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• W2890198397 endingPage "17511" @default.
• W2890198397 startingPage "17494" @default.
• W2890198397 abstract "Oxygen plasmas feature certain properties that make them attractive not only for material removal<italic>via</italic>etching and sputtering, but also for driving and sustaining nucleation and growth of various nanostructures in plasma bulk and on plasma-exposed surfaces." @default.
• W2890198397 created "2018-09-27" @default.
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• W2890198397 date "2018-01-01" @default.
• W2890198397 modified "2023-10-10" @default.
• W2890198397 title "Oxygen plasmas: a sharp chisel and handy trowel for nanofabrication" @default.
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