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- W2890513566 abstract "A resonating force sensor is studied, which is composed of a metal bridge coated with a piezoelectric film for force detection. It is thought to operate the sensor at the second flexural vibration mode having one node at the center of the bridge. Resonance frequency and piezoelectric coupling are investigated in the frame of an analytical model, and compared with finite element analysis (FEA) in a desired force range. The resonance frequency-force relation derived from the analytical model is close the the FEA result in the force range. The coupling factor-force relation from the analytical model agrees with the one from FEA in the small force region, but it shows lower coupling than the FEA result in the large force region." @default.
- W2890513566 created "2018-09-27" @default.
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- W2890513566 date "2018-05-01" @default.
- W2890513566 modified "2023-10-03" @default.
- W2890513566 title "Piezoelectric Resonating Force Sensor in the Second Vibration Mode" @default.
- W2890513566 doi "https://doi.org/10.1109/isaf.2018.8463273" @default.
- W2890513566 hasPublicationYear "2018" @default.
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