173401 @default.
- W2890179157 hasConceptScore W2890179157C42360764 @default.
- W2890179157 hasConceptScore W2890179157C59061564 @default.
- W2890179157 hasConceptScore W2890179157C69990965 @default.
- W2890179157 hasLocation W28901791571 @default.
- W2890179157 hasOpenAccess W2890179157 @default.
- W2890179157 hasPrimaryLocation W28901791571 @default.
- W2890179157 hasRelatedWork W1558189408 @default.
- W2890179157 hasRelatedWork W1999135641 @default.
- W2890179157 hasRelatedWork W2032127413 @default.
- W2890179157 hasRelatedWork W2132465209 @default.
- W2890179157 hasRelatedWork W2250887898 @default.
- W2890179157 hasRelatedWork W2594447147 @default.
- W2890179157 hasRelatedWork W2807662267 @default.
- W2890179157 hasRelatedWork W2808033958 @default.
- W2890179157 hasRelatedWork W2883206205 @default.
- W2890179157 hasRelatedWork W2903311361 @default.
- W2890179157 hasRelatedWork W2952631323 @default.
- W2890179157 hasRelatedWork W2971335276 @default.
- W2890179157 hasRelatedWork W2985203923 @default.
- W2890179157 hasRelatedWork W2991668990 @default.
- W2890179157 hasRelatedWork W3016160841 @default.
- W2890179157 hasRelatedWork W3047760617 @default.
- W2890179157 hasRelatedWork W3047997847 @default.
- W2890179157 hasRelatedWork W3100858038 @default.
- W2890179157 hasRelatedWork W3172719189 @default.
- W2890179157 hasRelatedWork W3193867763 @default.
- W2890179157 isParatext "false" @default.
- W2890179157 isRetracted "false" @default.
- W2890179157 magId "2890179157" @default.
- W2890179157 workType "article" @default.